HK1251045A1 - 照明光學系統、曝光裝置以及設備製造方法、補償濾光器和曝光光學系統 - Google Patents

照明光學系統、曝光裝置以及設備製造方法、補償濾光器和曝光光學系統

Info

Publication number
HK1251045A1
HK1251045A1 HK18110107.9A HK18110107A HK1251045A1 HK 1251045 A1 HK1251045 A1 HK 1251045A1 HK 18110107 A HK18110107 A HK 18110107A HK 1251045 A1 HK1251045 A1 HK 1251045A1
Authority
HK
Hong Kong
Prior art keywords
optical system
exposure
device manufacturing
compensation filter
exposure apparatus
Prior art date
Application number
HK18110107.9A
Other languages
English (en)
Inventor
Kouji Muramatsu
Osamu Tanitsu
Hirohisa Tanaka
Masaya Yamamoto
Norio Miyake
Yasushi Mizuno
Ryuji Takaya
Risa Yoshimoto
Hiroyuki Hirota
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2008033390A external-priority patent/JP2009194159A/ja
Priority claimed from JP2008187977A external-priority patent/JP2010027876A/ja
Priority claimed from JP2008264961A external-priority patent/JP2010097975A/ja
Priority claimed from US12/366,429 external-priority patent/US8908151B2/en
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1251045A1 publication Critical patent/HK1251045A1/zh

Links

HK18110107.9A 2008-02-14 2018-08-06 照明光學系統、曝光裝置以及設備製造方法、補償濾光器和曝光光學系統 HK1251045A1 (zh)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP2008033390A JP2009194159A (ja) 2008-02-14 2008-02-14 光学ユニット、照明光学系、露光装置及びデバイスの製造方法
US7113008P 2008-04-14 2008-04-14
US7144608P 2008-04-29 2008-04-29
US7144408P 2008-04-29 2008-04-29
US12974508P 2008-07-16 2008-07-16
US12978608P 2008-07-18 2008-07-18
JP2008187977A JP2010027876A (ja) 2008-07-19 2008-07-19 減光ユニット、照明光学系、露光装置、およびデバイス製造方法
US13604408P 2008-08-08 2008-08-08
US13647308P 2008-09-08 2008-09-08
JP2008264961A JP2010097975A (ja) 2008-10-14 2008-10-14 補正ユニット、照明光学系、露光装置、およびデバイス製造方法
US12/366,429 US8908151B2 (en) 2008-02-14 2009-02-05 Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system

Publications (1)

Publication Number Publication Date
HK1251045A1 true HK1251045A1 (zh) 2019-01-18

Family

ID=71461329

Family Applications (1)

Application Number Title Priority Date Filing Date
HK18110107.9A HK1251045A1 (zh) 2008-02-14 2018-08-06 照明光學系統、曝光裝置以及設備製造方法、補償濾光器和曝光光學系統

Country Status (1)

Country Link
HK (1) HK1251045A1 (zh)

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