IN2014MN01027A - - Google Patents
Info
- Publication number
- IN2014MN01027A IN2014MN01027A IN1027MUN2014A IN2014MN01027A IN 2014MN01027 A IN2014MN01027 A IN 2014MN01027A IN 1027MUN2014 A IN1027MUN2014 A IN 1027MUN2014A IN 2014MN01027 A IN2014MN01027 A IN 2014MN01027A
- Authority
- IN
- India
- Prior art keywords
- substrate layer
- layer
- wafer
- sheet
- circuit
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
Abstract
A chipset (100) includes a sheet (102) of glass quartz or sapphire and a first wafer (104) having at least one first circuit layer (112) on a first side (108) of a first substrate layer (106). The first wafer (104) is connected to the sheet (102) such that the at least one first circuit layer (112) is located between the first substrate layer (106) and the sheet (102). A second wafer (126) having at least one second circuit layer (126) on a first side (122) of a second substrate layer (120) is connected to the first substrate layer (106) such that the at least one second circuit layer (126) is located between the second substrate layer (120) and the first substrate layer (106). A method of forming a chipset is also disclosed.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161560471P | 2011-11-16 | 2011-11-16 | |
US13/356,717 US9496255B2 (en) | 2011-11-16 | 2012-01-24 | Stacked CMOS chipset having an insulating layer and a secondary layer and method of forming same |
PCT/US2012/065644 WO2013075007A1 (en) | 2011-11-16 | 2012-11-16 | Stacked chipset having an insulating layer and a secondary layer and method of forming same |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014MN01027A true IN2014MN01027A (en) | 2015-05-01 |
Family
ID=48280458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN1027MUN2014 IN2014MN01027A (en) | 2011-11-16 | 2012-11-16 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9496255B2 (en) |
EP (1) | EP2780942A1 (en) |
JP (2) | JP5937225B2 (en) |
KR (2) | KR101759689B1 (en) |
CN (1) | CN104054175B (en) |
IN (1) | IN2014MN01027A (en) |
WO (1) | WO2013075007A1 (en) |
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CN104058363B (en) * | 2013-03-22 | 2016-01-20 | 上海丽恒光微电子科技有限公司 | Based on the display unit and forming method thereof of MEMS transmissive light valve |
US9418985B2 (en) * | 2013-07-16 | 2016-08-16 | Qualcomm Incorporated | Complete system-on-chip (SOC) using monolithic three dimensional (3D) integrated circuit (IC) (3DIC) technology |
US9032353B2 (en) | 2013-10-10 | 2015-05-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for three-dimensional layout design of integrated circuit elements in stacked CMOS |
US9257407B2 (en) * | 2013-10-28 | 2016-02-09 | Qualcomm Incorporated | Heterogeneous channel material integration into wafer |
US9443758B2 (en) * | 2013-12-11 | 2016-09-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Connecting techniques for stacked CMOS devices |
JP6454716B2 (en) | 2014-01-23 | 2019-01-16 | サンエディソン・セミコンダクター・リミテッドSunEdison Semiconductor Limited | High resistivity SOI wafer and manufacturing method thereof |
US9786613B2 (en) * | 2014-08-07 | 2017-10-10 | Qualcomm Incorporated | EMI shield for high frequency layer transferred devices |
US20160043108A1 (en) * | 2014-08-07 | 2016-02-11 | Silanna Semiconductor U.S.A., Inc. | Semiconductor Structure with Multiple Active Layers in an SOI Wafer |
US9899499B2 (en) | 2014-09-04 | 2018-02-20 | Sunedison Semiconductor Limited (Uen201334164H) | High resistivity silicon-on-insulator wafer manufacturing method for reducing substrate loss |
WO2016081367A1 (en) | 2014-11-18 | 2016-05-26 | Sunedison Semiconductor Limited | HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING A CHARGE TRAPPING LAYER FORMED BY He-N2 CO-IMPLANTATION |
EP3573094B1 (en) | 2014-11-18 | 2023-01-04 | GlobalWafers Co., Ltd. | High resistivity semiconductor-on-insulator wafer and a method of manufacturing |
WO2016081313A1 (en) | 2014-11-18 | 2016-05-26 | Sunedison Semiconductor Limited | A method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers |
WO2016081363A1 (en) * | 2014-11-18 | 2016-05-26 | Sunedison Semiconductor Limited | A system-on-chip on a semiconductor-on-insulator wafer and a method of manufacturing |
JP6517360B2 (en) | 2015-03-03 | 2019-05-22 | サンエディソン・セミコンダクター・リミテッドSunEdison Semiconductor Limited | Method of growing polycrystalline silicon film for charge trapping on silicon substrate capable of controlling film stress |
US9881832B2 (en) | 2015-03-17 | 2018-01-30 | Sunedison Semiconductor Limited (Uen201334164H) | Handle substrate for use in manufacture of semiconductor-on-insulator structure and method of manufacturing thereof |
US10290533B2 (en) | 2015-03-17 | 2019-05-14 | Globalwafers Co., Ltd. | Thermally stable charge trapping layer for use in manufacture of semiconductor-on-insulator structures |
US10304722B2 (en) | 2015-06-01 | 2019-05-28 | Globalwafers Co., Ltd. | Method of manufacturing semiconductor-on-insulator |
EP3304586B1 (en) | 2015-06-01 | 2020-10-07 | GlobalWafers Co., Ltd. | A method of manufacturing silicon germanium-on-insulator |
US20160379943A1 (en) * | 2015-06-25 | 2016-12-29 | Skyworks Solutions, Inc. | Method and apparatus for high performance passive-active circuit integration |
WO2017019676A1 (en) * | 2015-07-28 | 2017-02-02 | Skyworks Solutions, Inc. | Integrated passive device on soi substrate |
US9768109B2 (en) * | 2015-09-22 | 2017-09-19 | Qualcomm Incorporated | Integrated circuits (ICS) on a glass substrate |
JP6585978B2 (en) | 2015-09-24 | 2019-10-02 | ラピスセミコンダクタ株式会社 | Semiconductor device and manufacturing method of semiconductor device |
CN117198983A (en) | 2015-11-20 | 2023-12-08 | 环球晶圆股份有限公司 | Manufacturing method for flattening semiconductor surface |
US10256863B2 (en) * | 2016-01-11 | 2019-04-09 | Qualcomm Incorporated | Monolithic integration of antenna switch and diplexer |
WO2017142849A1 (en) | 2016-02-19 | 2017-08-24 | Sunedison Semiconductor Limited | Semiconductor on insulator structure comprising a buried high resistivity layer |
US9831115B2 (en) | 2016-02-19 | 2017-11-28 | Sunedison Semiconductor Limited (Uen201334164H) | Process flow for manufacturing semiconductor on insulator structures in parallel |
WO2017142704A1 (en) | 2016-02-19 | 2017-08-24 | Sunedison Semiconductor Limited | High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed on a substrate with a rough surface |
US10573550B2 (en) | 2016-03-07 | 2020-02-25 | Globalwafers Co., Ltd. | Semiconductor on insulator structure comprising a plasma oxide layer and method of manufacture thereof |
EP3427293B1 (en) | 2016-03-07 | 2021-05-05 | Globalwafers Co., Ltd. | Semiconductor on insulator structure comprising a low temperature flowable oxide layer and method of manufacture thereof |
US11114332B2 (en) | 2016-03-07 | 2021-09-07 | Globalwafers Co., Ltd. | Semiconductor on insulator structure comprising a plasma nitride layer and method of manufacture thereof |
WO2017155804A1 (en) | 2016-03-07 | 2017-09-14 | Sunedison Semiconductor Limited | Method of manufacturing a semiconductor on insulator structure by a pressurized bond treatment |
WO2017214084A1 (en) | 2016-06-08 | 2017-12-14 | Sunedison Semiconductor Limited | High resistivity single crystal silicon ingot and wafer having improved mechanical strength |
US10269617B2 (en) | 2016-06-22 | 2019-04-23 | Globalwafers Co., Ltd. | High resistivity silicon-on-insulator substrate comprising an isolation region |
US20180068886A1 (en) * | 2016-09-02 | 2018-03-08 | Qualcomm Incorporated | Porous semiconductor layer transfer for an integrated circuit structure |
US9812580B1 (en) * | 2016-09-06 | 2017-11-07 | Qualcomm Incorporated | Deep trench active device with backside body contact |
US10546771B2 (en) | 2016-10-26 | 2020-01-28 | Globalwafers Co., Ltd. | High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency |
CN110352484B (en) | 2016-12-05 | 2022-12-06 | 环球晶圆股份有限公司 | High resistivity silicon-on-insulator structure and method of making same |
KR102453743B1 (en) | 2016-12-28 | 2022-10-11 | 썬에디슨 세미컨덕터 리미티드 | Method of treating silicon wafers to have intrinsic gettering and gate oxide integrity yield |
JP6881066B2 (en) * | 2017-06-19 | 2021-06-02 | 大日本印刷株式会社 | Manufacturing method of through silicon via substrate and through silicon via substrate |
KR102390772B1 (en) | 2017-07-14 | 2022-04-25 | 썬에디슨 세미컨덕터 리미티드 | Method of Fabrication of Semiconductor-on-Insulator Structures |
EP3785293B1 (en) | 2018-04-27 | 2023-06-07 | GlobalWafers Co., Ltd. | Light assisted platelet formation facilitating layer transfer from a semiconductor donor substrate |
JP2019212729A (en) * | 2018-06-04 | 2019-12-12 | ルネサスエレクトロニクス株式会社 | Semiconductor device and method for manufacturing semiconductor device |
WO2019236320A1 (en) | 2018-06-08 | 2019-12-12 | Globalwafers Co., Ltd. | Method for transfer of a thin layer of silicon |
FR3091004B1 (en) * | 2018-12-24 | 2020-12-04 | Soitec Silicon On Insulator | SEMICONDUCTOR TYPE STRUCTURE FOR DIGITAL AND RADIO FREQUENCY APPLICATIONS |
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JP2020141090A (en) * | 2019-03-01 | 2020-09-03 | ソニーセミコンダクタソリューションズ株式会社 | Capacitive element, semiconductor element substrate, and electronic device |
KR20220008093A (en) | 2020-07-13 | 2022-01-20 | 삼성전자주식회사 | Semiconductor package and method of manufacturing the semiconductor package |
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JP2001102523A (en) | 1999-09-28 | 2001-04-13 | Sony Corp | Thin-film device and manufacturing method therefor |
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TW548860B (en) | 2001-06-20 | 2003-08-21 | Semiconductor Energy Lab | Light emitting device and method of manufacturing the same |
JP4244120B2 (en) | 2001-06-20 | 2009-03-25 | 株式会社半導体エネルギー研究所 | Light emitting device and manufacturing method thereof |
AU2003255254A1 (en) | 2002-08-08 | 2004-02-25 | Glenn J. Leedy | Vertical system integration |
JP2004165269A (en) | 2002-11-11 | 2004-06-10 | Canon Inc | Laminated semiconductor device |
JP2004349513A (en) | 2003-05-22 | 2004-12-09 | Seiko Epson Corp | Thin film circuit device, its manufacturing method, electrooptic device, and electronic equipment |
WO2006019156A1 (en) * | 2004-08-20 | 2006-02-23 | Zycube Co., Ltd. | Method for manufacturing semiconductor device having three-dimensional multilayer structure |
US7179719B2 (en) | 2004-09-28 | 2007-02-20 | Sharp Laboratories Of America, Inc. | System and method for hydrogen exfoliation |
US20070207592A1 (en) | 2006-03-03 | 2007-09-06 | Lu James J | Wafer bonding of damascene-patterned metal/adhesive redistribution layers |
US7408798B2 (en) | 2006-03-31 | 2008-08-05 | International Business Machines Corporation | 3-dimensional integrated circuit architecture, structure and method for fabrication thereof |
US20080128901A1 (en) * | 2006-11-30 | 2008-06-05 | Peter Zurcher | Micro-electro-mechanical systems device and integrated circuit device integrated in a three-dimensional semiconductor structure |
US20080149832A1 (en) * | 2006-12-20 | 2008-06-26 | Miguel Zorn | Scanning Probe Microscope, Nanomanipulator with Nanospool, Motor, nucleotide cassette and Gaming application |
JP2009067098A (en) | 2007-09-10 | 2009-04-02 | Harison Toshiba Lighting Corp | Lighting system |
JP2009267098A (en) * | 2008-04-25 | 2009-11-12 | Denso Corp | Semiconductor apparatus and method of manufacturing the same |
US7943428B2 (en) * | 2008-12-24 | 2011-05-17 | International Business Machines Corporation | Bonded semiconductor substrate including a cooling mechanism |
US7943423B2 (en) | 2009-03-10 | 2011-05-17 | Infineon Technologies Ag | Reconfigured wafer alignment |
US9406561B2 (en) | 2009-04-20 | 2016-08-02 | International Business Machines Corporation | Three dimensional integrated circuit integration using dielectric bonding first and through via formation last |
JP2011029609A (en) * | 2009-06-26 | 2011-02-10 | Semiconductor Energy Lab Co Ltd | Method for manufacturing soi substrate, and soi substrate |
US9076664B2 (en) * | 2011-10-07 | 2015-07-07 | Freescale Semiconductor, Inc. | Stacked semiconductor die with continuous conductive vias |
-
2012
- 2012-01-24 US US13/356,717 patent/US9496255B2/en active Active
- 2012-11-16 WO PCT/US2012/065644 patent/WO2013075007A1/en active Application Filing
- 2012-11-16 IN IN1027MUN2014 patent/IN2014MN01027A/en unknown
- 2012-11-16 KR KR1020167009373A patent/KR101759689B1/en active IP Right Grant
- 2012-11-16 JP JP2014542512A patent/JP5937225B2/en active Active
- 2012-11-16 CN CN201280067053.4A patent/CN104054175B/en active Active
- 2012-11-16 EP EP12799674.2A patent/EP2780942A1/en not_active Ceased
- 2012-11-16 KR KR1020147016198A patent/KR20140100526A/en active Application Filing
-
2016
- 2016-05-11 JP JP2016095168A patent/JP6099794B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US9496255B2 (en) | 2016-11-15 |
WO2013075007A1 (en) | 2013-05-23 |
EP2780942A1 (en) | 2014-09-24 |
CN104054175A (en) | 2014-09-17 |
KR20160044591A (en) | 2016-04-25 |
US20130120951A1 (en) | 2013-05-16 |
JP2016174170A (en) | 2016-09-29 |
KR20140100526A (en) | 2014-08-14 |
CN104054175B (en) | 2018-03-06 |
JP5937225B2 (en) | 2016-06-22 |
JP2015503228A (en) | 2015-01-29 |
KR101759689B1 (en) | 2017-07-19 |
JP6099794B2 (en) | 2017-03-22 |
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