HK1152388A1 - Exposure apparatus - Google Patents

Exposure apparatus

Info

Publication number
HK1152388A1
HK1152388A1 HK11106229.7A HK11106229A HK1152388A1 HK 1152388 A1 HK1152388 A1 HK 1152388A1 HK 11106229 A HK11106229 A HK 11106229A HK 1152388 A1 HK1152388 A1 HK 1152388A1
Authority
HK
Hong Kong
Prior art keywords
exposure apparatus
exposure
Prior art date
Application number
HK11106229.7A
Inventor
Takeshi Shirai
Takao Kokubun
Hitoshi Ishizawa
Atsunobu Murakami
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1152388A1 publication Critical patent/HK1152388A1/en

Links

HK11106229.7A 2003-08-26 2011-06-17 Exposure apparatus HK1152388A1 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2003302122 2003-08-26
JP2003303432 2003-08-27
JP2003302519 2003-08-27
JP2003336162 2003-09-26
JP2004042157 2004-02-18
JP2004041848 2004-02-18
JP2004042752 2004-02-19
JP2004044229 2004-02-20

Publications (1)

Publication Number Publication Date
HK1152388A1 true HK1152388A1 (en) 2012-02-24

Family

ID=49230432

Family Applications (1)

Application Number Title Priority Date Filing Date
HK11106229.7A HK1152388A1 (en) 2003-08-26 2011-06-17 Exposure apparatus

Country Status (1)

Country Link
HK (1) HK1152388A1 (en)

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20200828