GB9922693D0 - Method and apparatus for forming a film on a substrate - Google Patents
Method and apparatus for forming a film on a substrateInfo
- Publication number
- GB9922693D0 GB9922693D0 GBGB9922693.8A GB9922693A GB9922693D0 GB 9922693 D0 GB9922693 D0 GB 9922693D0 GB 9922693 A GB9922693 A GB 9922693A GB 9922693 D0 GB9922693 D0 GB 9922693D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9922693.8A GB9922693D0 (en) | 1999-09-25 | 1999-09-25 | Method and apparatus for forming a film on a substrate |
DE10081808T DE10081808T1 (en) | 1999-06-26 | 2000-06-26 | Method and device for forming a film on a substrate |
CNB008012040A CN1185694C (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming film on substrate |
PCT/GB2000/002301 WO2001001472A1 (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming a film on a substrate |
US09/763,641 US7309662B1 (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming a film on a substrate |
GB0102179A GB2355992B (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming a film on a substrate |
KR1020017001796A KR20010072415A (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming a film on a substrate |
JP2001506599A JP2003503849A (en) | 1999-06-26 | 2000-06-26 | Method and apparatus for forming a film on a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9922693.8A GB9922693D0 (en) | 1999-09-25 | 1999-09-25 | Method and apparatus for forming a film on a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9922693D0 true GB9922693D0 (en) | 1999-11-24 |
Family
ID=10861586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9922693.8A Ceased GB9922693D0 (en) | 1999-06-26 | 1999-09-25 | Method and apparatus for forming a film on a substrate |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB9922693D0 (en) |
-
1999
- 1999-09-25 GB GBGB9922693.8A patent/GB9922693D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |