GB2607605A

GB2607605A - Apparatus and vacuum system

Info

Publication number: GB2607605A
Application number: GB2108154.2A
Authority: GB
Inventors: Christian Kalisch Dirk
Original assignee: Leybold GmbH
Current assignee: Leybold GmbH
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2022-12-14
Anticipated expiration: 2041-06-08
Also published as: WO2022258410A1; GB2607605B; GB202108154D0

Abstract

Apparatus for connecting a vacuum pump 12, such as a turbo-molecular pump, to a vacuum apparatus. The apparatus comprises a connection element 14 for connection to the vacuum pump, and a fastening element 16 for connection to the vacuum apparatus. A transmission element 18A, 18B transfers a transverse insertion motion of the transmission element into an axial motion of the connection element to provide a vacuum-tight connection between the vacuum pump and the vacuum apparatus. The apparatus may include one or more rail 30A, 30B and corresponding guiding element 28A, 28B provided on the connection element and transmission element. The rails and guiding elements may be provided at different heights, and the rails may include angled sections 32A, 32B which may be straight, curved or S-shaped. The fastening element may comprise a recess for accommodation of the transmission element. The apparatus may form part of a vacuum system which further comprises a vacuum pump and vacuum apparatus connected by the apparatus.

Description

Apparatus and vacuum system The present invention relates to an apparatus for connecting a vacuum pump, in particular a turbomolecular vacuum pump, to a vacuum apparatus and further relating to a vacuum system comprising a vacuum pump and such an apparatus.

Commonly vacuum pumps comprise a flange along the axial direction of the vacuum pump. Therein the vacuum pump is connected to a vacuum apparatus in an axial direction via the flange. Usually a number of bolts are used in order to establish a vacuum-tight connection between the vacuum pump and the vacuum apparatus. Further, by the connection a reliable transfer of a rotor crash momentum of the vacuum pump to the vacuum apparatus should be enabled in the case of a rotor crash or any other catastrophic rotor failure. Therein, in particular for fast rotating turbomolecular vacuum pumps, high forces and momentum can occur. Then the momentum of the rotor of the vacuum pump needs to be transferred and absorbed by the vacuum apparatus without creating a risk for personnel around or other equipment nearby.

Sometimes, due to space constrains, it is not possible to attach the vacuum pump in an axial direction to the vacuum apparatus since it is not possible to reach to all bolts in order to secure the flange of the vacuum pump to the vacuum apparatus. A similar situation might occur with multi-inlet vacuum pumps (split-flow vacuum pumps) having two or more inlets oriented in the same direction, wherein the direction of the inlets define the axial direction along which the multi-inlet vacuum pump is usually mounted.

Thus, it is an object of the present invention to provide an apparatus for connecting a vacuum pump to a vacuum apparatus.

The problem of the prior art is solved by an apparatus according to claim 1 as well as a vacuum system according to claim 13. -2 -

The apparatus according to the present invention for connecting a vacuum pump, in particular a turbomolecular vacuum pump, to a vacuum apparatus comprises a connection element configured to be connectable to a vacuum pump. Thus, the connection element might be connected to the vacuum pump via the flange of the vacuum pump in a known manner. Alternatively, the vacuum pump might be connected to the connection element in any other manner, for example by welding or being integrally formed. Further, the apparatus comprises a fastening element configured to be connectable to a vacuum apparatus. Connection between the vacuum apparatus and the fastening element can be provided in any kind such as by bolts, welding or the fastening element and vacuum apparatus can be built as integral parts, i. e. as one piece.

Further, according to the present invention, the apparatus comprises a transmission element configured to transfer an insertion motion of the transmission element in a transversal insertion direction into an axial motion of the connection element relative to the fastening element to provide a vacuum-tight connection between the connection element and the fastening element and consequently between the vacuum pump and the vacuum apparatus. Therein, the transmission element might be built as an additional element being separate to the connection element and the fastening element and can be moved independent of the connection element and/or the fastening element. The axial direction in this regard relates to the axial direction of the vacuum pump or the direction of the flange of the vacuum pump. If the vacuum pump is built as a multi-inlet vacuum pump, having more than one inlet oriented in the same direction, the axial direction coincides with the orientation of the inlets, being the same as the direction common mutli-inlet vacuum pumps would be mounted. Correspondingly, the transversal insertion direction of the insertion motion relates to a direction perpendicular to the axial direction or perpendicular to the axial motion created by the transmission element. Thus, by the insertion motion of the transmission element in the transversal insertion direction, the connection element is moved in an axial direction relative and towards to the fastening element -3 -creating a vacuum-tight connection between the connection element and the fastening element and consequently creating a vacuum-tight connection between the vacuum pump and the fastening element, i.e. the vacuum apparatus. Thus, the flange of the vacuum pump can be preassernbled to the connection element and then connected to the fastening element being connectable to the vacuum apparatus, by means of the transmission element. Thus, even if an axial connection between the vacuum pump and the vacuum apparatus is not directly feasible, the vacuum pump can be connected to the vacuum apparatus by means of the apparatus of the present invention.

Preferably, the connection element is connected to the fastening element by insertion of the connection element in the transversal insertion direction. In particular, the connection element and the transmission element may be inserted by movement in the same direction. Therein, preferably the connection element is connected to the fastening element prior to insertion of the transmission element.

Preferably, upon insertion of the transmission element the transversal position of the connection element relative to the fastening element is substantially fixed and only movement along the axial direction is facilitated by insertion of the transmission element.

Preferably, the device comprises a guiding structure having at least one rail, preferably in the form of a groove, and at least one guiding element, preferably in the form of a protrusion, engaging the rail to guide movement of the transmission element relative to the connection element. Thus, by way of the guiding structure, relative movement between the transmission element and the connection element is provided thereby providing axial movement of the connection element relative to the fastening element in order to establish a vacuum-tight connection between the vacuum pump and the vacuum apparatus. In particular, -4 -the rail may extend in the transversal insertion direction to enable insertion of the transmission element.

Preferably, the connection element comprises at least one rail and the transmission element comprises at least one guiding element engaging the rail. Alternatively or additionally, the transmission element comprises at least one rail and the connection element comprises at least one guiding element engaging the rail. Thus, the transmission element comprises only rails and the connection element comprises only guiding elements. Alternatively, the transmission element comprises only guiding element and the connection element comprises only rails. Alternatively, guiding elements and rails can be combined such that the connection element comprises at least one rail and at least one guiding element wherein the transmission element comprises at least one rail and one guiding element, correspondingly.

Preferably, more than one rail and more than one guiding element are present in order to guide movement of the transmission element relative to the connection element. For example, the rails are arranged in parallel to each other. Therein, the number of rails may be equal to the number of guiding elements such that each guiding element is guided in one rail.

Preferably, the more than one rails and more than one guiding elements are each arranged at different heights, i. e. in an axial direction distant from each other. In this case, it can be assured that each guiding element is guided in one rail arranged along an axial direction at different heights, either at the transmission element or the connection element.

Preferably, at least one rail and at least one guiding element engaging the rail are arranged at two opposing sides of the connection element. Thus, at each side of the connection element at least one rail and guiding element pair are -5 -arranged in order to enable movement of the connection element in an axial direction in an even manner.

Preferably, the connection element has a substantially squared shape.

Preferably, the connection element comprises an opening configured to fluidly connect the inlet of the vacuum pump with the interior of the vacuum apparatus. A gaseous medium is conveyed from the vacuum apparatus through the opening of the connection element towards the vacuum pump.

Preferably, the transmission element comprises two transmission parts preferably arranged at two opposing sides of the connection element interacting with the respective guiding elements/rails.

Preferably, the rail comprises an angled section which is preferably arranged at the end of each rail. Therein, the rail is angled towards the vacuum apparatus in the axial direction if the rail is arranged at the transmission element. Alternatively, the angled section is angled away from the vacuum apparatus in the opposite direction, if the rail is arranged at the connection element. Thus, by the angled section of the rail axial movement of the connection element relative to the fastening element and the transmission element is enabled. Thus, by insertion of the transmission element into the apparatus in the transversal insertion direction, by the angled sections of the rail, an axial movement of the connection element is created.

Preferably, the transmission element is not movable in an axial direction relative to the fastening element. In particular an axial end of the transmission element towards the vacuum apparatus may abut an opposing surface of the fastening element in order to be able to transfer axial forces to the connection element and create relative movement between the fastening element and the connection element. Similarly, an axial surface of the transmission element facing away -6 -from the vacuum apparatus may abut a surface of the fastening element to constrain movement of the transmission element in the axial direction.

Preferably, the angled section has an angle between 10 to 100 or -1° to -10° relative to the transversal insertion direction. For example, the angle is measured in a plane spanned between the transversal insertion direction of the insertion motion and the axial direction.

Preferably, the length of the angled section is between 10mm to 40mm and more preferably between 10mm and 20mm.

Preferably, the lengths of the axial motion created by the guiding structure is between 2mm and 5mm and preferably between 2mm and 3mm.

Preferably, the angled section is straight or curved. In particular, the angled section may have an S-shaped curvature, wherein the end of the S-shaped section may be substantially parallel to the insertion direction and/or parallel to another part of the rail not relating to the angled section.

Preferably, the angled section of more than one rail are identically shaped and angled.

Preferably, the fastening element comprises a recess for accommodation of the transmission element. Therein, the recess might comprise a limitation in the axial direction for movement of the transmission element in order to be able to transfer an axial force from the fastening element to the connection element via the transmission element. Thus, by the recess of the fastening element abutment surfaces are provided to constrain axial movement of the transmission element. -7 -

Preferably, the apparatus comprises a fixing element configured to apply a transversal force to the transmission element in the transversal insertion direction. For example, by the fixing element the transmission element is fixed in the position thereby providing a vacuum-tight and crash safe connection between the vacuum pump and the vacuum apparatus. Therein, the fixing element might be an additional part fixed to the fastening element by a bolt for example. Alternatively, the fixing element is provided by a bolt extending through the transmission element fixing the transmission element in the inserted position.

In another aspect the present invention relates to a vacuum system comprising a vacuum pump, in particular a turbomolecular pump, and an apparatus as described above. Therein, the vacuum pump is connected to the connection element and a vacuum apparatus is connected to the fastening element.

Preferably, the vacuum pump comprises a flange and the vacuum pump is connected to the connection element via the flange. Therein, bolts can be used in a known manner in order to attach the flange of the vacuum pump to the connection element before inserting the connection element into the fastening element. Alternatively, the vacuum pump can be connected to the connection element in any other manner, for example by welding, clamping or the like. Alternatively, the vacuum pump and the connection element are integrally formed as one piece.

Preferably, the fastening element is integrally formed with the vacuum apparatus.

Preferably, the vacuum pump is a multi-inlet pump comprising at least two inlets arranged and open in the same direction. Therein, the direction of the inlets is the axial direction. Furthermore, the connection element might be connected with more than one flange and, in particular, with each flange of the multi-inlet vacuum pump. -8 -

The present invention is descried in more detail with reference to the accompanied drawings.

The figures show: Figure 1 an exploded view of the apparatus according to the present in-vention, Figure 2 an assembled view of the apparatus according to figure 1, Figure 3A a detailed view of the transmission element, Figure 3B a detailed view of the connection element, Figure 4 a flow diagram for connecting the vacuum pump to the vacuum apparatus by the apparatus according to the present invention and Figure 5 a detailed view of the apparatus according to the present inven-tion.

The apparatus 10 comprises a connection element 14 which is connectable to a vacuum pump 12 via a flange 20. The vacuum pump 12 is exemplified as turbomolecular vacuum pump. However, the present invention is not limited to the type of vacuum pumps. Thus, in order to connect the vacuum pump 12 to a vacuum apparatus, the vacuum pump 12 is connected to the connection element 14 via bolts for example in a known manner.

Further, the apparatus 10 comprises a fastening element 16 which is connected to the vacuum apparatus (not shown). The vacuum apparatus might be a vessel, -9 -recipient, vacuum chamber or the like. Therein, the fastening element 16 might be connected in any known manner to the vacuum apparatus for example by bolts, welding or might be integrally formed as being one piece of the vacuum apparatus. The fastening element 16 comprises a recess 22 in order to accommodate the connection element 14. Therein, the connection element 14 can be inserted into the recess 22 of the fastening element 16 by an insertion motion in a transversal insertion direction being the x-direction in the Figures.

The transversal insertion direction of the insertion motion is perpendicular to the axial direction which is along the z-axis in the Figures. For insertion of the connection element 14 into the recess 22 of the fastening element 16, the connection element 14 might comprise a support edge 27 resting on a protrusion 23 of the fastening element 16. On the protrusion 23 the connection element 14 is slid along the x-direction to an end position of the connection element 14 relative to the fastening element 16 in which a fixed transversal position relative to each other is provided.

In the example of Figure 1 the connection element 14 comprises guiding elements 28A, 283 on both sides of the mainly rectangular connection element 14. After insertion of the connection element 14 into the recess 22 of the fastening element 16, transmission elements 18A and 183 are inserted also in the recess 22 of the fastening element 16 on both sides of the connection element 14, respectively. Therein, the transmission elements 18A and 183 are depicted as separate parts but can also be built, or formed, as one part in order to provide conformity of the transversal movement of the transmission elements 18A and 183. The transmission elements 18A and 183 comprise rails 30 extending substantially in parallel to the transversal insertion direction of the insertion motion. Thereby, the guiding elements 28 of the connection element 14 are engaging the rails 30 of the transmission elements 18A, 185 and guiding transversal movement of the transmission elements 18A, 185. Therein, by the motion of the transmission elements 18A, 183 in the transversal insertion direction, an -10 -axial motion of the connection element 14 relative to the fastening element 16 is created in order to provide a vacuum-tight connection between the vacuum pump 12 and the vacuum apparatus.

The connection element 14 comprises a substantially rectangular shape. By the rectangular shape sufficient contact surfaces with the transmission elements 18A and 18B as well as with an abutment face 21 of the fastening element 16 is provided, limiting transversal movement of the connection element 14. Thus, a reliable connection of the vacuum pump 12 to the vacuum apparatus is provided also in the case of a rotor crash of the vacuum pump or any other catastrophic rotor failure. Thus, sufficient high forces and momentum can be transferred ensuring safety of any personnel and another equipment.

Although Figure 1 shows the guiding elements 28 being attached to the connection element 14 and the rails 30 being disposed on the transmission elements 18A, 18B, the situation can be reversed such that the transmission elements 18A, 18B provide guiding elements while the connection element 14 comprises corresponding rails. Further, Figure 1 shows the guiding elements 28 as protrusions and the rails 30 as grooves. However, other forms are possible as long as providing an interconnection and creating guidance of movement of the connection element 14 towards the fastening element 16 in the axial direction.

Figure 2 shows the apparatus in assembled form. Therein, by insertion of transmission element 18A, 18B axial movement of the connection element 14, being connected to the vacuum pump 12, towards the fastening element 16 is provided. Preferably, a seal such as an 0-ring or the like might be disposed on the axial face of the connection element being pressed against the fastening element 16 by the axial movement. Thereby, the axial distance between the connection element 14 and the fastening element 16 is reduced creating an axial distance between the support edge 27 of the connection element 14 and the protrusion 23 of the fastening element 16.

Figure 3A shows a detailed view of the transmission element 183. Figure 33 shows a side view of the connection element 14. The transmission element 183 comprises in the examples of Figures 3A and 3B two rails 30A and 30B. The connection element 14 comprises a corresponding number of guiding elements 28A and 283. The rails 30A, 303 are mainly in parallel to the transversal insertion direction. The guiding elements 28A, 28B are arranged at different heights in the axial direction. Therein, the axial distance between the guiding elements 28A and 28B correspond to the axial distance between the rails 30A, 30B of the transmission element 18B. Further, the rails 30A, 30B comprise the same shape shifted by the transversal distance along the x-direction of the guiding elements 28A, 283. As shown in Figure 3A the rails 30A, 303 comprise an angled section 32A, 32B. Therein, the transversal distance between the angle section corresponds to the transversal distance along the x-axis of the guiding elements 28A, 28B.

By the rails 30A, 30B axial movement of the connection element 14 is facilitated. Upon insertion of the transmission element 18B into the apparatus 10 in the transversal insertion direction indicated by the arrow 29, first the guiding element 28A comes into engagement with the first rail 30A being guided along the parallel part. Upon reaching the second guiding element 283, the second guiding element 283 comes into engagement with the second rail 303 wherein the movement of the second guiding element 283 is guided by the second rail 303. Upon further insertion of the transmission element along the transversal insertion direction 29, the first guiding element 28A and the second guiding element 28B reach the angled sections 32A, 32B, respectively. By the angled sections 32A, 323 the connection element 14 is axially moved with respect to the fastening element 16 since the lower face 25B of the transmission element 18B abuts the protrusion 23 and an axial force is transferred to the connection element 14 creating axial movement of the connection element 14 and pressing -12 -the connection element 14 against the fastening element 16 providing a vacuum-tight seal.

Therein, the angled sections 32A, 32B might comprise an angle between 10 to 100 relative to the x-direction in the plane shown by Figure 3A. Although shown as straight angled sections in figure 3A, the angled sections 32A, 32B can be curved and in particular S-curved. The lengths of the angled sections 32A, 323 might be between lmm and 10mm and preferably between 2mm and 5mm. The axial movement created by the angled sections 32A, 32B might be between 1mm and 5mm and preferably between 2mm and 3mm. Therein, the angle and length of the angled section are preferably identical in order to provide conformity of movement of the connection element in the axial direction.

The second transmission element 18A and the opposite side of the connection element 14 are mirrored configurations to what is shown in Figures 3A and 3B. Further, the figures 3A and 33 show two rails 30A, 303 and two guiding element 28A, 283. However, the present invention is not limited to a specific number of rails and guiding elements, wherein the number of rails and guiding elements are equal.

Referring to Figure 3 the steps for connecting the vacuum pump to the fastening element 16 include: In step 501, attaching the vacuum pump 12 to the connection element 14 preferably via the flange of the vacuum pump 12.

In step 502, insertion of the connection element 14 into the fastening element 16 until an end position is reached defining a fixed transversal position of the connection element 14 relative to the fastening element 16.

-13 -In step 503, insertion of the transmission element 18A, 183 into the fastening element 16 wherein the transmission elements 18A, 183 are configured to transfer the insertion motion of the transmission elements 18A, 183 in the transversal insertion direction into an axial motion of the connection element 14 relative to the fastening element 16. By the axial motion of the connection element 14 a vacuum-tight connection between the vacuum pump 12 and the vacuum apparatus connected to the fastening element 16 is created.

In an additional step, a fixing element 34 as shown in Figure 5 can be connected to the fastening element 16 for example by a bolt 36, thereby providing a transversal force in the insertion direction 29 of the transmission element 183 and maintaining the transmission element 183 in the fully inserted position. Instead of an additional fixing element 34, the fixing element can be built or formed as a bolt extending through the complete length of the transmission element 183 fixed to the fastening element 16 at its opposite end.

Thus, by the present apparatus an easy way is provided to connect a vacuum pump 12 to a vacuum apparatus even if not possible in a direct axial connection along the orientation of the flanges of the vacuum pump. Transversal insertion of the vacuum pump into the recess 22 of the fastening element 16 is enabled, wherein by the transmission elements 18A, 183 a vacuum-tight and crash-proof connection between the vacuum pump and the vacuum apparatus is enabled.

Claims

-14 -CLAIMS1. Apparatus for connecting a vacuum pump, in particular a turbomolec-ular vacuum pump, to a vacuum apparatus, comprising a connection element configured to be connectable to a vacuum pump; a fastening element configured to be connectable to a vacuum apparatus; wherein the apparatus further comprises a transmission element configured to transfer an insertion motion of the transmission element in a transversal insertion direction into an axial motion of the connection element relative to the fastening element to provide a vacuum-tight connection between the vacuum pump and the vacuum apparatus.
2. Apparatus according to claim 1, wherein the apparatus comprises a guiding structure having at least one rail and at least one guiding element engaging the rail to guide movement of the transmission element relative to the connection element.
3. Apparatus according to claim 2, wherein the connection element com-prises at least one rail and the transmission element comprises at least one guiding element engaging the rail.
4. Apparatus according to any of claims 2 or 3, wherein the transmission element comprises at least one rail and the connection element comprises at least one guiding element engaging the rail.
5. Apparatus according to any of claims 2 to 4, comprising more than one rail and more than one guiding element.
-15 - 6. Apparatus according to claim 5, wherein the more than one rails and the more than one guiding elements are each arranged at different heights.
7. Apparatus according to any of claims 2 to 6, comprising at least one rail and at least one guiding element engaging the rail arranged at two opposing sides of the connection element.
8. Apparatus according to any of claims 2 to 7, wherein the rail comprises an angled section, preferably at the end of the rail.
9. Apparatus according to claim 8, wherein the angled section has an angle between 10 to 100 or -1° to -10 relative to the transversal insertion direction.
10. Apparatus according to claim 8 or 9, wherein angled section is straight or curved and preferably S-shaped.
11. Apparatus according to any of claims 1 to 10, wherein the fastening element comprises a recess for accommodation of the transmission element.
12. Apparatus according to any of claims 1 to 11, comprising a fixing element configured to apply a transversal force to the transmission element in the transversal insertion direction.
13. Vacuum system comprising a vacuum pump, in particular a turbomolecular vacuum pump, and an apparatus according to any of claims 1 to 12, wherein the vacuum pump is connected to the connection element, a vacuum apparatus connected to the fastening element.
-16 - 14. Vacuum system according to claim 13, wherein the vacuum pump comprises a flange and the vacuum pump is connected to the connection element via the flange or wherein the vacuum pump and the connection element are integrally formed.
15. Vacuum system according to claims 13 or 14, wherein the vacuum pump is a multi-inlet pump.
16. Vacuum system according to any of claims 13 to 15, wherein the fas-tening element is integrally formed with the vacuum apparatus.