GB9126507D0 - Energy analyser - Google Patents
Energy analyserInfo
- Publication number
- GB9126507D0 GB9126507D0 GB919126507A GB9126507A GB9126507D0 GB 9126507 D0 GB9126507 D0 GB 9126507D0 GB 919126507 A GB919126507 A GB 919126507A GB 9126507 A GB9126507 A GB 9126507A GB 9126507 D0 GB9126507 D0 GB 9126507D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- energy analyser
- analyser
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2444—Electron Multiplier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9126507A GB2262649B (en) | 1991-12-13 | 1991-12-13 | Energy analyser |
PCT/GB1992/002308 WO1993012534A1 (en) | 1991-12-13 | 1992-12-11 | Energy analyser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9126507A GB2262649B (en) | 1991-12-13 | 1991-12-13 | Energy analyser |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9126507D0 true GB9126507D0 (en) | 1992-02-12 |
GB2262649A GB2262649A (en) | 1993-06-23 |
GB2262649B GB2262649B (en) | 1995-03-01 |
Family
ID=10706219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9126507A Expired - Fee Related GB2262649B (en) | 1991-12-13 | 1991-12-13 | Energy analyser |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2262649B (en) |
WO (1) | WO1993012534A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5492867A (en) * | 1993-09-22 | 1996-02-20 | Westinghouse Elect. Corp. | Method for manufacturing a miniaturized solid state mass spectrograph |
US5386115A (en) * | 1993-09-22 | 1995-01-31 | Westinghouse Electric Corporation | Solid state micro-machined mass spectrograph universal gas detection sensor |
US5451784A (en) * | 1994-10-31 | 1995-09-19 | Applied Materials, Inc. | Composite diagnostic wafer for semiconductor wafer processing systems |
US5633497A (en) * | 1995-11-03 | 1997-05-27 | Varian Associates, Inc. | Surface coating to improve performance of ion trap mass spectrometers |
GB2315362A (en) * | 1996-07-12 | 1998-01-28 | Analytical Precision Ltd | Mass spectrometers |
DE10258118A1 (en) * | 2002-12-06 | 2004-07-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for measuring and determining charge carrier streams and parameters derived from them used in industrial coating devices comprises a sensor formed as a Faraday collector connected to an evaluation and control device |
FR2961010A1 (en) * | 2010-06-03 | 2011-12-09 | Ion Beam Services | DOSE MEASURING DEVICE FOR ION IMPLANTATION IN PLASMA IMMERSION MODE |
FR2961009A1 (en) * | 2010-06-03 | 2011-12-09 | Ion Beam Services | SECONDARY ELECTRON ELECTRON DETECTOR |
DE102014110334A1 (en) * | 2014-07-22 | 2016-01-28 | Krohne Messtechnik Gmbh | Method for separating electrically charged particles with respect to their energy and energy filters |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3260844A (en) * | 1964-01-31 | 1966-07-12 | Atomic Energy Commission | Calutron with means for reducing low frequency radio frequency signals in an ion beam |
JPS5823705B2 (en) * | 1977-08-24 | 1983-05-17 | 株式会社東芝 | radiation detector |
GB1596105A (en) * | 1978-02-20 | 1981-08-19 | Nat Res Dev | Electrostatic engergy analysis |
US4608493A (en) * | 1983-05-09 | 1986-08-26 | Sony Corporation | Faraday cup |
US4703256A (en) * | 1983-05-09 | 1987-10-27 | Sony Corporation | Faraday cups |
GB8821496D0 (en) * | 1988-09-14 | 1988-10-12 | Univ Manchester | Charged particle multidetector |
GB8914910D0 (en) * | 1989-06-29 | 1989-08-23 | Vg Instr Group | Charge transducer |
-
1991
- 1991-12-13 GB GB9126507A patent/GB2262649B/en not_active Expired - Fee Related
-
1992
- 1992-12-11 WO PCT/GB1992/002308 patent/WO1993012534A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2262649A (en) | 1993-06-23 |
GB2262649B (en) | 1995-03-01 |
WO1993012534A1 (en) | 1993-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19951213 |