GB9206552D0 - Bubblers - Google Patents

Bubblers

Info

Publication number
GB9206552D0
GB9206552D0 GB929206552A GB9206552A GB9206552D0 GB 9206552 D0 GB9206552 D0 GB 9206552D0 GB 929206552 A GB929206552 A GB 929206552A GB 9206552 A GB9206552 A GB 9206552A GB 9206552 D0 GB9206552 D0 GB 9206552D0
Authority
GB
United Kingdom
Prior art keywords
bubblers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB929206552A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epichem Ltd
Original Assignee
Epichem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epichem Ltd filed Critical Epichem Ltd
Priority to GB929206552A priority Critical patent/GB9206552D0/en
Publication of GB9206552D0 publication Critical patent/GB9206552D0/en
Priority to AU37653/93A priority patent/AU3765393A/en
Priority to GB9306377A priority patent/GB2265390A/en
Priority to PCT/GB1993/000635 priority patent/WO1993019223A1/en
Pending legal-status Critical Current

Links

GB929206552A 1992-03-26 1992-03-26 Bubblers Pending GB9206552D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB929206552A GB9206552D0 (en) 1992-03-26 1992-03-26 Bubblers
AU37653/93A AU3765393A (en) 1992-03-26 1993-03-26 Bubblers
GB9306377A GB2265390A (en) 1992-03-26 1993-03-26 Bubblers for use in vapour phase deposition
PCT/GB1993/000635 WO1993019223A1 (en) 1992-03-26 1993-03-26 Bubblers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929206552A GB9206552D0 (en) 1992-03-26 1992-03-26 Bubblers

Publications (1)

Publication Number Publication Date
GB9206552D0 true GB9206552D0 (en) 1992-05-06

Family

ID=10712854

Family Applications (2)

Application Number Title Priority Date Filing Date
GB929206552A Pending GB9206552D0 (en) 1992-03-26 1992-03-26 Bubblers
GB9306377A Withdrawn GB2265390A (en) 1992-03-26 1993-03-26 Bubblers for use in vapour phase deposition

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9306377A Withdrawn GB2265390A (en) 1992-03-26 1993-03-26 Bubblers for use in vapour phase deposition

Country Status (3)

Country Link
AU (1) AU3765393A (en)
GB (2) GB9206552D0 (en)
WO (1) WO1993019223A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1747302B1 (en) 2004-05-20 2012-12-26 Akzo Nobel N.V. Bubbler for constant vapor delivery of a solid chemical

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4506815A (en) * 1982-12-09 1985-03-26 Thiokol Corporation Bubbler cylinder and dip tube device
US4632710A (en) * 1983-05-10 1986-12-30 Raytheon Company Vapor phase epitaxial growth of carbon doped layers of Group III-V materials
JPS60122735A (en) * 1983-12-02 1985-07-01 Sumitomo Electric Ind Ltd Device for supplying gaseous starting material
US4582480A (en) * 1984-08-02 1986-04-15 At&T Technologies, Inc. Methods of and apparatus for vapor delivery control in optical preform manufacture
US4583372A (en) * 1985-01-30 1986-04-22 At&T Technologies, Inc. Methods of and apparatus for storing and delivering a fluid
EP0305790B1 (en) * 1985-03-20 1993-01-13 Sharp Kabushiki Kaisha Production of graphite intercalation compound and doped carbon films
US4689094A (en) * 1985-12-24 1987-08-25 Raytheon Company Compensation doping of group III-V materials
GB2223509B (en) * 1988-10-04 1992-08-05 Stc Plc Vapour phase processing
JP2614338B2 (en) * 1990-01-11 1997-05-28 株式会社東芝 Liquid source container

Also Published As

Publication number Publication date
GB2265390A (en) 1993-09-29
WO1993019223A1 (en) 1993-09-30
GB9306377D0 (en) 1993-05-19
AU3765393A (en) 1993-10-21

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