IL307309A - Imaging devices having piezoelectric transceivers with harmonic characteristics - Google Patents
Imaging devices having piezoelectric transceivers with harmonic characteristicsInfo
- Publication number
- IL307309A IL307309A IL307309A IL30730923A IL307309A IL 307309 A IL307309 A IL 307309A IL 307309 A IL307309 A IL 307309A IL 30730923 A IL30730923 A IL 30730923A IL 307309 A IL307309 A IL 307309A
- Authority
- IL
- Israel
- Prior art keywords
- electrode
- axis
- mut
- piezoelectric layer
- ain
- Prior art date
Links
- 238000003384 imaging method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims 8
- 229910013336 LiNiO3 Inorganic materials 0.000 claims 4
- 239000002033 PVDF binder Substances 0.000 claims 4
- 239000012528 membrane Substances 0.000 claims 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 4
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
- G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
- G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
- G01S7/5205—Means for monitoring or calibrating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
- G01S7/52079—Constructional features
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8979—Combined Doppler and pulse-echo imaging systems
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Computer Networks & Wireless Communication (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Claims (22)
1. A micromachined ultrasonic transducer (MUT), comprising: at least a first piezoelectric layer and a second piezoelectric layer, wherein the first piezoelectric layer is disposed between a first electrode and a second electrode, wherein the second piezoelectric layer is disposed between the second electrode and a third electrode, at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape, and v. wherein R/L is greater than 1.
2. The MUT of claim 1, wherein the first axis extends along a direction where the first electrode has a longest dimension.
3. The MUT of claim 1 or 2, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
4. The MUT of any one of claims 1 to 3, further comprising: a substrate; and a membrane suspending from the substrate.
5. The MUT of any one of claims 1 to 4, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
6. A micromachined ultrasonic transducer (MUT), comprising: a plurality of piezoelectric layers comprising M piezoelectric layers; a plurality of electrodes comprising N electrodes, wherein a piezoelectric layer of the plurality of piezoelectric layers with an index m is disposed between a first electrode with an index m and a second electrode with an index m+1, wherein the index m is associated with a vertical distance of the piezoelectric layer; at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape, and v. wherein R/L is greater than 1.
7. The MUT of claim 6, wherein the first axis extends along a direction where the first electrode has a longest dimension.
8. The MUT of claim 6 or 7, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
9. The MUT of any one of claims 6 to 8, further comprising: a substrate; and a membrane suspending from the substrate.
10. The MUT of any one of claims 6 to 9, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
11. The MUT of any one of claims 6 to 10, wherein N = M + 1.
12. A micromachined ultrasonic transducer (MUT), comprising: at least a first piezoelectric layer and a second piezoelectric layer, wherein the first piezoelectric layer is disposed between a first electrode and a second electrode, wherein the second piezoelectric layer is disposed between the second electrode and a third electrode, at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its widest point along the first axis is at least two times L such that the first electrode has a convex shape, and v. wherein R/L is less than 1.
13. The MUT of claim 12, wherein the first axis extends along a direction where the first electrode has a longest dimension.
14. The MUT of claim 12 or 13, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
15. The MUT of any one of claims 12 to 14, further comprising: a substrate; and a membrane suspending from the substrate.
16. The MUT of claim 15, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
17. A micromachined ultrasonic transducer (MUT), comprising: a plurality of piezoelectric layers comprising M piezoelectric layers; a plurality of electrodes comprising N electrodes, wherein a piezoelectric layer of the plurality of piezoelectric layers with an index m is disposed between a first electrode with an index m and a second electrode with an index m+1, wherein the index m is associated with a vertical distance of the piezoelectric layer; at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, 30 ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its widest point along the first axis is at least two times L such that the first electrode has a convex shape, and v. wherein R/L is less than 1.
18. The MUT of claim 17, wherein the first axis extends along a direction where the first electrode has a longest dimension.
19. The MUT of claim 17 or 18, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
20. The MUT of claim any one of claims 17 to 19, further comprising: a substrate; and a membrane suspending from the substrate.
21. The MUT of claim 20, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
22. The MUT of any one of claims 17 to 21, wherein N = M + 1. 20
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/218,656 US11951512B2 (en) | 2021-03-31 | 2021-03-31 | Imaging devices having piezoelectric transceivers with harmonic characteristics |
PCT/US2021/025109 WO2022211803A1 (en) | 2021-03-31 | 2021-03-31 | Imaging devices having piezoelectric transceivers with harmonic characteristics |
PCT/US2021/039994 WO2022211836A1 (en) | 2021-03-31 | 2021-06-30 | Imaging devices having piezoelectric transceivers with harmonic characteristics |
Publications (1)
Publication Number | Publication Date |
---|---|
IL307309A true IL307309A (en) | 2023-11-01 |
Family
ID=83456698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL307309A IL307309A (en) | 2021-03-31 | 2021-06-30 | Imaging devices having piezoelectric transceivers with harmonic characteristics |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP4314735A1 (en) |
JP (1) | JP2024511654A (en) |
KR (1) | KR20230163545A (en) |
AU (1) | AU2021437908A1 (en) |
CA (1) | CA3214114A1 (en) |
IL (1) | IL307309A (en) |
WO (1) | WO2022211836A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003245470A1 (en) * | 2002-06-12 | 2003-12-31 | Boston Scientific Limited | Medical slings |
US8084750B2 (en) * | 2009-05-28 | 2011-12-27 | Agilent Technologies, Inc. | Curved ion guide with varying ion deflecting field and related methods |
CN103229321A (en) * | 2010-11-25 | 2013-07-31 | 诺基亚公司 | Piezoelectric resonator |
US10648852B2 (en) * | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
US10656007B2 (en) * | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
-
2021
- 2021-06-30 CA CA3214114A patent/CA3214114A1/en active Pending
- 2021-06-30 IL IL307309A patent/IL307309A/en unknown
- 2021-06-30 JP JP2023560471A patent/JP2024511654A/en active Pending
- 2021-06-30 KR KR1020237037483A patent/KR20230163545A/en unknown
- 2021-06-30 WO PCT/US2021/039994 patent/WO2022211836A1/en active Application Filing
- 2021-06-30 EP EP21935414.9A patent/EP4314735A1/en active Pending
- 2021-06-30 AU AU2021437908A patent/AU2021437908A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2024511654A (en) | 2024-03-14 |
KR20230163545A (en) | 2023-11-30 |
CA3214114A1 (en) | 2022-10-06 |
WO2022211836A1 (en) | 2022-10-06 |
EP4314735A1 (en) | 2024-02-07 |
AU2021437908A1 (en) | 2023-10-26 |
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