GB8303596D0 - Support systems - Google Patents

Support systems

Info

Publication number
GB8303596D0
GB8303596D0 GB838303596A GB8303596A GB8303596D0 GB 8303596 D0 GB8303596 D0 GB 8303596D0 GB 838303596 A GB838303596 A GB 838303596A GB 8303596 A GB8303596 A GB 8303596A GB 8303596 D0 GB8303596 D0 GB 8303596D0
Authority
GB
United Kingdom
Prior art keywords
support systems
systems
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB838303596A
Other versions
GB2135115A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Original Assignee
Heraeus Quarzschmelze GmbH
Heraeus Schott Quarzschmelze GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzschmelze GmbH, Heraeus Schott Quarzschmelze GmbH filed Critical Heraeus Quarzschmelze GmbH
Priority to GB08303596A priority Critical patent/GB2135115A/en
Publication of GB8303596D0 publication Critical patent/GB8303596D0/en
Priority to DE8383301805T priority patent/DE3366974D1/en
Priority to DE198383301805T priority patent/DE93504T1/en
Priority to EP83301805A priority patent/EP0093504B1/en
Priority to US06/483,724 priority patent/US4523885A/en
Publication of GB2135115A publication Critical patent/GB2135115A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • C30B31/103—Mechanisms for moving either the charge or heater
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/005—Oxydation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB08303596A 1982-04-29 1983-02-09 Improvements in or relating to support systems Withdrawn GB2135115A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB08303596A GB2135115A (en) 1983-02-09 1983-02-09 Improvements in or relating to support systems
DE8383301805T DE3366974D1 (en) 1982-04-29 1983-03-30 Apparatus for introducing silicon wafers in magazines into a furnace
DE198383301805T DE93504T1 (en) 1982-04-29 1983-03-30 DEVICE FOR INSERTING SILICO DISC IN MAGAZINE WITHIN AN OVEN.
EP83301805A EP0093504B1 (en) 1982-04-29 1983-03-30 Apparatus for introducing silicon wafers in magazines into a furnace
US06/483,724 US4523885A (en) 1982-04-29 1983-04-11 Apparatus for loading magazines into furnaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08303596A GB2135115A (en) 1983-02-09 1983-02-09 Improvements in or relating to support systems

Publications (2)

Publication Number Publication Date
GB8303596D0 true GB8303596D0 (en) 1983-03-16
GB2135115A GB2135115A (en) 1984-08-22

Family

ID=10537726

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08303596A Withdrawn GB2135115A (en) 1982-04-29 1983-02-09 Improvements in or relating to support systems

Country Status (1)

Country Link
GB (1) GB2135115A (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1933128C3 (en) * 1969-06-30 1978-08-10 Siemens Ag, 1000 Berlin Und 8000 Muenchen Tube for diffusing dopants into semiconductor bodies
JPS5313341Y2 (en) * 1971-04-27 1978-04-11

Also Published As

Publication number Publication date
GB2135115A (en) 1984-08-22

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)