IL123274A0 - Plasma generator for low energy particles
- Google Patents
Plasma generator for low energy particles
Info
Publication number
IL123274A0
IL123274A0IL12327498AIL12327498AIL123274A0IL 123274 A0IL123274 A0IL 123274A0IL 12327498 AIL12327498 AIL 12327498AIL 12327498 AIL12327498 AIL 12327498AIL 123274 A0IL123274 A0IL 123274A0
Authority
IL
Israel
Prior art keywords
low energy
plasma generator
energy particles
particles
plasma
Prior art date
Application number
IL12327498A
Original Assignee
Israel Atomic Energy Comm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Israel Atomic Energy CommfiledCriticalIsrael Atomic Energy Comm
Priority to IL12327498ApriorityCriticalpatent/IL123274A0/en
Publication of IL123274A0publicationCriticalpatent/IL123274A0/en