ID16941A - Alat sensor - Google Patents

Alat sensor

Info

Publication number
ID16941A
ID16941A IDP971673A ID971673A ID16941A ID 16941 A ID16941 A ID 16941A ID P971673 A IDP971673 A ID P971673A ID 971673 A ID971673 A ID 971673A ID 16941 A ID16941 A ID 16941A
Authority
ID
Indonesia
Prior art keywords
sensor tools
tools
sensor
Prior art date
Application number
IDP971673A
Other languages
English (en)
Inventor
Masahiko Namerikawa
Kazuyoshi Shibata
Yukihisa Takeuchi
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Publication of ID16941A publication Critical patent/ID16941A/id

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
IDP971673A 1996-05-22 1997-05-20 Alat sensor ID16941A (id)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12727896 1996-05-22
JP16218796A JP3343030B2 (ja) 1996-05-22 1996-06-21 センサ素子

Publications (1)

Publication Number Publication Date
ID16941A true ID16941A (id) 1997-11-27

Family

ID=26463267

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP971673A ID16941A (id) 1996-05-22 1997-05-20 Alat sensor

Country Status (6)

Country Link
US (3) US5892143A (id)
EP (1) EP0809105B1 (id)
JP (1) JP3343030B2 (id)
CN (1) CN1173642A (id)
DE (1) DE69708751D1 (id)
ID (1) ID16941A (id)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3236536B2 (ja) * 1997-07-18 2001-12-10 日本碍子株式会社 セラミック基体及びこれを用いたセンサ素子
JP3388176B2 (ja) 1998-03-27 2003-03-17 日本碍子株式会社 圧電センサ装置とそれを用いた電気的定数変化の検出方法
US6575020B1 (en) * 1999-05-03 2003-06-10 Cantion A/S Transducer for microfluid handling system
US6308553B1 (en) * 1999-06-04 2001-10-30 Honeywell International Inc Self-normalizing flow sensor and method for the same
US6269685B1 (en) * 1999-09-23 2001-08-07 Ut Battelle, Llc Viscosity measuring using microcantilevers
WO2001034291A2 (en) * 1999-11-09 2001-05-17 Sri International High-throughput synthesis, screening and characterization of combinatorial libraries
JP3830843B2 (ja) * 2002-03-28 2006-10-11 株式会社東芝 薄膜圧電共振子
US6668621B1 (en) * 2002-06-13 2003-12-30 Hubert Arthur Wright Viscosity measurement by means of damped resonant vibration normal to an approximate rigid plate
JP2004245613A (ja) * 2003-02-12 2004-09-02 Japan Science & Technology Agency フロ−セル型ｑｃｍ装置および試料測定方法
US7721590B2 (en) * 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
KR100576849B1 (ko) * 2003-09-19 2006-05-10 삼성전기주식회사 발광소자 및 그 제조방법
US7581434B1 (en) * 2003-09-25 2009-09-01 Rockwell Automation Technologies, Inc. Intelligent fluid sensor for machinery diagnostics, prognostics, and control
US7677087B2 (en) 2004-12-15 2010-03-16 Nihon Dempa Kogyo Co., Ltd. Quartz sensor and sensing device
EP1830170A4 (en) * 2004-12-15 2012-04-11 Nihon Dempa Kogyo Co COMPONENTS MEASURING DEVICE
US7552639B2 (en) 2004-12-15 2009-06-30 Nihon Dempa Kogyo Co., Ltd. Quartz sensor and sensing device
JP4134025B2 (ja) * 2004-12-28 2008-08-13 日本電波工業株式会社 感知装置
US7228735B2 (en) * 2005-02-03 2007-06-12 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
TWI436063B (zh) 2005-08-03 2014-05-01 Nihon Dempa Kogyo Co Concentration sensor and concentration detection device
JP2007093550A (ja) * 2005-09-30 2007-04-12 Ulvac Japan Ltd センサ及びこれを使用した装置
WO2007037386A1 (ja) * 2005-09-30 2007-04-05 Ulvac, Inc. センサ及びこれを使用した装置
JP4669767B2 (ja) * 2005-09-30 2011-04-13 株式会社アルバック センサ及びこれを使用した装置
CN101368988B (zh) * 2007-08-15 2011-02-02 中国科学院电子学研究所 免封装压电驱动式微小型电场传感器
JP2011203246A (ja) * 2010-03-03 2011-10-13 Noboru Wakatsuki 粘弾性評価装置
JP5102334B2 (ja) * 2010-06-25 2012-12-19 日本電波工業株式会社 感知装置
US9086338B2 (en) 2010-06-25 2015-07-21 Nihon Dempa Kogyo Co., Ltd. Sensing device
ES2907457T3 (es) 2011-09-01 2022-04-25 Microtech Medical Technologies Ltd Dispositivo de sensor implantable para medir una presión de fluido
GB201120887D0 (en) * 2011-12-06 2012-01-18 The Technology Partnership Plc Acoustic sensor
JP7487600B2 (ja) * 2020-07-29 2024-05-21 セイコーエプソン株式会社 流体デバイス
JP7484534B2 (ja) * 2020-07-30 2024-05-16 セイコーエプソン株式会社 流体デバイス

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133644A (en) * 1980-03-24 1981-10-19 Toshiba Corp Ultrasonic hydrometer
AT396998B (de) * 1985-12-09 1994-01-25 Ottosensors Corp Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen
US4741200A (en) * 1986-07-11 1988-05-03 Ford Motor Company Method and apparatus for measuring viscosity in a liquid utilizing a piezoelectric sensor
US4721874A (en) * 1986-10-06 1988-01-26 Emmert Sans W Apparatus and method for determining the viscosity of a fluid sample
GB2200211B (en) * 1986-12-08 1991-01-16 Fuji Electric Co Ltd Vibration-type transducer
JPH01311250A (ja) * 1988-06-08 1989-12-15 Seiko Instr Inc 流体粘度計測方法及び計測装置
JPH02213743A (ja) * 1989-02-15 1990-08-24 Seiko Instr Inc 液体の物理的性質の測定装置
JPH03148040A (ja) * 1989-11-06 1991-06-24 Izumi Denki Toyama Seisakusho:Kk 粘度測定装置
DE69221758T2 (de) * 1991-03-22 1998-01-02 Seiko Instr Inc Elektrochemische Messeinrichtung
US5374521A (en) * 1991-09-17 1994-12-20 Kipling; Arlin L. Acoustic reflection process for molecular sensing using a bulk acoustic wave quartz sensor
DE4293402T1 (de) * 1991-09-18 1994-09-08 Yuasa Battery Co Ltd Schwefelsäurekonzentrationssensor für Bleiakkumulatorbatterien
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3323343B2 (ja) * 1994-04-01 2002-09-09 日本碍子株式会社 センサ素子及び粒子センサ
JP3388060B2 (ja) * 1994-11-25 2003-03-17 日本碍子株式会社 流体の特性測定用素子及び流体の特性測定装置

Also Published As

Publication number Publication date
EP0809105B1 (en) 2001-12-05
US6047590A (en) 2000-04-11
JPH1038788A (ja) 1998-02-13
US5892143A (en) 1999-04-06
EP0809105A1 (en) 1997-11-26
CN1173642A (zh) 1998-02-18
JP3343030B2 (ja) 2002-11-11
US6490911B1 (en) 2002-12-10
DE69708751D1 (de) 2002-01-17

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