GB2592282B - Optoelectronic device and method of manufacture thereof - Google Patents

Optoelectronic device and method of manufacture thereof Download PDF

Info

Publication number
GB2592282B
GB2592282B GB2008722.7A GB202008722A GB2592282B GB 2592282 B GB2592282 B GB 2592282B GB 202008722 A GB202008722 A GB 202008722A GB 2592282 B GB2592282 B GB 2592282B
Authority
GB
United Kingdom
Prior art keywords
manufacture
optoelectronic device
optoelectronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2008722.7A
Other versions
GB202008722D0 (en
GB2592282A (en
Inventor
John Zilkie Aaron
Nykänen Henri
Peters Frank
Su-Chang Tsai Charles
Yu Guomin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockley Photonics Ltd
Original Assignee
Rockley Photonics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rockley Photonics Ltd filed Critical Rockley Photonics Ltd
Priority to GB2008722.7A priority Critical patent/GB2592282B/en
Publication of GB202008722D0 publication Critical patent/GB202008722D0/en
Priority to GB2101257.0A priority patent/GB2601842B/en
Priority to GB2108233.4A priority patent/GB2596917B/en
Priority to CN202180056459.1A priority patent/CN116075756A/en
Priority to US18/009,084 priority patent/US20230251419A1/en
Priority to PCT/EP2021/065463 priority patent/WO2021250098A1/en
Publication of GB2592282A publication Critical patent/GB2592282A/en
Application granted granted Critical
Publication of GB2592282B publication Critical patent/GB2592282B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02255—Out-coupling of light using beam deflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12078—Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
    • H01S5/021—Silicon based substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H01S5/02453—Heating, e.g. the laser is heated for stabilisation against temperature fluctuations of the environment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/024—Arrangements for thermal management
    • H01S5/02461—Structure or details of the laser chip to manipulate the heat flow, e.g. passive layers in the chip with a low heat conductivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
    • H01S5/0612—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
GB2008722.7A 2020-06-09 2020-06-09 Optoelectronic device and method of manufacture thereof Active GB2592282B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB2008722.7A GB2592282B (en) 2020-06-09 2020-06-09 Optoelectronic device and method of manufacture thereof
GB2101257.0A GB2601842B (en) 2020-06-09 2021-01-29 Optoelectronic device and method of manufacture thereof
US18/009,084 US20230251419A1 (en) 2020-06-09 2021-06-09 Optoelectronic device and method of manufacture thereof
CN202180056459.1A CN116075756A (en) 2020-06-09 2021-06-09 Optoelectronic component and method for producing the same
GB2108233.4A GB2596917B (en) 2020-06-09 2021-06-09 Optoelectronic device
PCT/EP2021/065463 WO2021250098A1 (en) 2020-06-09 2021-06-09 Optoelectronic device and method of manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2008722.7A GB2592282B (en) 2020-06-09 2020-06-09 Optoelectronic device and method of manufacture thereof

Publications (3)

Publication Number Publication Date
GB202008722D0 GB202008722D0 (en) 2020-07-22
GB2592282A GB2592282A (en) 2021-08-25
GB2592282B true GB2592282B (en) 2022-06-01

Family

ID=71616037

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2008722.7A Active GB2592282B (en) 2020-06-09 2020-06-09 Optoelectronic device and method of manufacture thereof

Country Status (1)

Country Link
GB (1) GB2592282B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023046762A1 (en) * 2021-09-22 2023-03-30 Rockley Photonics Limited Optoelectronic device
GB2612376A (en) * 2021-11-02 2023-05-03 Rockley Photonics Ltd Laser

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110150024A1 (en) * 2009-12-21 2011-06-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Hybrid laser coupled to a waveguide
WO2017200620A2 (en) * 2016-02-29 2017-11-23 Stc.Unm Ring laser integrated with silicon-on-insulator waveguide
US20190341744A1 (en) * 2016-12-27 2019-11-07 Optella Inc. External cavity laser using vertical-cavity surface-emitting laser and silicon optical element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110150024A1 (en) * 2009-12-21 2011-06-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Hybrid laser coupled to a waveguide
WO2017200620A2 (en) * 2016-02-29 2017-11-23 Stc.Unm Ring laser integrated with silicon-on-insulator waveguide
US20190341744A1 (en) * 2016-12-27 2019-11-07 Optella Inc. External cavity laser using vertical-cavity surface-emitting laser and silicon optical element

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Edge coupling of O-band InP etched facet lasers to polymer waveguides on SOI by micro transfer printing" R Loi et al, IEEE Journal Quantum Electronics, Vol 56, No 1, 1/2/20202, page 6400108 *
"Micro transfer printed III-V on silicon C-band distributed Bragg reflector laser" J Zhang et al, 2019 IEEE 16th International Conference on Group IV Photonics 28/8/2019 *

Also Published As

Publication number Publication date
GB202008722D0 (en) 2020-07-22
GB2592282A (en) 2021-08-25

Similar Documents

Publication Publication Date Title
GB2563278B (en) Optoelectronic device and method of manufacturing thereof
EP3774374C0 (en) Optical device and method of manufacture thereof
EP3774373C0 (en) Optical device and method of manufacture thereof
GB2592282B (en) Optoelectronic device and method of manufacture thereof
GB2594408B (en) Optoelectronic device and method of manufacture thereof
GB2588183B (en) Optical device and method of manufacture thereof
GB2589092B (en) III-V / Silicon optoelectronic device and method of manufacture thereof
GB2583393B (en) Photonic chip and method of manufacture
GB2573576B (en) Optoelectronic device and method of manufacturing thereof
IL285880A (en) Waveguide device and method of manufacturing this device
GB2601842B (en) Optoelectronic device and method of manufacture thereof
GB2599864B (en) Method of fabricating an integrated structure for an optoelectronic device and integrated structure for an optoelectronic device
GB202000951D0 (en) Semiconductor device and method of manufacture
GB2596805B (en) Optoelectronic device and method of manufacture thereof
GB2595880B (en) Optoelectronic device and method of manufacture thereof
GB2603886B (en) Optical devices and methods of manufacture thereof
GB202010596D0 (en) Optoelectronic device and method of manufacture thereof
GB202008698D0 (en) Optoelectronic device and method of manufacture thereof
GB202107061D0 (en) Optical device and method of manufacture
GB2602796B (en) Optical devices and methods of manufacture thereof
GB2586881B (en) Optoelectronic device and method of manufacturing an optoelectronic device
GB202013471D0 (en) Moisture-resistant optical device and method of manufacture
GB202216889D0 (en) Opto-electronic device and method of manufacturing
GB202102021D0 (en) Led device and method of manufacture
GB202102012D0 (en) LED Device and method of manufacture

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20220901 AND 20220907

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20230511 AND 20230517