GB2624388A

GB2624388A - Vacuum chamber and vacuum system

Info

Publication number: GB2624388A
Application number: GB2217034.4A
Authority: GB
Inventors: David Chew Andrew; Lucchetta Emiliano; John Burch Nigel; David Jones Peter; Milner Paul; David Smith Paul
Original assignee: Edwards Ltd
Current assignee: Edwards Ltd
Priority date: 2022-11-15
Filing date: 2022-11-15
Publication date: 2024-05-22
Also published as: WO2024105355A1; GB202217034D0

Abstract

A vacuum chamber 10, particularly an ultra-high vacuum (UHV) or extreme-high vacuum (XHV) vacuum chamber, comprises a housing 12 and a tube 16 connected to the housing. The tube is preferably for connecting equipment such as vacuum pumps and/or gauges to the housing. A tube shell 18 of the tube intersects with a housing shell 14 of the housing. The opening between the tube and the housing may be larger or smaller than the cross-sectional area of the tube. A centre axis 32 of the tube may be non-intersecting with a centre axis 30 and/or centre point 33 of the housing. The tube may intersect radially with the housing. The tube shell may have an opening connected to an opening in the housing shell, and an intersecting interface 25 of the housing and tube may have an oval shape. The tube may be integrally connected, preferably materially bonded, more preferably welded, to the housing. A vacuum system, particularly a UHV or XHV vacuum system, comprises the vacuum chamber and a vacuum pump, particularly a non-evaporative getter (NEG) or an ion getter pump (IGP) or an NEG-IGP pump, arranged within the tube.

Description

VACUUM CHAMBER AND VACUUM SYSTEM

The present invention relates to a vacuum chamber and a vacuum system.

To connect equipment, such as vacuum pumps or gauges, to a vacuum chamber, particularly in ultrahigh vacuum (UHV) or extreme high (XHV) systems, generally the convention is to use tubular pipework and standard flanges.

The tubular pipework is typically arranged radially outwards from the main chamber. In this arrangement the connection interface between the equipment and the main chamber is limited and particularly corresponds to the cross-sectional area of the tubing. This limitation generally leads to a limited exchange, particularly gas exchange, between the equipment and the main chamber.

In addition, the tubing generally extending longitudinally from the main chamber results in a restriction on the arrangement of the equipment relative to the main chamber. Usually, a longitudinal arrangement of the equipment relative to the main chamber is defined. If the equipment is to be arranged differently, e.g. in a width direction, relative to the main chamber, additional tubing, e.g. T-pieces, are necessary. These additional elements and/or the general design in the prior art leads to an increased distance of the equipment to the main chamber.

Non-evaporable getter (NEG) pumps, ion getter (IGP) pumps and NEG-IGP combination (NEG-IGP) pumps are often connected to vacuum chambers, particularly UHV or XHV chambers. These NEG, IGP and NEG-IGP pumps generally comprise a radially arranged pump array. If these pumps cannot be inserted directly into the main chamber, for example due to lack of space, a tubing connection is required. In view of that, tubes are typically connected longitudinal to the chamber. If a radial gas exchange between the pump and the main chamber is desired a T-piece connection can be implemented to achieve a radial arrangement relative to the main chamber. -2 -

A disadvantage of the prior art arrangement is therefore a limited exchange, in particular gas exchange, between the equipment and the main chamber. Alternatively, or in addition, a complex tubing is required, particularly to implement a preferred relative arrangement. Alternatively, or in addition, a further disadvantage in the state of the art is an increased distance between the equipment and the main chamber.

Thus, it is an object of the present invention to provide a vacuum chamber and a vacuum system having an improved, particularly increased, exchange between connectable equipment and the main chamber.

The object is solved by a vacuum chamber according to claim 1 and a vacuum system according to claim 13.

The present vacuum chamber is particularly a UHV or XHV vacuum chamber. The vacuum chamber comprises a housing having a housing shell, and a tube having a tube shell, wherein the housing shell is connected to the tube shell. It is preferred that the tube is configured for connecting equipment, such as a vacuum pump, for example a non-evaporable getter (NEG) pump or an ion getter (IGP) pump or an NEG-IGP combination (NEG-IGP) pump, and/or a gauge to the housing. Preferably, the tube forms a secondary chamber for receiving equipment. The housing is configured to house at least one object, such as a quantum computer. Preferably, the housing forms a main or core chamber for receiving the at least one object. The main chamber preferably corresponds to a space which is enclosed by the housing. The tube shell is connected to the housing shell in such a way that the tube shell intersects with the housing shell. Preferably, a surface of the tube shell intersects with a surface of the housing shell. The secondary chamber preferably corresponds to a space which is enclosed by the tube. The main chamber preferably overlaps with the secondary chamber such that an overlapping space is formed. This overlapping space is -3 -preferably arranged within the main chamber and the secondary chamber. It is preferred that a central section, particularly only the central section, of the tube shell intersects with the housing shell, preferably a central section, particularly only the central section, of the housing. It is thus preferred that a base of the tube, particularly all bases of the tube, are non-intersecting with the housing shell. In accordance with the present invention, a base of the tube preferably corresponds to an end of the tube. It is preferred that the tube is configured for receiving a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump and/or a gauge. Preferably, the tube is connected to the housing in such a way that a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump or a gauge received within the tube is arranged inside the housing, particularly reaches into the housing. An advantage of the intersecting connection is that the shape and/or size of the interface between the tube and the main chamber, which is the opening through which gas passes, can be altered. Furthermore, the distance and/or the orientation of equipment relative to the main chamber can be altered. Preferably, for example if a vacuum pump is arranged in this tube connected to the main chamber, the transmission probability molecular conductance and/or net pumping speed can be increased, whereby particularly the pumping capacity is improved. The intersection between the tube and the housing defines an interface. This interface between the tube and the housing preferably corresponds to an intersection surface between the tube and the housing and/or to a cross-sectional area of the intersection between the tube and the housing and/or to a two-dimensional projection of the intersection between the tube and the housing. More preferably, the interface corresponds to an opening and/or aperture, particularly a gas exchange opening and/or gas exchange aperture between the tube and the housing. Particularly in connection with the present invention, a cross-sectional area, for example the cross-sectional area of the tube, of the housing and/or of the interface corresponds to the gas flow area, i. e. the area which allows or restricts gas flow.

It is preferred that the interface preferably the opening, more preferably the -4 -gas exchange opening, between the tube and the housing, is larger or smaller than the cross-sectional area of the tube. Said cross-sectional area of the tube is preferably parallel to a base of the tube and/or has the same area as the base of the tube. Preferably, said cross-sectional area of the tube corresponds to the base of the tube. Said cross-sectional area of the tube particularly corresponds to a first cross-sectional area of the tube. Said cross-sectional area of the tube is particularly arranged at a flange of the tube.

Preferably, an axis of the tube is non-intersecting with an axis of the housing and/or center point of the housing. Said axis of the tube is a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis of the tube. Furthermore, said axis of the housing is a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis of the housing. Alternatively, or additionally, said axis of the tube is non-orthogonal and/or skew with said axis of the housing. Preferably, the tube is arranged skew to the housing. Preferably, said axis of the tube and said axis of the housing are orthogonal. It is preferred that a, preferably parallel, projection of said axis of the tube intersecting with said axis of the housing is orthogonal to said axis of the housing. Particularly, said axis of the tube is parallel to a tangent of a tubular or round shape of the housing closest to said axis of the tube. Preferably, the tube is arranged radially to the housing. It is preferred that said axis of the housing is orthogonal to a radial axis and/or a transverse axis and/or sagittal axis of the tube. Preferably, a radial axis and/or a transverse axis and/or sagittal axis of the housing is parallel and/or identical to a radial axis and/or a transverse axis and/or sagittal axis of the tube. It is preferred that a tangent of a tubular or round shape of the tube and a tangent of a tubular or round shape of the housing are orthogonal.

Preferably, the tube intersects radially with the housing. In view of that it is thus preferably implemented that the tube radially overlaps with the housing. -5 -

Preferably, the tube intersects the housing, particularly radially, in a width direction of the tube by at least 5% of the width of the tube, preferably by at least 100/0, more preferably by at least 200/a. It is preferably also possible that the tube intersects the housing, particularly radially, in a width direction by at least 30% of the width of the tube or by at least 50%. In view of that it is thus preferably implemented that the tube overlaps radially with the housing by the corresponding percentage.

Preferably, the housing has a hollow cylindrical shape having a circular shell and a circular cross-sectional area. Said cylindrical housing has a cylinder shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this cylindrical shaped housing thus corresponds to said cylinder shell surface. Alternatively, the housing has an ellipsoid shape with an ellipsoid shell and an ellipsoid cross-sectional area. Said ellipsoid housing has an ellipsoid shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this ellipsoid shaped housing thus corresponds to said ellipsoid shell surface. Alternatively, the housing has a spherical shape with a spherical shell and a spherical cross-sectional area. Said spherical housing has a spherical shell surface, particularly only a spherical shell surface. The shell of this spherical shaped housing thus corresponds to said spherical shell surface. Alternatively, the housing has a cuboid shape having a rectangular shell and a rectangular cross-sectional area. Said cuboid housing has a cuboid shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this cuboid shaped housing thus corresponds to said cuboid shell surface.

Preferably, the tube has a prism shape having a polygon shaped cross-sectional area. Particularly, the tube has a cylindrical shape having a circular shell and a circular cross-sectional area. Said cylindrical tube has a cylinder shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this cylindrical shaped tube thus corresponds to said cylinder shell surface. Alternatively, the tube has an ellipsoid shape with an ellipsoid shell and an -6 -ellipsoid cross-sectional area. Said ellipsoid tube has an ellipsoid shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this ellipsoid shaped tube thus corresponds to said ellipsoid shell surface. Alternatively, the tube has a spherical shape with a spherical shell and a spherical cross-sectional area. Said spherical tube has a spherical shell surface, particularly only a spherical shell surface. The shell of this spherical shaped tube thus corresponds to said spherical shell surface. Alternatively, the tube has a cuboid shape having a rectangular shell and a rectangular cross-sectional area. Said cuboid tube has a cuboid shell surface and two base surfaces, whereby the base surfaces are preferably open. The shell of this cuboid shaped tube thus corresponds to said cuboid shell surface.

Preferably, the tube shell has an opening connected, particularly continuously, to an opening in the housing shell. The opening of the tube shell is preferably arranged in a central section of the tube shell, particularly only in the central section of the tube shell.

Preferably, the interface of the housing and the tube, has an oval shape. Particularly, this oval shape is implemented with the cylindrical tube and the cylindrical or spherical housing.

Preferably, a base, particularly all bases, of the tube is/are exposed and/or non-intersecting with the housing.

Preferably, a first base and/or a second base of the tube has a connection device. The connection device particularly comprises a flange. It is preferred that the connection device is configured for connecting a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump, a gauge and/or a closure particularly a lid, to the tube. Particularly, the connection device is configured for inserting a vacuum pump, such as a NEG pump or an IGP or an NEG-IGP pump, and/or a gauge into the tube. -7 -

Preferably, a first base and/or a second base of the tube is non-intersecting with the housing.

Preferably, the tube comprises a vacuum pump, particularly a NEG pump or an IGP or an NEG-IGP pump. Said vacuum pump is particularly arranged inside the housing, preferably reaches into the housing. It is preferred that the pump is arranged such that a pump array of the vacuum pump, particularly an NEG array or an IGP array or an NEG-IGP array, is, at least partly, arranged within the housing, preferably within the main chamber.

Preferably, the housing comprises at least one flange connector connected, particularly directly connected, to the shell and/or a base of the housing. The flange connector preferably has a tubular shape with a flange at a first end and a connection interface at a second end, whereby the connection interface is, particularly integrally, connected to the housing. The interface between the flange connector and the housing has preferably the same size as the cross-sectional area of the flange connector. Preferably, an axis of the flange connector is intersecting with an axis of the housing and/or center point of the housing. Said axis of the flange connector is a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis of the flange connector. Furthermore, said axis of the housing is a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis of the housing. Alternatively, or additionally, said axis of the flange connector is orthogonal to said axis of the housing. The flange connector is preferably arranged orthogonally to the housing. The flange connector preferably has a cylindrical shape. Alternatively, the flange connector has a tapering, particularly conical or pyramidical, shape. The diameter and/or the cross section of the conical or pyramidical shape preferably increases or decreases originating from the connection to the housing, outwardly. -8 -

Preferably the tube is integrally connected, particularly materially bonded, particularly preferably welded, to the housing.

Preferably, instead of the intersecting connection of the tube shell and the housing shell, the tube can be connected to the housing with its base, preferably longitudinal, whereby the tube has a tapering shape. In view of this, it is particularly possible that the tube has a conical or pyramidical shape. The diameter and/or the cross section of the conical or pyramidical shape tube preferably increases or decreases originating from the connection to the housing, preferably from a base of the tube connected to the housing, outwardly. Preferably, the conical or pyramidical shape of the tube advantageously allows for an altered, particularly increased or decreased, gas flow between the vacuum chamber and the tube. Preferably, if the tube has a conical or pyramidical shape, a base of the tube is connected to the housing and/or another base of the tube has a flange. In view of the definition of this paragraph, an independent invention of the present disclosure is a vacuum chamber, particularly UHV or XHV vacuum chamber, comprising a housing and a tube connected to the housing, wherein the tube has a tapering, preferably conical or pyramidical, shape. Preferably, a vacuum pump, particularly a NEC or an IGP or an NEG-IGP pump, is arranged within the tapering tube. Preferably, a quantum computer is arranged within the housing. Preferably, the tapering tube is integrally connected, preferably materially bonded, more preferably welded, to the housing The vacuum system of the present invention preferably is a UHV or XHV vacuum system. The vacuum system comprises a vacuum chamber having one or more features of the vacuum chamber of the present invention. Furthermore, the vacuum system comprises a vacuum pump, particularly a NEC pump or an IGP or an NEG-IGP pump connected to the tube of the vacuum chamber. Preferably the vacuum pump is arranged within the tube. The vacuum pump is particularly arranged such that it is arranged partly within the housing, preferably reaches into the housing. -9 -

Preferably, the vacuum system further comprises at least one flange connector connected to the housing. Preferably a turbomolecular pump and/or a gauge, preferably an ion gauge, and/or a window and/or an objective lens and/or a helium connection is, preferably each, connected to one of the at least one flange connector.

Preferably, a quantum computer, particularly a trapped ion quantum computer, is arranged inside the housing, particularly inside the main chamber.

In the following the present invention is described in more detail with reference to the accompanying drawings.

The figures show: Figure 1 a schematical, perspective view of an embodiment of a vacuum chamber in accordance with the present invention, and Figure 2 a sectional view along II in figure 1.

Similar or identical elements are identified in the figures with the same reference signs. For improved clarity, in particular elements that have already been identified are generally not given reference signs in all figures.

Figure 1 shows a vacuum chamber 10 comprising a, preferably cylindrical, housing 12. The housing 12 forms a main chamber 20 or core chamber within a housing shell 14, for example to accommodate a (not shown) object such as a quantum computer. A first base 11 and a second base 13 of the housing 12 are preferably closed, whereby the closure is particularly integrally formed with the housing shell 14. On the other hand, the first base 11 and/or second base 13 can preferably comprise a flange.

-10 -A flange connector 26 having a flange 29 on one side is connected to the housing shell 14 on the other side via a tubing 28 having a tubing shell 27. Particularly, a first base 36 of the preferably cylindrical tubing 28 comprises the flange 29 and in an area of a second base 38 of the tubing 28, the tubing 28 is connected, particularly integrally, with the housing shell 14.

An axis 34 of the tubing 28, particularly of the flange connector 26, is arranged orthogonally to an axis 30 of the housing. Furthermore, the axis 34 intersects the axis 30. The axis 34 preferably corresponds to a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis 34 of the tubing 28, particularly of the flange connector 26. The axis 30 preferably corresponds to a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis of the housing 12. Preferably, the axis 34 intersects a center point 33 of the housing 12.

This flange connector 26 particularly corresponds to a standard connection device for connecting equipment to a vacuum chamber 12, which is particularly used in the state of the art.

Furthermore, a preferably cylindrical tube 16 is connected to the housing 12. This connection is achieved by a connection between the tube shell 18 and the housing shell 14. Thereby, the tube shell 18 intersects with the housing shell 14. Particularly a central section, preferably only a central section of the tube shell 18 is connected to the housing shell 14. It is thus preferred that a first base 40 and a second base 42 of the tube 16 is not connected and/or intersecting with the housing shell 14. A secondary chamber 21 of the tube 16 overlaps with the main chamber 20 of the housing 12.

An axis 32 of the tube 16 is arranged skew to the axis 34. Preferably, axis 32 is non-intersecting with axis 30 and/or center point 33. Axis 32 preferably corresponds to a center axis and/or a longitudinal axis and/or a symmetrical, preferably rotationally symmetrical, axis 32 of the tube 16.

The connection between the housing shell 14 and the tube shell 18 is preferably integrally. It is preferred that the housing shell 14 and the tube shell 18 is connected by welding, particularly forming a welding seam 24 between the housing shell 14 and the tube shell 18. On the other hand, it is preferably possible to manufacture the housing 12 and the tube 16 integrally via molding and/or 3d-printing.

The flange connector 26 and/or the tube 16 are preferably adapted to attach equipment such as a gauge and/or a vacuum pump, particularly a NEG pump or an IGP or an NEG-IGP pump, to the main chamber 20. Preferably, flange connector 26 and/or the tube 16 is adapted to insert the equipment into the flange connector 26 and/or the tube 16. In particular, the connection between the tube 16 and the housing 12 is adapted in such a way that a pump, particularly a NEG pump or an IGP or an NEG-IGP pump, inserted into the tube 16, preferably exclusively, extends radially into the main chamber 20, in particular in such a way that the pump array is arranged frontal to the main chamber 20.

As shown in figure 1, the tube 16 is closed off at the second base 42. However, alternatively an open design is preferably possible, for example whereby the second base 42 comprises a flange, particularly similar to flange 22, at the first base 40.

Based on the embodiment of figure 1, it is preferably possible to implement a preferred embodiment of a vacuum system according to the invention by placing a pump, particularly a NEG pump or an IGP or an NEG-IGP pump, inside the tube 16, and preferably a quantum computer inside the housing 12.

-12 -The flange connector 26 as shown figure 1 has a cylindrical shape. Alternatively, it is preferably possible that the flange connector has a tapering, particularly conical or pyramidical, shape. Preferably this tapering shape increases in the direction of the housing 12.

Figure 2 shows a sectional view along II in figure 1. Thus, a section through the tube 16 is shown from the right, so that the interface 25 between the tube 16 and the housing 12 as well as (partly) the interface 39 between the flange connector 26 and the housing 12 can be seen.

In the shown embodiment, the tube 16 and the flange connector 26 have the same inner diameter.

As shown, the interface 25, particularly the intersection area, between the tube 16 and the housing 12 is oval and has a larger area than the round interface 39 between the flange connector 26 and the housing 12. Thus, particularly a higher gas exchange between the tube 16 and the housing 12 is possible compared to the gas exchange between the flange connector 26 and the housing 12. Furthermore, the intersecting interface 25 between the tube 16 and the housing 12 is preferably larger than the cross-sectional area of the tube 16.

Claims

-13 -CLAIMS1. Vacuum chamber (10), particularly UHV or XHV vacuum chamber, comprising: a housing (12), and a tube (16) connected to the housing (12), the tube (16) preferably being configured for connecting equipment, particularly vacuum pumps and/or gauges, to the housing (12), wherein a tube shell (18) of the tube (16) intersects with a housing shell (14) of the housing (12).
2. Vacuum chamber (10) according to claim 1, wherein the intersecting interface (25), preferably the opening, between the tube (16) and the housing (12) is larger or smaller than the cross-sectional area of the tube (16).
3. Vacuum chamber (10) according to claim 1 or 2, wherein a center axis (32) of the tube (16) is non-intersecting with a center axis (30) and/or center point (33) of the housing (12).
4. Vacuum chamber (10) according to any one of claims 1-3, wherein the tube (16) intersects radially with the housing (12).
5. Vacuum chamber (10) according to any one of claims 1-4, wherein the tube (16) intersects the housing (12) in a width direction by at least 5% of the tube width, preferably by at least 10%, more preferably by at least 20%.
6. Vacuum chamber (10) according to any one of claims 1-5, wherein the tube (16) has one of the following shapes: - a cylindrical shape having a circular shell, or - an ellipsoid shape with an ellipsoid shell, or -14 - - a spherical shape with a spherical shell, or - a cuboid shape having a rectangular shell.
7. Vacuum chamber (10) according to any one of claims 1-6, wherein the tube shell (18) has an opening connected to an opening in the housing shell (14).
8. Vacuum chamber (10) according to any one of claims 1-7, wherein the intersecting interface (25) of the housing (12) and the tube (16) has an oval shape.
9. Vacuum chamber (10) according to any one of claims 1-8, wherein a base (40, 42), particularly all bases (40, 42), of the tube (16) is/are exposed and/or non-intersecting with the housing (12).
10. Vacuum chamber (10) according to any one of claims 1-9, wherein a first base (40) and/or a second base (42) of the tube (16) has a connection device, particularly a flange (22), for example for connecting a vacuum pump or a gauge or a closure.
11. Vacuum chamber (10) according to any one of claims 1-10, wherein the tube (16) is integrally connected, preferably materially bonded, more preferably welded, to the housing (12).
12. Vacuum system, particularly UHV or XHV vacuum system comprising: - a vacuum chamber (10) as defined in any one of claims 1-11, and - a vacuum pump, particularly a NEG or an IGP or an NEG-IGP pump, arranged within the tube (16).
13. Vacuum system according to claim 12, further comprising a quantum computer, preferably a trapped ion quantum computer, arranged within the housing (12).
-15 - 14. Vacuum system according to claim 12 or 13, further comprising a flange connector (26) connected to the housing (12).
15. Vacuum system according to claim 14, wherein the flange connector (26) has a tapering, preferably conical or pyramidical, shape.