IL169327A0 - Method and apparaus for simultaneous 2-d and topgraphical inspection - Google Patents

Method and apparaus for simultaneous 2-d and topgraphical inspection

Info

Publication number
IL169327A0
IL169327A0 IL169327A IL16932705A IL169327A0 IL 169327 A0 IL169327 A0 IL 169327A0 IL 169327 A IL169327 A IL 169327A IL 16932705 A IL16932705 A IL 16932705A IL 169327 A0 IL169327 A0 IL 169327A0
Authority
IL
Israel
Prior art keywords
topgraphical
apparaus
simultaneous
inspection
topgraphical inspection
Prior art date
Application number
IL169327A
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/IL2004/000019 external-priority patent/WO2004063668A2/en
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to IL169327A priority Critical patent/IL169327A0/en
Publication of IL169327A0 publication Critical patent/IL169327A0/en

Links

IL169327A 2003-01-09 2005-06-21 Method and apparaus for simultaneous 2-d and topgraphical inspection IL169327A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL169327A IL169327A0 (en) 2003-01-09 2005-06-21 Method and apparaus for simultaneous 2-d and topgraphical inspection

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US43878303P 2003-01-09 2003-01-09
PCT/IL2004/000019 WO2004063668A2 (en) 2003-01-09 2004-01-09 Method and apparatus for simultaneous 2-d and topographical inspection
IL169327A IL169327A0 (en) 2003-01-09 2005-06-21 Method and apparaus for simultaneous 2-d and topgraphical inspection

Publications (1)

Publication Number Publication Date
IL169327A0 true IL169327A0 (en) 2007-07-04

Family

ID=42333607

Family Applications (1)

Application Number Title Priority Date Filing Date
IL169327A IL169327A0 (en) 2003-01-09 2005-06-21 Method and apparaus for simultaneous 2-d and topgraphical inspection

Country Status (1)

Country Link
IL (1) IL169327A0 (en)

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