IT1022104B - Apparecchiatura per applicare un agente fluido ad un pezzo in la vorazione - Google Patents

Apparecchiatura per applicare un agente fluido ad un pezzo in la vorazione

Info

Publication number
IT1022104B
IT1022104B IT27459/74A IT2745974A IT1022104B IT 1022104 B IT1022104 B IT 1022104B IT 27459/74 A IT27459/74 A IT 27459/74A IT 2745974 A IT2745974 A IT 2745974A IT 1022104 B IT1022104 B IT 1022104B
Authority
IT
Italy
Prior art keywords
applying
equipment
working piece
fluid agent
fluid
Prior art date
Application number
IT27459/74A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1022104B publication Critical patent/IT1022104B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Spray Control Apparatus (AREA)
  • Drying Of Solid Materials (AREA)
IT27459/74A 1973-11-07 1974-09-19 Apparecchiatura per applicare un agente fluido ad un pezzo in la vorazione IT1022104B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00413753A US3849906A (en) 1973-11-07 1973-11-07 Rotary fluid applicator

Publications (1)

Publication Number Publication Date
IT1022104B true IT1022104B (it) 1978-03-20

Family

ID=23638474

Family Applications (1)

Application Number Title Priority Date Filing Date
IT27459/74A IT1022104B (it) 1973-11-07 1974-09-19 Apparecchiatura per applicare un agente fluido ad un pezzo in la vorazione

Country Status (7)

Country Link
US (1) US3849906A (it)
JP (1) JPS5074857A (it)
CA (1) CA1035574A (it)
DE (1) DE2442309A1 (it)
FR (1) FR2249717B1 (it)
GB (1) GB1482106A (it)
IT (1) IT1022104B (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417640A (en) * 1977-07-08 1979-02-09 Mitsubishi Electric Corp Malfunction preventive device for integrated circuit
US4429983A (en) 1982-03-22 1984-02-07 International Business Machines Corporation Developing apparatus for exposed photoresist coated wafers
DE3502648A1 (de) * 1985-01-26 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur mischung eines haupt-gasstroms mit mindestens einem neben-gasstrom
DE3503089A1 (de) * 1985-01-30 1986-07-31 Carl Prof. Dr.-Ing. 5100 Aachen Kramer Vorrichtung zur gleichmaessigen beaufschlagung einer planen flaeche mit einem gas
EP3577682A4 (en) * 2017-02-06 2020-11-25 Planar Semiconductor, Inc. CLEANING MECHANISM FOR SUBSTRATE BASED ON LIGHT IN THE SUBNANOMETER RANGE
TWI770115B (zh) * 2017-02-06 2022-07-11 新加坡商平面半導體公司 加工汙水之去除
WO2018144446A1 (en) * 2017-02-06 2018-08-09 Planar Semiconductor, Inc. Sub-nanometer-level substrate cleaning mechanism
GB2601472A (en) * 2020-06-30 2022-06-08 Universal Circuit Board Equipment Co Ltd Surface treatment device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2602003A (en) * 1946-10-30 1952-07-01 Willard Storage Battery Co Rotating apparatus for blowing loose foreign material from articles
US2532494A (en) * 1946-11-23 1950-12-05 Mcgraw Electric Co Method of making paper tubes

Also Published As

Publication number Publication date
GB1482106A (en) 1977-08-03
FR2249717A1 (it) 1975-05-30
CA1035574A (en) 1978-08-01
US3849906A (en) 1974-11-26
DE2442309A1 (de) 1975-05-22
JPS5074857A (it) 1975-06-19
FR2249717B1 (it) 1976-12-31

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