GB9700572D0 - Ultra-violet lithographic etching method - Google Patents
Ultra-violet lithographic etching methodInfo
- Publication number
- GB9700572D0 GB9700572D0 GBGB9700572.2A GB9700572A GB9700572D0 GB 9700572 D0 GB9700572 D0 GB 9700572D0 GB 9700572 A GB9700572 A GB 9700572A GB 9700572 D0 GB9700572 D0 GB 9700572D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- ultra
- etching method
- lithographic etching
- violet
- violet lithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9700572.2A GB9700572D0 (en) | 1997-01-13 | 1997-01-13 | Ultra-violet lithographic etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9700572.2A GB9700572D0 (en) | 1997-01-13 | 1997-01-13 | Ultra-violet lithographic etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9700572D0 true GB9700572D0 (en) | 1997-03-05 |
Family
ID=10805890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9700572.2A Pending GB9700572D0 (en) | 1997-01-13 | 1997-01-13 | Ultra-violet lithographic etching method |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB9700572D0 (en) |
-
1997
- 1997-01-13 GB GBGB9700572.2A patent/GB9700572D0/en active Pending
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