IT1038098B - Sistema per l accrescimento di silicio monocristallino - Google Patents
Sistema per l accrescimento di silicio monocristallinoInfo
- Publication number
- IT1038098B IT1038098B IT23303/75A IT2330375A IT1038098B IT 1038098 B IT1038098 B IT 1038098B IT 23303/75 A IT23303/75 A IT 23303/75A IT 2330375 A IT2330375 A IT 2330375A IT 1038098 B IT1038098 B IT 1038098B
- Authority
- IT
- Italy
- Prior art keywords
- growth
- monocrystalline silicon
- monocrystalline
- silicon
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/483,511 US3953281A (en) | 1974-06-27 | 1974-06-27 | Method and system for growing monocrystalline ingots |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1038098B true IT1038098B (it) | 1979-11-20 |
Family
ID=23920354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT23303/75A IT1038098B (it) | 1974-06-27 | 1975-05-14 | Sistema per l accrescimento di silicio monocristallino |
Country Status (6)
Country | Link |
---|---|
US (1) | US3953281A (it) |
JP (1) | JPS5325717B2 (it) |
DE (1) | DE2522611C2 (it) |
FR (1) | FR2276095A1 (it) |
GB (1) | GB1447222A (it) |
IT (1) | IT1038098B (it) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52106451U (it) * | 1976-02-04 | 1977-08-13 | ||
US4045181A (en) * | 1976-12-27 | 1977-08-30 | Monsanto Company | Apparatus for zone refining |
US4201746A (en) * | 1976-12-27 | 1980-05-06 | Monsanto Company | Apparatus for zone refining |
US4235848A (en) * | 1978-06-15 | 1980-11-25 | Apilat Vitaly Y | Apparatus for pulling single crystal from melt on a seed |
FR2433970B1 (fr) * | 1978-08-25 | 1981-01-30 | Gnii Redkometa | Dispositif pour le tirage d'un monocristal sur une amorce a partir d'un bain de fusion |
US4360499A (en) * | 1981-06-22 | 1982-11-23 | Rca Corporation | Bellows assembly for crystal ribbon puller |
US4511428A (en) * | 1982-07-09 | 1985-04-16 | International Business Machines Corporation | Method of controlling oxygen content and distribution in grown silicon crystals |
DE3743951A1 (de) * | 1986-12-26 | 1988-07-07 | Toshiba Ceramics Co | Einrichtung zum ziehen von siliziumeinkristallen mit einem waermeisolierzylinder und verfahren zur herstellung des materials desselben |
JPH06456Y2 (ja) * | 1989-08-29 | 1994-01-05 | 信越半導体株式会社 | 単結晶引上装置のシール構造 |
JPH04260686A (ja) * | 1991-02-08 | 1992-09-16 | Shin Etsu Handotai Co Ltd | 単結晶引上装置 |
JPH04105312U (ja) * | 1991-02-20 | 1992-09-10 | 株式会社中村多喜彌商店 | 網目天井材用吊り具 |
JP3488531B2 (ja) * | 1994-12-19 | 2004-01-19 | コマツ電子金属株式会社 | 多結晶棒の吊り具 |
JP3402012B2 (ja) * | 1995-04-21 | 2003-04-28 | 信越半導体株式会社 | 単結晶の成長方法及び装置 |
US5911825A (en) * | 1997-09-30 | 1999-06-15 | Seh America, Inc. | Low oxygen heater |
JP3694736B2 (ja) * | 2001-06-12 | 2005-09-14 | 独立行政法人産業技術総合研究所 | 酸化亜鉛単結晶の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US396430A (en) * | 1889-01-22 | Helm reichel | ||
US719466A (en) * | 1902-03-08 | 1903-02-03 | Nelson Hiss | Traction apparatus. |
US3173765A (en) * | 1955-03-18 | 1965-03-16 | Itt | Method of making crystalline silicon semiconductor material |
US3275417A (en) * | 1963-10-15 | 1966-09-27 | Texas Instruments Inc | Production of dislocation-free silicon single crystals |
US3337303A (en) * | 1965-03-01 | 1967-08-22 | Elmat Corp | Crystal growing apparatus |
US3650701A (en) * | 1970-07-22 | 1972-03-21 | Commissariat Energie Atomique | Apparatus for growing crystalline bodies |
US3679370A (en) * | 1970-07-31 | 1972-07-25 | Western Electric Co | Crystal grower with expandable chamber |
-
1974
- 1974-06-27 US US05/483,511 patent/US3953281A/en not_active Expired - Lifetime
-
1975
- 1975-05-14 IT IT23303/75A patent/IT1038098B/it active
- 1975-05-21 GB GB2187775A patent/GB1447222A/en not_active Expired
- 1975-05-21 FR FR7516539A patent/FR2276095A1/fr active Granted
- 1975-05-22 DE DE2522611A patent/DE2522611C2/de not_active Expired
- 1975-06-04 JP JP6665975A patent/JPS5325717B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
US3953281A (en) | 1976-04-27 |
DE2522611A1 (de) | 1976-01-15 |
JPS5325717B2 (it) | 1978-07-28 |
GB1447222A (en) | 1976-08-25 |
JPS519083A (it) | 1976-01-24 |
FR2276095B1 (it) | 1977-04-15 |
DE2522611C2 (de) | 1985-11-14 |
FR2276095A1 (fr) | 1976-01-23 |
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