GB787076A - Improvements in or relating to gas plating - Google Patents

Improvements in or relating to gas plating

Info

Publication number
GB787076A
GB787076A GB3014854A GB3014854A GB787076A GB 787076 A GB787076 A GB 787076A GB 3014854 A GB3014854 A GB 3014854A GB 3014854 A GB3014854 A GB 3014854A GB 787076 A GB787076 A GB 787076A
Authority
GB
United Kingdom
Prior art keywords
carbonyl
temperature
compound
metal
chromium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3014854A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Engineering Company of Ohio
Original Assignee
Commonwealth Engineering Company of Ohio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Engineering Company of Ohio filed Critical Commonwealth Engineering Company of Ohio
Priority to GB3014854A priority Critical patent/GB787076A/en
Publication of GB787076A publication Critical patent/GB787076A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
    • C23C16/4483Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material using a porous body
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

787,076. Coating with metals. COMMONWEALTH ENGINEERING CO. OF OHIO. Oct. 20, 1954, No. 30148/54. Class 82(2) An object is coated with metal by heating a thermally decomposable metal-bearing compound to a temperature sufficient to produce vapours of the compound but insufficient to cause its decomposition, separately heating a carrier gas to a temperature above that required to vaporize the compound but below the decomposition temperature of the compound, flowing the heated carrier gas into contact with the heated compound to produce a mixture thereof, and heating the mixture to a temperature below the decomposition temperature of the compound immediately prior to introducing the mixture into a coating zone which contains the object at a temperature high enough to cause decomposition of the metal-bearing compound. Compounds which may be employed are molybdenum carbonyl, tungsten carbonyl, cobalt carbonyl, nickel carbonyl, iron pentacarbonyl, antimony hydride, tin hydride, chromyl chloride, copper nitroxyl and cobalt nitroxyl carbonyl. The carrier gas may be carbon dioxide, nitrogen, helium or argon. As shown in Fig. 1, carbon dioxide from a source 10 is passed into a carburettor 4 containing chromium carbonyl maintained at a constant temperature by a thermostatically controlled oil bath 2, the carbon dioxide being preheated to the same temperature by circulation through the coil 7. The carbon dioxide charged with chromium carbonyl vapour passes through heating jacket 11 and thence into heated chamber 24 the interior of which is thus coated with chromium. In two modifications (i) the carburetter 4 is not enclosed by the coil 7 but is separated from it by a short length of connecting pipe which is also immersed in the oil (Fig; 3, not shown), and (ii) the gas mixture emanat-i ing from heating jacket 11 is passed; through a second coil maintained in a con- stant temperature oil bath, the gas mixture issuing from this coil passing through a second heating jacket before entering the < coating chamber (Fig. 4, not shown). Methods of packing the carburettor are described in which (a) layers of chromium - carbonyl are supported on metal screens which may be separated by layers of glass wool (Figs. 2 and 6, not shown), and (b) glass beads are interspersed with fragments of chromium carbonyl - (Fig. 5, not shown). When the metal-bearing compound is liquid, a carburettor is employed having perforated horizontal screens spaced along its vertical axis.
GB3014854A 1954-10-20 1954-10-20 Improvements in or relating to gas plating Expired GB787076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3014854A GB787076A (en) 1954-10-20 1954-10-20 Improvements in or relating to gas plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3014854A GB787076A (en) 1954-10-20 1954-10-20 Improvements in or relating to gas plating

Publications (1)

Publication Number Publication Date
GB787076A true GB787076A (en) 1957-12-04

Family

ID=10303084

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3014854A Expired GB787076A (en) 1954-10-20 1954-10-20 Improvements in or relating to gas plating

Country Status (1)

Country Link
GB (1) GB787076A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2210583A1 (en) * 1972-12-15 1974-07-12 Ppg Industries Inc
EP0323145A1 (en) * 1987-12-24 1989-07-05 MITSUI TOATSU CHEMICALS, Inc. Equipment and method for supply of organic metal compound
US5160542A (en) * 1989-09-12 1992-11-03 Stec Inc. Apparatus for vaporizing and supplying organometal compounds
US10141209B2 (en) * 2014-02-28 2018-11-27 Tokyo Electron Limited Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage medium
CN112969814A (en) * 2018-11-14 2021-06-15 Dnf有限公司 Method for producing molybdenum-containing thin film and molybdenum-containing thin film produced by the method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2210583A1 (en) * 1972-12-15 1974-07-12 Ppg Industries Inc
EP0323145A1 (en) * 1987-12-24 1989-07-05 MITSUI TOATSU CHEMICALS, Inc. Equipment and method for supply of organic metal compound
US5019423A (en) * 1987-12-24 1991-05-28 Mitsui Toatsu Chemicals, Inc. Equipment and method for supply of organic metal compound
US5160542A (en) * 1989-09-12 1992-11-03 Stec Inc. Apparatus for vaporizing and supplying organometal compounds
US10141209B2 (en) * 2014-02-28 2018-11-27 Tokyo Electron Limited Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage medium
CN112969814A (en) * 2018-11-14 2021-06-15 Dnf有限公司 Method for producing molybdenum-containing thin film and molybdenum-containing thin film produced by the method

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