IL163572A0 - Method for manufacturing flat paneldisplay substrates orbotech ltd. - Google Patents
Method for manufacturing flat paneldisplay substrates orbotech ltd.Info
- Publication number
- IL163572A0 IL163572A0 IL16357203A IL16357203A IL163572A0 IL 163572 A0 IL163572 A0 IL 163572A0 IL 16357203 A IL16357203 A IL 16357203A IL 16357203 A IL16357203 A IL 16357203A IL 163572 A0 IL163572 A0 IL 163572A0
- Authority
- IL
- Israel
- Prior art keywords
- orbotech
- substrates
- manufacturing flat
- flat paneldisplay
- paneldisplay
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Mathematical Physics (AREA)
- Recrystallisation Techniques (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35873402P | 2002-02-25 | 2002-02-25 | |
PCT/IL2003/000142 WO2003071344A1 (en) | 2002-02-25 | 2003-02-24 | Method for manufacturing flat panel display substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
IL163572A0 true IL163572A0 (en) | 2005-12-18 |
Family
ID=27757757
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL16357203A IL163572A0 (en) | 2002-02-25 | 2003-02-24 | Method for manufacturing flat paneldisplay substrates orbotech ltd. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1478970A1 (en) |
JP (1) | JP2005518658A (en) |
KR (1) | KR20040088536A (en) |
AU (1) | AU2003209628A1 (en) |
IL (1) | IL163572A0 (en) |
TW (1) | TW200305915A (en) |
WO (1) | WO2003071344A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004038870A2 (en) | 2002-10-28 | 2004-05-06 | Orbotech Ltd. | Selectable area laser assisted processing of substrates |
US7521651B2 (en) | 2003-09-12 | 2009-04-21 | Orbotech Ltd | Multiple beam micro-machining system and method |
JP4413569B2 (en) * | 2003-09-25 | 2010-02-10 | 株式会社 日立ディスプレイズ | Display panel manufacturing method and display panel |
KR100617035B1 (en) * | 2003-12-26 | 2006-08-30 | 엘지.필립스 엘시디 주식회사 | Device for Crystallization Silicon |
DE102007025942A1 (en) | 2007-06-04 | 2008-12-11 | Coherent Gmbh | Process for the selective thermal surface treatment of a surface substrate |
GB2474665B (en) * | 2009-10-22 | 2011-10-12 | M Solv Ltd | Method and apparatus for dividing thin film device into separate cells |
JP5884147B2 (en) * | 2010-12-09 | 2016-03-15 | 株式会社ブイ・テクノロジー | Laser annealing apparatus and laser annealing method |
GB201614342D0 (en) * | 2016-08-22 | 2016-10-05 | M-Solv Ltd | An apparatus for annealing a layer of amorphous silicon, a method of annealing a layer of amorphous silicon, and a flat panel display |
US20200235544A1 (en) * | 2019-01-22 | 2020-07-23 | Coherent, Inc. | Diode-pumped solid-state laser apparatus for laser annealing |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100492726B1 (en) * | 1998-01-26 | 2005-08-31 | 엘지.필립스 엘시디 주식회사 | System on panel liquid crystal display |
US20020030439A1 (en) * | 1998-12-23 | 2002-03-14 | Michael Gurvitch | High speed solid state optical display |
-
2003
- 2003-02-24 WO PCT/IL2003/000142 patent/WO2003071344A1/en not_active Application Discontinuation
- 2003-02-24 IL IL16357203A patent/IL163572A0/en unknown
- 2003-02-24 JP JP2003570178A patent/JP2005518658A/en active Pending
- 2003-02-24 AU AU2003209628A patent/AU2003209628A1/en not_active Abandoned
- 2003-02-24 EP EP03742652A patent/EP1478970A1/en not_active Withdrawn
- 2003-02-24 KR KR10-2004-7013215A patent/KR20040088536A/en not_active Application Discontinuation
- 2003-02-25 TW TW092103910A patent/TW200305915A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20040088536A (en) | 2004-10-16 |
TW200305915A (en) | 2003-11-01 |
JP2005518658A (en) | 2005-06-23 |
EP1478970A1 (en) | 2004-11-24 |
AU2003209628A1 (en) | 2003-09-09 |
WO2003071344A1 (en) | 2003-08-28 |
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