HK1185051A1 - Non-contact transfer apparatus - Google Patents
Non-contact transfer apparatusInfo
- Publication number
- HK1185051A1 HK1185051A1 HK13112429.1A HK13112429A HK1185051A1 HK 1185051 A1 HK1185051 A1 HK 1185051A1 HK 13112429 A HK13112429 A HK 13112429A HK 1185051 A1 HK1185051 A1 HK 1185051A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- transfer apparatus
- contact transfer
- contact
- transfer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011005481 | 2011-01-14 | ||
PCT/JP2011/071591 WO2012096033A1 (en) | 2011-01-14 | 2011-09-22 | Non-contact transfer apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1185051A1 true HK1185051A1 (en) | 2014-02-07 |
Family
ID=46506950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK13112429.1A HK1185051A1 (en) | 2011-01-14 | 2013-11-05 | Non-contact transfer apparatus |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP5819859B2 (en) |
KR (1) | KR20140031180A (en) |
CN (1) | CN103298717B (en) |
HK (1) | HK1185051A1 (en) |
IL (1) | IL227199A (en) |
TW (1) | TWI541179B (en) |
WO (1) | WO2012096033A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5998086B2 (en) * | 2012-04-03 | 2016-09-28 | オイレス工業株式会社 | Air plate for levitation |
JP2014218342A (en) * | 2013-05-09 | 2014-11-20 | オイレス工業株式会社 | Supporting air plate and gas flow resistor thereof |
JP2015034078A (en) * | 2013-08-09 | 2015-02-19 | オイレス工業株式会社 | Supporting air plate, and gas flow resistor of the same |
JP6226419B2 (en) * | 2013-08-22 | 2017-11-08 | オイレス工業株式会社 | Levitation transfer device |
CN104555348A (en) * | 2014-11-28 | 2015-04-29 | 祥鑫科技股份有限公司 | Air-blowing floatation conveying belt |
TWI582896B (en) * | 2015-08-18 | 2017-05-11 | 由田新技股份有限公司 | Air floating table |
TWI615914B (en) * | 2016-01-18 | 2018-02-21 | Structure of transistor handling inspection | |
TWI577626B (en) * | 2016-06-04 | 2017-04-11 | 由田新技股份有限公司 | Air floating table |
KR102300934B1 (en) * | 2016-06-21 | 2021-09-13 | 코아 플로우 리미티드 | Non-contact support platform with edge lifting |
JP7437187B2 (en) | 2020-02-26 | 2024-02-22 | Jswアクティナシステム株式会社 | Levitation conveyance device and laser processing device |
JP7402081B2 (en) * | 2020-02-27 | 2023-12-20 | 本田技研工業株式会社 | laser processing equipment |
CN114471347B (en) * | 2022-01-29 | 2023-07-18 | 浙江汉信科技有限公司 | Mixing equipment and blanking device thereof |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004273574A (en) * | 2003-03-05 | 2004-09-30 | Wakomu Denso:Kk | Substrate levitation equipment and method therefor |
JP4310540B2 (en) * | 2003-12-17 | 2009-08-12 | Smc株式会社 | Synthetic resin porous flow path plate and manufacturing method thereof |
JP2006347719A (en) * | 2005-06-17 | 2006-12-28 | Shinko Electric Co Ltd | Gas floating unit and gas floating carrying device |
JP4553376B2 (en) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | Floating substrate transfer processing apparatus and floating substrate transfer processing method |
KR101530978B1 (en) * | 2008-03-24 | 2015-06-24 | 오일레스고교 가부시키가이샤 | Non-contact carrier device |
JP2010232472A (en) * | 2009-03-27 | 2010-10-14 | Dainippon Screen Mfg Co Ltd | Substrate transfer device and substrate processing apparatus |
TWI449653B (en) * | 2009-04-03 | 2014-08-21 | Oiles Industry Co Ltd | Non - contact delivery device |
JP2010254463A (en) * | 2009-04-28 | 2010-11-11 | Nitta Moore Co | Non-contact workpiece supporting device |
-
2011
- 2011-09-22 KR KR1020137018034A patent/KR20140031180A/en active IP Right Grant
- 2011-09-22 JP JP2012552627A patent/JP5819859B2/en active Active
- 2011-09-22 CN CN201180065170.2A patent/CN103298717B/en not_active Expired - Fee Related
- 2011-09-22 WO PCT/JP2011/071591 patent/WO2012096033A1/en active Application Filing
- 2011-10-21 TW TW100138326A patent/TWI541179B/en not_active IP Right Cessation
-
2013
- 2013-06-26 IL IL227199A patent/IL227199A/en not_active IP Right Cessation
- 2013-11-05 HK HK13112429.1A patent/HK1185051A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201231370A (en) | 2012-08-01 |
KR20140031180A (en) | 2014-03-12 |
CN103298717B (en) | 2015-07-22 |
JPWO2012096033A1 (en) | 2014-06-09 |
JP5819859B2 (en) | 2015-11-24 |
TWI541179B (en) | 2016-07-11 |
IL227199A (en) | 2016-10-31 |
CN103298717A (en) | 2013-09-11 |
WO2012096033A1 (en) | 2012-07-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20190927 |