IN2014KN03106A - - Google Patents
Info
- Publication number
- IN2014KN03106A IN2014KN03106A IN3106KON2014A IN2014KN03106A IN 2014KN03106 A IN2014KN03106 A IN 2014KN03106A IN 3106KON2014 A IN3106KON2014 A IN 3106KON2014A IN 2014KN03106 A IN2014KN03106 A IN 2014KN03106A
- Authority
- IN
- India
- Prior art keywords
- current
- short
- output voltage
- energy
- circuit
- Prior art date
Links
- 238000009825 accumulation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32027—DC powered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32045—Circuits specially adapted for controlling the glow discharge
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33573—Full-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/22—Conversion of dc power input into dc power output with intermediate conversion into ac
- H02M3/24—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters
- H02M3/28—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac
- H02M3/325—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33507—Conversion of dc power input into dc power output with intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate ac using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of the output voltage or current, e.g. flyback converters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inverter Devices (AREA)
- Plasma Technology (AREA)
- Dc-Dc Converters (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Intermittent short-circuit control is performed in the ignition mode, thereby allowing short-circuit current to flow in the current source step-down type chopper. Energy of the short-circuit current is temporarily accumulated in the inductor provided in the current source step-down type chopper. The accumulated energy boosts the output voltage from the direct current power supply device during the period until the next short circuiting, via the current, the multiphase inverter, and the rectifier. The voltage boosting operation where accumulation of the current energy by short circuiting and boosting of the output voltage by conduction are repeated, controls an increase of the output voltage which is applied to the plasma generator.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2012/072854 WO2014038060A1 (en) | 2012-09-07 | 2012-09-07 | Dc power supply device, and control method for dc power supply device |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014KN03106A true IN2014KN03106A (en) | 2015-05-08 |
Family
ID=50236709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN3106KON2014 IN2014KN03106A (en) | 2012-09-07 | 2012-09-07 |
Country Status (10)
Country | Link |
---|---|
US (1) | US9137885B2 (en) |
EP (1) | EP2879471B1 (en) |
JP (1) | JP5634626B2 (en) |
KR (1) | KR101579416B1 (en) |
CN (1) | CN104604337B (en) |
DE (1) | DE12884110T1 (en) |
IN (1) | IN2014KN03106A (en) |
PL (1) | PL2879471T3 (en) |
TW (1) | TWI491317B (en) |
WO (1) | WO2014038060A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9160240B2 (en) * | 2012-09-05 | 2015-10-13 | Kyosan Electric Mfg. Co., Ltd. | DC power supply device, and control method for DC power supply device |
JP5729732B2 (en) | 2013-09-27 | 2015-06-03 | 株式会社京三製作所 | DC power supply and control method of DC power supply |
DE102015117892A1 (en) * | 2015-10-21 | 2017-04-27 | Dr. Ing. H.C. F. Porsche Aktiengesellschaft | Method for charging or discharging a vehicle battery |
GB2548209B (en) * | 2016-03-07 | 2018-03-21 | Intelligent Growth Solutions Ltd | Controllable power and lighting system |
KR102383760B1 (en) | 2016-06-15 | 2022-04-08 | 와틀로 일렉트릭 매뉴팩츄어링 컴파니 | Power Converter for a Thermal System |
US11092129B2 (en) * | 2016-08-17 | 2021-08-17 | Mitsubishi Electric Corporation | Barrier-discharge-type ignition apparatus |
JP6606038B2 (en) * | 2016-09-06 | 2019-11-13 | 株式会社東芝 | Output voltage control circuit |
US10608570B2 (en) * | 2017-10-18 | 2020-03-31 | Hitachi-Johnson Controls Air Conditioning, Inc. | Power converter and refrigeration air conditioner |
PL233868B1 (en) * | 2017-12-29 | 2019-12-31 | Politechnika Lubelska | System and method for powering a plasma reactor with gliding discharge |
KR102242234B1 (en) | 2019-05-08 | 2021-04-20 | 주식회사 뉴파워 프라즈마 | Rf generator and its operating method |
CN111865111B (en) * | 2020-07-22 | 2024-02-20 | 新风光电子科技股份有限公司 | High-power AC/DC conversion plasma igniter driving circuit and method |
WO2023155969A1 (en) * | 2022-02-15 | 2023-08-24 | Universität Stuttgart | Circuit arrangement for a plasma source for generating plasma at atmospheric pressure |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63268470A (en) * | 1987-04-27 | 1988-11-07 | Mitsubishi Electric Corp | Power convertor |
US5418707A (en) * | 1992-04-13 | 1995-05-23 | The United States Of America As Represented By The United States Department Of Energy | High voltage dc-dc converter with dynamic voltage regulation and decoupling during load-generated arcs |
JPH11229138A (en) | 1998-02-09 | 1999-08-24 | Murata Mfg Co Ltd | Sputtering device |
JP2002173772A (en) | 2000-12-05 | 2002-06-21 | Ricoh Co Ltd | Sputtering apparatus |
KR100488448B1 (en) * | 2001-11-29 | 2005-05-11 | 엘지전자 주식회사 | Generator for sustain pulse of plasma display panel |
JP4406754B2 (en) * | 2003-07-30 | 2010-02-03 | 株式会社アイ・ライティング・システム | Discharge lamp lighting device |
JP2005094827A (en) | 2003-09-12 | 2005-04-07 | Shunsuke Hosokawa | High voltage pulse power supply |
JP4526879B2 (en) * | 2004-06-18 | 2010-08-18 | 四変テック株式会社 | DC power supply |
PL1864313T3 (en) * | 2005-03-24 | 2013-05-31 | Oerlikon Trading Ag | Vacuum plasma generator |
JP5086043B2 (en) * | 2007-11-30 | 2012-11-28 | 日立アプライアンス株式会社 | Power converter and control method of power converter |
JP5429771B2 (en) * | 2008-05-26 | 2014-02-26 | 株式会社アルバック | Sputtering method |
TW201031276A (en) | 2009-02-06 | 2010-08-16 | Creating Nano Technologies Inc | Resonant inverter and plasma driving system icluding the same |
US8692466B2 (en) * | 2009-02-27 | 2014-04-08 | Mks Instruments Inc. | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
JP5241578B2 (en) * | 2009-03-19 | 2013-07-17 | 株式会社日清製粉グループ本社 | Induction thermal plasma generation method and apparatus |
JP2010255061A (en) | 2009-04-27 | 2010-11-11 | Canon Anelva Corp | Sputtering apparatus and sputtering treatment method |
JP5153003B2 (en) * | 2009-08-19 | 2013-02-27 | ウシオ電機株式会社 | High pressure discharge lamp lighting device and projector |
JP5399563B2 (en) | 2010-08-18 | 2014-01-29 | 株式会社アルバック | DC power supply |
US9379643B2 (en) * | 2010-12-23 | 2016-06-28 | The Regents Of The University Of Colorado, A Body Corporate | Electrosurgical generator controller for regulation of electrosurgical generator output power |
US20130038216A1 (en) * | 2012-01-19 | 2013-02-14 | Alvin Hao | Remote controlled electronic ballast with digital display |
-
2012
- 2012-09-07 JP JP2013555675A patent/JP5634626B2/en active Active
- 2012-09-07 KR KR1020157006021A patent/KR101579416B1/en active IP Right Grant
- 2012-09-07 WO PCT/JP2012/072854 patent/WO2014038060A1/en active Application Filing
- 2012-09-07 IN IN3106KON2014 patent/IN2014KN03106A/en unknown
- 2012-09-07 DE DE12884110.3T patent/DE12884110T1/en active Pending
- 2012-09-07 PL PL12884110T patent/PL2879471T3/en unknown
- 2012-09-07 EP EP12884110.3A patent/EP2879471B1/en active Active
- 2012-09-07 CN CN201280075694.4A patent/CN104604337B/en active Active
- 2012-09-07 US US14/414,816 patent/US9137885B2/en active Active
-
2013
- 2013-05-10 TW TW102116690A patent/TWI491317B/en active
Also Published As
Publication number | Publication date |
---|---|
KR101579416B1 (en) | 2015-12-21 |
EP2879471A4 (en) | 2016-07-06 |
TW201412199A (en) | 2014-03-16 |
DE12884110T1 (en) | 2015-09-24 |
US9137885B2 (en) | 2015-09-15 |
KR20150038625A (en) | 2015-04-08 |
JP5634626B2 (en) | 2014-12-03 |
EP2879471A1 (en) | 2015-06-03 |
CN104604337B (en) | 2016-05-18 |
US20150195896A1 (en) | 2015-07-09 |
WO2014038060A1 (en) | 2014-03-13 |
PL2879471T3 (en) | 2017-09-29 |
TWI491317B (en) | 2015-07-01 |
JPWO2014038060A1 (en) | 2016-08-08 |
EP2879471B1 (en) | 2017-05-10 |
CN104604337A (en) | 2015-05-06 |
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