GB9700572D0 - Ultra-violet lithographic etching method - Google Patents

Ultra-violet lithographic etching method

Info

Publication number
GB9700572D0
GB9700572D0 GBGB9700572.2A GB9700572A GB9700572D0 GB 9700572 D0 GB9700572 D0 GB 9700572D0 GB 9700572 A GB9700572 A GB 9700572A GB 9700572 D0 GB9700572 D0 GB 9700572D0
Authority
GB
United Kingdom
Prior art keywords
ultra
etching method
lithographic etching
violet
violet lithographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9700572.2A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Council for the Central Laboratory of the Research Councils
Original Assignee
Council for the Central Laboratory of the Research Councils
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Council for the Central Laboratory of the Research Councils filed Critical Council for the Central Laboratory of the Research Councils
Priority to GBGB9700572.2A priority Critical patent/GB9700572D0/en
Publication of GB9700572D0 publication Critical patent/GB9700572D0/en
Pending legal-status Critical Current

Links

GBGB9700572.2A 1997-01-13 1997-01-13 Ultra-violet lithographic etching method Pending GB9700572D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GBGB9700572.2A GB9700572D0 (en) 1997-01-13 1997-01-13 Ultra-violet lithographic etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9700572.2A GB9700572D0 (en) 1997-01-13 1997-01-13 Ultra-violet lithographic etching method

Publications (1)

Publication Number Publication Date
GB9700572D0 true GB9700572D0 (en) 1997-03-05

Family

ID=10805890

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9700572.2A Pending GB9700572D0 (en) 1997-01-13 1997-01-13 Ultra-violet lithographic etching method

Country Status (1)

Country Link
GB (1) GB9700572D0 (en)

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