GB9922693D0 - Method and apparatus for forming a film on a substrate - Google Patents

Method and apparatus for forming a film on a substrate

Info

Publication number
GB9922693D0
GB9922693D0 GBGB9922693.8A GB9922693A GB9922693D0 GB 9922693 D0 GB9922693 D0 GB 9922693D0 GB 9922693 A GB9922693 A GB 9922693A GB 9922693 D0 GB9922693 D0 GB 9922693D0
Authority
GB
United Kingdom
Prior art keywords
substrate
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9922693.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GBGB9922693.8A priority Critical patent/GB9922693D0/en
Publication of GB9922693D0 publication Critical patent/GB9922693D0/en
Priority to DE10081808T priority patent/DE10081808T1/en
Priority to CNB008012040A priority patent/CN1185694C/en
Priority to PCT/GB2000/002301 priority patent/WO2001001472A1/en
Priority to US09/763,641 priority patent/US7309662B1/en
Priority to GB0102179A priority patent/GB2355992B/en
Priority to KR1020017001796A priority patent/KR20010072415A/en
Priority to JP2001506599A priority patent/JP2003503849A/en
Ceased legal-status Critical Current

Links

GBGB9922693.8A 1999-06-26 1999-09-25 Method and apparatus for forming a film on a substrate Ceased GB9922693D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GBGB9922693.8A GB9922693D0 (en) 1999-09-25 1999-09-25 Method and apparatus for forming a film on a substrate
DE10081808T DE10081808T1 (en) 1999-06-26 2000-06-26 Method and device for forming a film on a substrate
CNB008012040A CN1185694C (en) 1999-06-26 2000-06-26 Method and apparatus for forming film on substrate
PCT/GB2000/002301 WO2001001472A1 (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
US09/763,641 US7309662B1 (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
GB0102179A GB2355992B (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
KR1020017001796A KR20010072415A (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate
JP2001506599A JP2003503849A (en) 1999-06-26 2000-06-26 Method and apparatus for forming a film on a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9922693.8A GB9922693D0 (en) 1999-09-25 1999-09-25 Method and apparatus for forming a film on a substrate

Publications (1)

Publication Number Publication Date
GB9922693D0 true GB9922693D0 (en) 1999-11-24

Family

ID=10861586

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9922693.8A Ceased GB9922693D0 (en) 1999-06-26 1999-09-25 Method and apparatus for forming a film on a substrate

Country Status (1)

Country Link
GB (1) GB9922693D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)