HUT54425A - Process for laser-activatied chemical precipitating vapor-fase materials on carrier - Google Patents

Process for laser-activatied chemical precipitating vapor-fase materials on carrier

Info

Publication number
HUT54425A
HUT54425A HU893978A HU397889A HUT54425A HU T54425 A HUT54425 A HU T54425A HU 893978 A HU893978 A HU 893978A HU 397889 A HU397889 A HU 397889A HU T54425 A HUT54425 A HU T54425A
Authority
HU
Hungary
Prior art keywords
activatied
fase
laser
carrier
materials
Prior art date
Application number
HU893978A
Other languages
Hungarian (hu)
Other versions
HU203585B (en
Inventor
Janos Farkas
Andras Hamori
Zsolt Szabo
Original Assignee
Mta Koezponti Fiz Kutato Intez
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mta Koezponti Fiz Kutato Intez filed Critical Mta Koezponti Fiz Kutato Intez
Priority to HU397889A priority Critical patent/HU203585B/en
Priority to PCT/HU1990/000058 priority patent/WO1991002107A1/en
Publication of HUT54425A publication Critical patent/HUT54425A/en
Publication of HU203585B publication Critical patent/HU203585B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
HU397889A 1989-08-07 1989-08-07 Process for laser-activated chemical gas-phase precipitation on carier HU203585B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
HU397889A HU203585B (en) 1989-08-07 1989-08-07 Process for laser-activated chemical gas-phase precipitation on carier
PCT/HU1990/000058 WO1991002107A1 (en) 1989-08-07 1990-08-07 Method for laser induced chemical vapor deposition on a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
HU397889A HU203585B (en) 1989-08-07 1989-08-07 Process for laser-activated chemical gas-phase precipitation on carier

Publications (2)

Publication Number Publication Date
HUT54425A true HUT54425A (en) 1991-02-28
HU203585B HU203585B (en) 1991-08-28

Family

ID=10966328

Family Applications (1)

Application Number Title Priority Date Filing Date
HU397889A HU203585B (en) 1989-08-07 1989-08-07 Process for laser-activated chemical gas-phase precipitation on carier

Country Status (2)

Country Link
HU (1) HU203585B (en)
WO (1) WO1991002107A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4581248A (en) * 1984-03-07 1986-04-08 Roche Gregory A Apparatus and method for laser-induced chemical vapor deposition
US4782787A (en) * 1986-01-08 1988-11-08 Roche Gregory A Apparatus for laser-induced chemical vapor deposition
US4748045A (en) * 1986-04-09 1988-05-31 Massachusetts Institute Of Technology Method and apparatus for photodeposition of films on surfaces
WO1988005087A1 (en) * 1986-12-25 1988-07-14 Kawasaki Steel Corporation Optical cvd process
FR2623820A1 (en) * 1987-11-30 1989-06-02 Gen Electric GAS PHASE DEPOSITION BY LASER CHEMICAL PROCESS USING FIBER OPTIC BEAM
DE3741672A1 (en) * 1987-12-09 1989-06-22 Asea Brown Boveri METHOD AND ARRANGEMENT FOR THE SURFACE TREATMENT OF SUBSTRATES
DD275076A1 (en) * 1988-08-26 1990-01-10 Akad Wissenschaften Ddr METHOD AND ARRANGEMENT FOR STRUCTURED LAYER DEPOSITION BY MEANS OF LASER LIGHT

Also Published As

Publication number Publication date
HU203585B (en) 1991-08-28
WO1991002107A1 (en) 1991-02-21

Similar Documents

Publication Publication Date Title
GB8917157D0 (en) Chemical process
GB8916480D0 (en) Chemical process
GB8805447D0 (en) Chemical process
GB8802731D0 (en) Chemical process
GB8802219D0 (en) Chemical process
GB8918965D0 (en) Chemical process
GB8911080D0 (en) Chemical process
GB8909574D0 (en) Chemical process
GB8916478D0 (en) Chemical process
HUT54425A (en) Process for laser-activatied chemical precipitating vapor-fase materials on carrier
GB8804693D0 (en) Chemical process
GB8916477D0 (en) Chemical process
GB8916479D0 (en) Chemical process
GB8809836D0 (en) Chemical process
GB8923014D0 (en) Chemical process
GB8928382D0 (en) Chemical process
GB8915411D0 (en) Chemical process
GB8924609D0 (en) Chemical process
GB8900149D0 (en) Chemical process
GB8900151D0 (en) Chemical process
GB8918271D0 (en) Chemical process
GB8918272D0 (en) Chemical process
GB8924585D0 (en) Chemical process
GB8904344D0 (en) Chemical process
GB8923031D0 (en) Chemical process

Legal Events

Date Code Title Description
HMM4 Cancellation of final prot. due to non-payment of fee