IN2012DN01719A - - Google Patents

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Publication number
IN2012DN01719A
IN2012DN01719A IN1719DEN2012A IN2012DN01719A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A IN 1719DEN2012 A IN1719DEN2012 A IN 1719DEN2012A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A
Authority
IN
India
Prior art keywords
sensor
position sensitive
pyrometer includes
sensitive pyrometer
sensitive
Prior art date
Application number
Inventor
E Beck Markus
Lun Yu Ming
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of IN2012DN01719A publication Critical patent/IN2012DN01719A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/027—Constructional details making use of sensor-related data, e.g. for identification of sensor parts or optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0275—Control or determination of height or distance or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/047—Mobile mounting; Scanning arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G01J5/0821—Optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels

Abstract

A position sensitive pyrometer includes a sensor.
IN1719DEN2012 2009-08-21 2010-08-20 IN2012DN01719A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23585509P 2009-08-21 2009-08-21
PCT/US2010/046167 WO2011022648A1 (en) 2009-08-21 2010-08-20 Pyrometer

Publications (1)

Publication Number Publication Date
IN2012DN01719A true IN2012DN01719A (en) 2015-06-05

Family

ID=43606030

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1719DEN2012 IN2012DN01719A (en) 2009-08-21 2010-08-20

Country Status (5)

Country Link
US (1) US20110046916A1 (en)
CN (1) CN102484041B (en)
IN (1) IN2012DN01719A (en)
TW (1) TWI481836B (en)
WO (1) WO2011022648A1 (en)

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CN102364700B (en) * 2011-10-26 2013-03-27 常州天合光能有限公司 Solar cell reactive ion etching (RIE) technology temperature compensation method
US9151597B2 (en) * 2012-02-13 2015-10-06 First Solar, Inc. In situ substrate detection for a processing system using infrared detection
CN104075809B (en) * 2013-03-28 2019-05-07 中晟光电设备（上海）股份有限公司 Infrared optics temperature measuring device, method and MOCVD system
WO2015196149A1 (en) 2014-06-20 2015-12-23 Velo3D, Inc. Apparatuses, systems and methods for three-dimensional printing
WO2017079091A1 (en) 2015-11-06 2017-05-11 Velo3D, Inc. Adept three-dimensional printing
US10071422B2 (en) 2015-12-10 2018-09-11 Velo3D, Inc. Skillful three-dimensional printing
JP6979963B2 (en) 2016-02-18 2021-12-15 ヴェロ・スリー・ディー・インコーポレイテッド Accurate 3D printing
US10252336B2 (en) 2016-06-29 2019-04-09 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
US20180126650A1 (en) 2016-11-07 2018-05-10 Velo3D, Inc. Gas flow in three-dimensional printing
WO2018129089A1 (en) 2017-01-05 2018-07-12 Velo3D, Inc. Optics in three-dimensional printing
US20180250771A1 (en) 2017-03-02 2018-09-06 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
WO2018183396A1 (en) 2017-03-28 2018-10-04 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
AU2019209435A1 (en) * 2018-01-22 2020-09-17 Bristol-Myers Squibb Company Compositions and methods of treating cancer
US11686683B2 (en) * 2020-04-30 2023-06-27 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for detecting contamination of thin-films
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
ES2926693B2 (en) 2021-04-20 2023-02-28 Univ Madrid Carlos Iii Pyrometer with high spatial resolution
DE102022200914B3 (en) * 2022-01-27 2023-05-17 Singulus Technologies Aktiengesellschaft Coating chamber with detection of the substrate distance and method for coating substrates

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US5073698A (en) * 1990-03-23 1991-12-17 Peak Systems, Inc. Method for selectively heating a film on a substrate
US5769540A (en) * 1990-04-10 1998-06-23 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5086220A (en) * 1991-02-05 1992-02-04 The Babcock & Wilcox Company Radiation imaging fiber optic temperature distribution monitor
ATE272208T1 (en) * 2000-03-13 2004-08-15 Suisse Electronique Microtech IMAGING PYROMETER
US6640199B1 (en) * 2001-10-24 2003-10-28 Spectral Sciences, Inc. System and method for optically determining properties of hot fluids from the spectral structure of emitted radiation
US7005601B2 (en) * 2002-04-18 2006-02-28 Applied Materials, Inc. Thermal flux processing by scanning
US7238941B2 (en) * 2003-10-27 2007-07-03 California Institute Of Technology Pyrolyzed-parylene based sensors and method of manufacture
US7663750B2 (en) * 2005-06-30 2010-02-16 Applied Biosystems, Llc Two-dimensional spectral imaging system
US8014062B2 (en) * 2007-03-09 2011-09-06 Lockheed Martin Corporation Method of making a close proximity filter and multi color MWIR sensor and resultant device
TW200839911A (en) * 2007-03-21 2008-10-01 Promos Technologies Inc Method for measuring thickness of film on sidewall of trench in semiconductor device
JP2009027100A (en) * 2007-07-23 2009-02-05 Rohm Co Ltd Substrate temperature measuring apparatus and substrate temperature measurement method

Also Published As

Publication number Publication date
TW201129786A (en) 2011-09-01
US20110046916A1 (en) 2011-02-24
CN102484041A (en) 2012-05-30
TWI481836B (en) 2015-04-21
WO2011022648A1 (en) 2011-02-24
CN102484041B (en) 2015-09-23

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