GB9315214D0 - Optical systems - Google Patents

Optical systems

Info

Publication number
GB9315214D0
GB9315214D0 GB939315214A GB9315214A GB9315214D0 GB 9315214 D0 GB9315214 D0 GB 9315214D0 GB 939315214 A GB939315214 A GB 939315214A GB 9315214 A GB9315214 A GB 9315214A GB 9315214 D0 GB9315214 D0 GB 9315214D0
Authority
GB
United Kingdom
Prior art keywords
optical systems
optical
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB939315214A
Other versions
GB2269024A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Nottingham
Original Assignee
University of Nottingham
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Nottingham filed Critical University of Nottingham
Publication of GB9315214D0 publication Critical patent/GB9315214D0/en
Publication of GB2269024A publication Critical patent/GB2269024A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0816—Catadioptric systems using two curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
GB9315214A 1992-07-22 1993-07-22 Optical system having at least one tilted Mangin mirror Withdrawn GB2269024A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929215595A GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems

Publications (2)

Publication Number Publication Date
GB9315214D0 true GB9315214D0 (en) 1993-09-08
GB2269024A GB2269024A (en) 1994-01-26

Family

ID=10719122

Family Applications (2)

Application Number Title Priority Date Filing Date
GB929215595A Pending GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems
GB9315214A Withdrawn GB2269024A (en) 1992-07-22 1993-07-22 Optical system having at least one tilted Mangin mirror

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB929215595A Pending GB9215595D0 (en) 1992-07-22 1992-07-22 Optical systems

Country Status (1)

Country Link
GB (2) GB9215595D0 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512631B2 (en) 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
US6842298B1 (en) 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US7136234B2 (en) 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US7136159B2 (en) 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US7884998B2 (en) 2003-02-21 2011-02-08 Kla - Tencor Corporation Catadioptric microscope objective employing immersion liquid for use in broad band microscopy
US7672043B2 (en) 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
US7646533B2 (en) 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US7180658B2 (en) 2003-02-21 2007-02-20 Kla-Tencor Technologies Corporation High performance catadioptric imaging system
US7639419B2 (en) 2003-02-21 2009-12-29 Kla-Tencor Technologies, Inc. Inspection system using small catadioptric objective
KR100833230B1 (en) * 2003-04-07 2008-05-28 삼성전자주식회사 Illumination optical system and image projection system applied it
US8665536B2 (en) 2007-06-19 2014-03-04 Kla-Tencor Corporation External beam delivery system for laser dark-field illumination in a catadioptric optical system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB812968A (en) * 1955-01-22 1959-05-06 Svenska Ackumulator Ab Improvements in and relating to optical systems
SE455237B (en) * 1986-10-28 1988-06-27 Philips Norden Ab MONOLITIC MIRROR OBJECTIVE AND OPTICAL ARRANGEMENT INCLUDING TWO SADANA MIRROR OBJECTIVES

Also Published As

Publication number Publication date
GB2269024A (en) 1994-01-26
GB9215595D0 (en) 1992-09-02

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)