HK1096490A1 - Electron cyclotron resonance(ecr) plasma source having a linear plasma discharge opening - Google Patents
Electron cyclotron resonance(ecr) plasma source having a linear plasma discharge openingInfo
- Publication number
- HK1096490A1 HK1096490A1 HK07103444.9A HK07103444A HK1096490A1 HK 1096490 A1 HK1096490 A1 HK 1096490A1 HK 07103444 A HK07103444 A HK 07103444A HK 1096490 A1 HK1096490 A1 HK 1096490A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- discharge opening
- plasma
- linear
- ecr
- plasma discharge
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
- H05H1/18—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields wherein the fields oscillate at very high frequency, e.g. in the microwave range, e.g. using cyclotron resonance
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10341239A DE10341239B4 (de) | 2003-09-08 | 2003-09-08 | ECR-Plasmaquelle mit linearer Plasmaaustrittsöffnung |
PCT/DE2004/002027 WO2005027595A2 (de) | 2003-09-08 | 2004-09-08 | Ecr-plasmaquelle mit linearer plasmaaustrittsöffnung |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1096490A1 true HK1096490A1 (en) | 2007-06-01 |
Family
ID=34305603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK07103444.9A HK1096490A1 (en) | 2003-09-08 | 2007-03-30 | Electron cyclotron resonance(ecr) plasma source having a linear plasma discharge opening |
Country Status (8)
Country | Link |
---|---|
US (1) | US20060254521A1 (xx) |
EP (1) | EP1665324B1 (xx) |
JP (1) | JP2007505451A (xx) |
CN (1) | CN100530509C (xx) |
AT (1) | ATE352862T1 (xx) |
DE (2) | DE10341239B4 (xx) |
HK (1) | HK1096490A1 (xx) |
WO (1) | WO2005027595A2 (xx) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7999479B2 (en) * | 2009-04-16 | 2011-08-16 | Varian Semiconductor Equipment Associates, Inc. | Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control |
US8203199B2 (en) * | 2009-12-10 | 2012-06-19 | National Semiconductor Corporation | Tie bar and mold cavity bar arrangements for multiple leadframe stack package |
WO2011142125A1 (ja) * | 2010-05-13 | 2011-11-17 | パナソニック株式会社 | プラズマ処理装置及び方法 |
FR2995493B1 (fr) | 2012-09-11 | 2014-08-22 | Hydromecanique & Frottement | Dispositif pour generer un plasma presentant une etendue importante le long d'un axe par resonnance cyclotronique electronique rce a partir d'un milieu gazeux |
CN105088196A (zh) * | 2015-08-26 | 2015-11-25 | 中国科学院等离子体物理研究所 | 一种大面积、高密度微波等离子体产生装置 |
EP3309815B1 (de) | 2016-10-12 | 2019-03-20 | Meyer Burger (Germany) AG | Plasmabehandlungsvorrichtung mit zwei, miteinander gekoppelten mikrowellenplasmaquellen sowie verfahren zum betreiben einer solchen plasmabehandlungsvorrichtung |
DE102018127716A1 (de) | 2018-11-07 | 2020-05-07 | Meyer Burger (Germany) Gmbh | Membranherstellungsanlage |
CN117894653A (zh) * | 2022-12-19 | 2024-04-16 | 广东省新兴激光等离子体技术研究院 | 引出带状离子束的离子源 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1027549C (zh) * | 1985-10-14 | 1995-02-01 | 株式会社半导体能源研究所 | 利用磁场的微波增强型cvd***和方法 |
JPH0770519B2 (ja) * | 1986-02-28 | 1995-07-31 | 日本電信電話株式会社 | プラズマ処理装置 |
JPH01159937A (ja) * | 1987-12-16 | 1989-06-22 | Hitachi Ltd | 負イオン源 |
DE3923390A1 (de) * | 1988-07-14 | 1990-01-25 | Canon Kk | Vorrichtung zur bildung eines grossflaechigen aufgedampften films unter verwendung von wenigstens zwei getrennt gebildeten aktivierten gasen |
CN1023239C (zh) * | 1988-07-14 | 1993-12-22 | 佳能株式会社 | 利用分别生成的多种活性气体制备大面积沉积膜的装置 |
JPH0225574A (ja) * | 1988-07-14 | 1990-01-29 | Canon Inc | 堆積膜形成装置 |
JPH068510B2 (ja) * | 1988-09-02 | 1994-02-02 | 日本電信電話株式会社 | プラズマ/イオン生成源およびプラズマ/イオン処理装置 |
JPH07105384B2 (ja) * | 1988-11-11 | 1995-11-13 | 三菱電機株式会社 | プラズマ反応装置 |
JP2507059B2 (ja) * | 1989-06-19 | 1996-06-12 | 松下電器産業株式会社 | マイクロ波プラズマ源および処理装置 |
JPH03150377A (ja) * | 1989-11-02 | 1991-06-26 | Ricoh Co Ltd | プラズマ処理装置 |
JPH03191068A (ja) * | 1989-12-20 | 1991-08-21 | Matsushita Electric Ind Co Ltd | マイクロ波プラズマ装置 |
JP2546405B2 (ja) * | 1990-03-12 | 1996-10-23 | 富士電機株式会社 | プラズマ処理装置ならびにその運転方法 |
JPH0417675A (ja) * | 1990-05-10 | 1992-01-22 | Ricoh Co Ltd | Ecrプラズマcvd装置 |
FR2711035B1 (fr) * | 1993-10-04 | 1995-12-29 | Plasmion | Dispositif et procédé pour former un plasma par application de micro-ondes. |
US5466295A (en) * | 1993-10-25 | 1995-11-14 | Board Of Regents Acting For The Univ. Of Michigan | ECR plasma generation apparatus and methods |
DE19603685C1 (de) * | 1996-02-02 | 1997-08-21 | Wu Jeng Ming | Mikrowellengerät |
JPH11214196A (ja) * | 1998-01-29 | 1999-08-06 | Mitsubishi Electric Corp | プラズマ発生装置 |
DE19812558B4 (de) * | 1998-03-21 | 2010-09-23 | Roth & Rau Ag | Vorrichtung zur Erzeugung linear ausgedehnter ECR-Plasmen |
JPH11297673A (ja) * | 1998-04-15 | 1999-10-29 | Hitachi Ltd | プラズマ処理装置及びクリーニング方法 |
DE19925493C1 (de) * | 1999-06-04 | 2001-01-18 | Fraunhofer Ges Forschung | Linear ausgedehnte Anordnung zur großflächigen Mikrowellenbehandlung und zur großflächigen Plasmaerzeugung |
SE521904C2 (sv) * | 1999-11-26 | 2003-12-16 | Ladislav Bardos | Anordning för hybridplasmabehandling |
TW521540B (en) * | 2001-10-03 | 2003-02-21 | Hau-Ran Ni | An ECR plasma reactor system with multiple exciters |
-
2003
- 2003-09-08 DE DE10341239A patent/DE10341239B4/de not_active Expired - Fee Related
-
2004
- 2004-09-08 EP EP04786748A patent/EP1665324B1/de not_active Not-in-force
- 2004-09-08 WO PCT/DE2004/002027 patent/WO2005027595A2/de active IP Right Grant
- 2004-09-08 US US10/571,161 patent/US20060254521A1/en not_active Abandoned
- 2004-09-08 AT AT04786748T patent/ATE352862T1/de not_active IP Right Cessation
- 2004-09-08 DE DE502004002806T patent/DE502004002806D1/de active Active
- 2004-09-08 CN CNB2004800257138A patent/CN100530509C/zh not_active Expired - Fee Related
- 2004-09-08 JP JP2006525621A patent/JP2007505451A/ja active Pending
-
2007
- 2007-03-30 HK HK07103444.9A patent/HK1096490A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20060254521A1 (en) | 2006-11-16 |
EP1665324B1 (de) | 2007-01-24 |
DE502004002806D1 (de) | 2007-03-15 |
WO2005027595A2 (de) | 2005-03-24 |
JP2007505451A (ja) | 2007-03-08 |
WO2005027595A3 (de) | 2005-06-16 |
DE10341239A1 (de) | 2005-04-14 |
CN1849690A (zh) | 2006-10-18 |
EP1665324A2 (de) | 2006-06-07 |
DE10341239B4 (de) | 2006-05-24 |
ATE352862T1 (de) | 2007-02-15 |
CN100530509C (zh) | 2009-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20210908 |