IL307309A - Imaging devices having piezoelectric transceivers with harmonic characteristics - Google Patents

Imaging devices having piezoelectric transceivers with harmonic characteristics

Info

Publication number
IL307309A
IL307309A IL307309A IL30730923A IL307309A IL 307309 A IL307309 A IL 307309A IL 307309 A IL307309 A IL 307309A IL 30730923 A IL30730923 A IL 30730923A IL 307309 A IL307309 A IL 307309A
Authority
IL
Israel
Prior art keywords
electrode
axis
mut
piezoelectric layer
ain
Prior art date
Application number
IL307309A
Other languages
Hebrew (he)
Inventor
Haesung Kwon
Brian Bircumshaw
Sandeep Akkaraju
Original Assignee
Exo Imaging Inc
Haesung Kwon
Brian Bircumshaw
Sandeep Akkaraju
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US17/218,656 external-priority patent/US11951512B2/en
Priority claimed from PCT/US2021/025109 external-priority patent/WO2022211803A1/en
Application filed by Exo Imaging Inc, Haesung Kwon, Brian Bircumshaw, Sandeep Akkaraju filed Critical Exo Imaging Inc
Publication of IL307309A publication Critical patent/IL307309A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/5205—Means for monitoring or calibrating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52079—Constructional features
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8979—Combined Doppler and pulse-echo imaging systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Claims (22)

CLAIMS:
1. A micromachined ultrasonic transducer (MUT), comprising: at least a first piezoelectric layer and a second piezoelectric layer, wherein the first piezoelectric layer is disposed between a first electrode and a second electrode, wherein the second piezoelectric layer is disposed between the second electrode and a third electrode, at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape, and v. wherein R/L is greater than 1.
2. The MUT of claim 1, wherein the first axis extends along a direction where the first electrode has a longest dimension.
3. The MUT of claim 1 or 2, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
4. The MUT of any one of claims 1 to 3, further comprising: a substrate; and a membrane suspending from the substrate.
5. The MUT of any one of claims 1 to 4, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
6. A micromachined ultrasonic transducer (MUT), comprising: a plurality of piezoelectric layers comprising M piezoelectric layers; a plurality of electrodes comprising N electrodes, wherein a piezoelectric layer of the plurality of piezoelectric layers with an index m is disposed between a first electrode with an index m and a second electrode with an index m+1, wherein the index m is associated with a vertical distance of the piezoelectric layer; at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its narrowest point along the first axis is at most 2L such that the first electrode has a concave shape, and v. wherein R/L is greater than 1.
7. The MUT of claim 6, wherein the first axis extends along a direction where the first electrode has a longest dimension.
8. The MUT of claim 6 or 7, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
9. The MUT of any one of claims 6 to 8, further comprising: a substrate; and a membrane suspending from the substrate.
10. The MUT of any one of claims 6 to 9, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
11. The MUT of any one of claims 6 to 10, wherein N = M + 1.
12. A micromachined ultrasonic transducer (MUT), comprising: at least a first piezoelectric layer and a second piezoelectric layer, wherein the first piezoelectric layer is disposed between a first electrode and a second electrode, wherein the second piezoelectric layer is disposed between the second electrode and a third electrode, at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its widest point along the first axis is at least two times L such that the first electrode has a convex shape, and v. wherein R/L is less than 1.
13. The MUT of claim 12, wherein the first axis extends along a direction where the first electrode has a longest dimension.
14. The MUT of claim 12 or 13, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
15. The MUT of any one of claims 12 to 14, further comprising: a substrate; and a membrane suspending from the substrate.
16. The MUT of claim 15, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
17. A micromachined ultrasonic transducer (MUT), comprising: a plurality of piezoelectric layers comprising M piezoelectric layers; a plurality of electrodes comprising N electrodes, wherein a piezoelectric layer of the plurality of piezoelectric layers with an index m is disposed between a first electrode with an index m and a second electrode with an index m+1, wherein the index m is associated with a vertical distance of the piezoelectric layer; at least the first electrode having first and second ends along a first axis, i. wherein one or more of the first end or second end is defined by a radius of curvature R, 30 ii. wherein a second axis passes through a midpoint of the first axis, wherein the second axis is normal to the first axis, iii. wherein a half-width of the first electrode is defined by a length L measured from the midpoint, in the direction of the second axis, to an outer perimeter of the first electrode, iv. wherein a total width of the first electrode at its widest point along the first axis is at least two times L such that the first electrode has a convex shape, and v. wherein R/L is less than 1.
18. The MUT of claim 17, wherein the first axis extends along a direction where the first electrode has a longest dimension.
19. The MUT of claim 17 or 18, wherein the second axis extends along a direction where the first electrode has a shortest dimension.
20. The MUT of claim any one of claims 17 to 19, further comprising: a substrate; and a membrane suspending from the substrate.
21. The MUT of claim 20, wherein the piezoelectric layer is formed of at least one of PZT, KNN, PZT-N, PMN-Pt, AIN, Sc-AIN, ZnO, PVDF, and LiNiO3.
22. The MUT of any one of claims 17 to 21, wherein N = M + 1. 20
IL307309A 2021-03-31 2021-06-30 Imaging devices having piezoelectric transceivers with harmonic characteristics IL307309A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/218,656 US11951512B2 (en) 2021-03-31 2021-03-31 Imaging devices having piezoelectric transceivers with harmonic characteristics
PCT/US2021/025109 WO2022211803A1 (en) 2021-03-31 2021-03-31 Imaging devices having piezoelectric transceivers with harmonic characteristics
PCT/US2021/039994 WO2022211836A1 (en) 2021-03-31 2021-06-30 Imaging devices having piezoelectric transceivers with harmonic characteristics

Publications (1)

Publication Number Publication Date
IL307309A true IL307309A (en) 2023-11-01

Family

ID=83456698

Family Applications (1)

Application Number Title Priority Date Filing Date
IL307309A IL307309A (en) 2021-03-31 2021-06-30 Imaging devices having piezoelectric transceivers with harmonic characteristics

Country Status (7)

Country Link
EP (1) EP4314735A1 (en)
JP (1) JP2024511654A (en)
KR (1) KR20230163545A (en)
AU (1) AU2021437908A1 (en)
CA (1) CA3214114A1 (en)
IL (1) IL307309A (en)
WO (1) WO2022211836A1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003245470A1 (en) * 2002-06-12 2003-12-31 Boston Scientific Limited Medical slings
US8084750B2 (en) * 2009-05-28 2011-12-27 Agilent Technologies, Inc. Curved ion guide with varying ion deflecting field and related methods
CN103229321A (en) * 2010-11-25 2013-07-31 诺基亚公司 Piezoelectric resonator
US10648852B2 (en) * 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
US10656007B2 (en) * 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array

Also Published As

Publication number Publication date
JP2024511654A (en) 2024-03-14
KR20230163545A (en) 2023-11-30
CA3214114A1 (en) 2022-10-06
WO2022211836A1 (en) 2022-10-06
EP4314735A1 (en) 2024-02-07
AU2021437908A1 (en) 2023-10-26

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