IL169327A0 - Method and apparaus for simultaneous 2-d and topgraphical inspection
- Google Patents
Method and apparaus for simultaneous 2-d and topgraphical inspection
Info
Publication number
IL169327A0
IL169327A0IL169327AIL16932705AIL169327A0IL 169327 A0IL169327 A0IL 169327A0IL 169327 AIL169327 AIL 169327AIL 16932705 AIL16932705 AIL 16932705AIL 169327 A0IL169327 A0IL 169327A0
Authority
IL
Israel
Prior art keywords
topgraphical
apparaus
simultaneous
inspection
topgraphical inspection
Prior art date
Application number
IL169327A
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/IL2004/000019external-prioritypatent/WO2004063668A2/en
Application filed by Orbotech LtdfiledCriticalOrbotech Ltd
Priority to IL169327ApriorityCriticalpatent/IL169327A0/en
Publication of IL169327A0publicationCriticalpatent/IL169327A0/en