IN2014DN05653A - - Google Patents

Info

Publication number
IN2014DN05653A
IN2014DN05653A IN5653DEN2014A IN2014DN05653A IN 2014DN05653 A IN2014DN05653 A IN 2014DN05653A IN 5653DEN2014 A IN5653DEN2014 A IN 5653DEN2014A IN 2014DN05653 A IN2014DN05653 A IN 2014DN05653A
Authority
IN
India
Application number
Inventor
William C Breneman
Original Assignee
Rec Silicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rec Silicon Inc filed Critical Rec Silicon Inc
Publication of IN2014DN05653A publication Critical patent/IN2014DN05653A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • C01B33/043Monosilane
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/1071Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen
    • C01B33/107Halogenated silanes
    • C01B33/10778Purification
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
IN5653DEN2014 2011-12-16 2014-07-08 IN2014DN05653A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/328,820 US20130156675A1 (en) 2011-12-16 2011-12-16 Process for production of silane and hydrohalosilanes
PCT/US2012/069758 WO2013090726A1 (en) 2011-12-16 2012-12-14 Process for production of silane and hydrohalosilanes

Publications (1)

Publication Number Publication Date
IN2014DN05653A true IN2014DN05653A (en) 2015-04-03

Family

ID=48610342

Family Applications (1)

Application Number Title Priority Date Filing Date
IN5653DEN2014 IN2014DN05653A (en) 2011-12-16 2014-07-08

Country Status (8)

Country Link
US (1) US20130156675A1 (en)
JP (1) JP5876589B2 (en)
KR (1) KR101681565B1 (en)
CN (1) CN103946158B (en)
DE (1) DE112012005246T5 (en)
IN (1) IN2014DN05653A (en)
TW (1) TWI642622B (en)
WO (1) WO2013090726A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5886234B2 (en) * 2013-04-11 2016-03-16 信越化学工業株式会社 Silane compound or chlorosilane compound purification method, polycrystalline silicon production method, and weakly basic ion exchange resin regeneration treatment method
US9352971B2 (en) 2013-06-14 2016-05-31 Rec Silicon Inc Method and apparatus for production of silane and hydrohalosilanes
US10252916B2 (en) * 2014-09-04 2019-04-09 Corner Star Limited Methods for separating halosilanes
WO2016061278A1 (en) * 2014-10-14 2016-04-21 Sitec Gmbh Distillation process
KR101654119B1 (en) * 2014-10-23 2016-09-06 한국과학기술연구원 A method for preparing hydrosilane using hetero atom containing activated carbon
EP3233732B8 (en) 2014-12-19 2020-06-17 DDP Specialty Electronic Materials US 9, LLC Process for preparing monohydrogentrihalosilanes
WO2017062571A2 (en) 2015-10-09 2017-04-13 Milwaukee Silicon, Llc Purified silicon, devices and systems for producing same
JP7245012B2 (en) * 2017-09-12 2023-03-23 オルガノ株式会社 Electrolyte purification device and purification method
WO2019054220A1 (en) * 2017-09-12 2019-03-21 オルガノ株式会社 Electrolyte refining apparatus and electrolyte refining method
CN110357915B (en) * 2018-04-11 2023-02-03 台湾特品化学股份有限公司 System for synthesizing, filtering and purifying silicon ethane
US10773192B1 (en) * 2019-04-09 2020-09-15 Bitfury Ip B.V. Method and apparatus for recovering dielectric fluids used for immersion cooling
CN112758936A (en) * 2020-12-31 2021-05-07 内蒙古兴洋科技有限公司 System and method for simultaneously producing electronic-grade silane and electronic-grade monochlorosilane
EP4317062A1 (en) 2022-08-02 2024-02-07 Alexander Lygin Optimized process for silicon deposition

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA988275A (en) * 1970-12-17 1976-05-04 Carl J. Litteral Disproportionation of chlorosilicon hydrides
US4676967A (en) * 1978-08-23 1987-06-30 Union Carbide Corporation High purity silane and silicon production
DE3711444A1 (en) * 1987-04-04 1988-10-13 Huels Troisdorf METHOD AND DEVICE FOR PRODUCING DICHLORSILANE
JP4256998B2 (en) * 1999-10-27 2009-04-22 株式会社トクヤマ Method for producing disproportionation reaction product of silane compound
DE102004045245B4 (en) * 2004-09-17 2007-11-15 Degussa Gmbh Apparatus and process for the production of silanes
JP5419456B2 (en) * 2006-09-27 2014-02-19 電気化学工業株式会社 Continuous production method of monosilane
DE102007028254A1 (en) * 2007-06-20 2008-12-24 Wacker Chemie Ag Process for the preparation of SiH-containing silanes
DE102008002537A1 (en) * 2008-06-19 2009-12-24 Evonik Degussa Gmbh Process for the removal of boron-containing impurities from halosilanes and plant for carrying out the process
WO2010103631A1 (en) * 2009-03-11 2010-09-16 電気化学工業株式会社 Apparatus for producing trichlorosilane
CN201560125U (en) * 2009-08-31 2010-08-25 比亚迪股份有限公司 Device for preparing dichlorosilane by trichlorosilane disproportionation

Also Published As

Publication number Publication date
JP5876589B2 (en) 2016-03-02
JP2015504838A (en) 2015-02-16
TWI642622B (en) 2018-12-01
DE112012005246T5 (en) 2014-10-09
KR101681565B1 (en) 2016-12-01
KR20140105013A (en) 2014-08-29
WO2013090726A1 (en) 2013-06-20
CN103946158B (en) 2017-02-08
CN103946158A (en) 2014-07-23
US20130156675A1 (en) 2013-06-20
TW201341311A (en) 2013-10-16

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