GB2614811B - Aluminum-based porous alumina film humidity-sensitive sensor and manufacturing method thereof - Google Patents

Aluminum-based porous alumina film humidity-sensitive sensor and manufacturing method thereof Download PDF

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Publication number
GB2614811B
GB2614811B GB2218068.1A GB202218068A GB2614811B GB 2614811 B GB2614811 B GB 2614811B GB 202218068 A GB202218068 A GB 202218068A GB 2614811 B GB2614811 B GB 2614811B
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United Kingdom
Prior art keywords
aluminum
manufacturing
sensitive sensor
porous alumina
based porous
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GB2218068.1A
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GB202218068D0 (en
GB2614811A (en
Inventor
Yang Chengtao
Xu Kangcai
Sun Shangyi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yangtze River Delta Research Institute of UESTC Huzhou
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Yangtze River Delta Research Institute of UESTC Huzhou
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Publication of GB2614811A publication Critical patent/GB2614811A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
GB2218068.1A 2021-12-03 2022-12-01 Aluminum-based porous alumina film humidity-sensitive sensor and manufacturing method thereof Active GB2614811B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111474405.5A CN114280108A (en) 2021-12-03 2021-12-03 Aluminum-based porous alumina film humidity-sensitive sensor and preparation method thereof

Publications (3)

Publication Number Publication Date
GB202218068D0 GB202218068D0 (en) 2023-01-18
GB2614811A GB2614811A (en) 2023-07-19
GB2614811B true GB2614811B (en) 2024-01-31

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GB2218068.1A Active GB2614811B (en) 2021-12-03 2022-12-01 Aluminum-based porous alumina film humidity-sensitive sensor and manufacturing method thereof

Country Status (2)

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CN (1) CN114280108A (en)
GB (1) GB2614811B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114280108A (en) * 2021-12-03 2022-04-05 电子科技大学长三角研究院(湖州) Aluminum-based porous alumina film humidity-sensitive sensor and preparation method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB527686A (en) * 1938-04-21 1940-10-14 British Thomson Houston Co Ltd Improvements in and relating to hygrometers
JPS58148948A (en) * 1982-03-02 1983-09-05 Sharp Corp Humidity sensing resistance element and its production
JPH01121745A (en) * 1987-11-05 1989-05-15 Nok Corp Thin film moisture sensitive element
EP1197748A1 (en) * 2000-10-10 2002-04-17 NGK Spark Plug Company Limited Humidity sensor
US20130233073A1 (en) * 2012-03-09 2013-09-12 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates
CN114280108A (en) * 2021-12-03 2022-04-05 电子科技大学长三角研究院(湖州) Aluminum-based porous alumina film humidity-sensitive sensor and preparation method thereof
CN115753910A (en) * 2022-12-07 2023-03-07 电子科技大学 Alumina film humidity-sensitive sensor with long-term stability and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103698358B (en) * 2012-09-27 2015-11-18 中国科学院金属研究所 A kind of preparation method of porous ceramics alumina type humidity sensor
CN203250790U (en) * 2013-03-28 2013-10-23 吉林省朗星光电科技股份有限公司 Light emitting diode equipped with binding posts
JP7212565B2 (en) * 2018-03-29 2023-01-25 住友化学株式会社 Moisture sensitive film and sensor using it
CN108398466A (en) * 2018-06-05 2018-08-14 广州九思科技有限公司 A kind of thin-film capacitor humidity sensor and preparation method thereof
CN111879838A (en) * 2020-08-21 2020-11-03 电子科技大学 Flexible paper-based voltage type humidity sensor and preparation method thereof
CN112179530B (en) * 2020-09-14 2021-09-28 电子科技大学 Flexible pressure sensor based on double-sided microstructure electrode and paper and preparation method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB527686A (en) * 1938-04-21 1940-10-14 British Thomson Houston Co Ltd Improvements in and relating to hygrometers
JPS58148948A (en) * 1982-03-02 1983-09-05 Sharp Corp Humidity sensing resistance element and its production
JPH01121745A (en) * 1987-11-05 1989-05-15 Nok Corp Thin film moisture sensitive element
EP1197748A1 (en) * 2000-10-10 2002-04-17 NGK Spark Plug Company Limited Humidity sensor
US20130233073A1 (en) * 2012-03-09 2013-09-12 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates
CN114280108A (en) * 2021-12-03 2022-04-05 电子科技大学长三角研究院(湖州) Aluminum-based porous alumina film humidity-sensitive sensor and preparation method thereof
CN115753910A (en) * 2022-12-07 2023-03-07 电子科技大学 Alumina film humidity-sensitive sensor with long-term stability and preparation method thereof

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GB202218068D0 (en) 2023-01-18
CN114280108A (en) 2022-04-05
GB2614811A (en) 2023-07-19

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