GB2599603B - Glow plasma stabilisation - Google Patents

Glow plasma stabilisation Download PDF

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Publication number
GB2599603B
GB2599603B GB2200249.7A GB202200249A GB2599603B GB 2599603 B GB2599603 B GB 2599603B GB 202200249 A GB202200249 A GB 202200249A GB 2599603 B GB2599603 B GB 2599603B
Authority
GB
United Kingdom
Prior art keywords
glow plasma
stabilisation
plasma stabilisation
glow
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2200249.7A
Other versions
GB2599603A (en
Inventor
Lopez Martin
Ratcliffe Michael
Alizadeh Bahram
Batson Nicky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Servomex Group Ltd
Original Assignee
Servomex Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB1904896.6A external-priority patent/GB2583897A/en
Application filed by Servomex Group Ltd filed Critical Servomex Group Ltd
Publication of GB2599603A publication Critical patent/GB2599603A/en
Application granted granted Critical
Publication of GB2599603B publication Critical patent/GB2599603B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/20—Power circuits
    • H05H2242/22—DC, AC or pulsed generators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Plasma Technology (AREA)
GB2200249.7A 2019-04-05 2020-04-06 Glow plasma stabilisation Active GB2599603B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1904896.6A GB2583897A (en) 2019-04-05 2019-04-05 Glow plasma stabilisation
GB2005079.5A GB2583025B (en) 2019-04-05 2020-04-06 Glow plasma stabilisation

Publications (2)

Publication Number Publication Date
GB2599603A GB2599603A (en) 2022-04-06
GB2599603B true GB2599603B (en) 2022-10-26

Family

ID=80628171

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2200249.7A Active GB2599603B (en) 2019-04-05 2020-04-06 Glow plasma stabilisation

Country Status (1)

Country Link
GB (1) GB2599603B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2583897A (en) * 2019-04-05 2020-11-18 Servomex Group Ltd Glow plasma stabilisation

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2381375A (en) * 2001-05-18 2003-04-30 Ulvac Inc Plasma processing apparatus
EP1381257A2 (en) * 2002-07-11 2004-01-14 Fuji Photo Film B.V. Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2381375A (en) * 2001-05-18 2003-04-30 Ulvac Inc Plasma processing apparatus
EP1381257A2 (en) * 2002-07-11 2004-01-14 Fuji Photo Film B.V. Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions

Also Published As

Publication number Publication date
GB2599603A (en) 2022-04-06

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