HK1021401A1 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
HK1021401A1
HK1021401A1 HK00100211A HK00100211A HK1021401A1 HK 1021401 A1 HK1021401 A1 HK 1021401A1 HK 00100211 A HK00100211 A HK 00100211A HK 00100211 A HK00100211 A HK 00100211A HK 1021401 A1 HK1021401 A1 HK 1021401A1
Authority
HK
Hong Kong
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Application number
HK00100211A
Inventor
Simon Mauro De
Vincenzo Spaziani
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Publication of HK1021401A1 publication Critical patent/HK1021401A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B27/00—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders
    • F04B27/04—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement
    • F04B27/053—Multi-cylinder pumps specially adapted for elastic fluids and characterised by number or arrangement of cylinders having cylinders in star- or fan-arrangement with an actuating element at the inner ends of the cylinders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
HK00100211A 1997-12-24 2000-01-13 Vacuum pump HK1021401A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT97TO001139A IT1297347B1 (en) 1997-12-24 1997-12-24 VACUUM PUMP.

Publications (1)

Publication Number Publication Date
HK1021401A1 true HK1021401A1 (en) 2000-06-09

Family

ID=11416233

Family Applications (1)

Application Number Title Priority Date Filing Date
HK00100211A HK1021401A1 (en) 1997-12-24 2000-01-13 Vacuum pump

Country Status (4)

Country Link
EP (1) EP0931939B1 (en)
DE (1) DE69815806T2 (en)
HK (1) HK1021401A1 (en)
IT (1) IT1297347B1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
FR2822200B1 (en) * 2001-03-19 2003-09-26 Cit Alcatel PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES
JP4250353B2 (en) * 2001-06-22 2009-04-08 エドワーズ株式会社 Vacuum pump
CN101852199B (en) * 2009-03-31 2011-11-09 储继国 Composite vacuum pump
JP6009193B2 (en) * 2012-03-30 2016-10-19 株式会社荏原製作所 Vacuum exhaust device
DE102013213257A1 (en) * 2013-07-05 2015-01-08 Pfeiffer Vacuum Gmbh Diaphragm vacuum pump
EP3267040B1 (en) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolecular pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (en) * 1986-06-12 1995-09-13 株式会社日立製作所 Vacuum exhaust device
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
EP0344345B1 (en) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem for a leak detecting apparatus
FR2640697B1 (en) * 1988-12-16 1993-01-08 Cit Alcatel PUMPING ASSEMBLY FOR PROVIDING HIGH VACUUMS
FR2656658B1 (en) * 1989-12-28 1993-01-29 Cit Alcatel MIXED TURBOMOLECULAR VACUUM PUMP, WITH TWO ROTATION SHAFTS AND WITH ATMOSPHERIC PRESSURE DISCHARGE.
IT1241431B (en) * 1990-03-09 1994-01-17 Varian Spa PERFECTED TURBOMOLECULAR PUMP.
DE9305554U1 (en) * 1993-04-15 1993-06-17 Knf-Neuberger Gmbh, 7800 Freiburg, De

Also Published As

Publication number Publication date
DE69815806T2 (en) 2004-05-19
EP0931939B1 (en) 2003-06-25
EP0931939A2 (en) 1999-07-28
ITTO971139A1 (en) 1999-06-24
IT1297347B1 (en) 1999-09-01
EP0931939A3 (en) 2000-08-30
DE69815806D1 (en) 2003-07-31

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Legal Events

Date Code Title Description
PF Patent in force
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20090617