GB2584428B - A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber - Google Patents

A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber Download PDF

Info

Publication number
GB2584428B
GB2584428B GB1907557.1A GB201907557A GB2584428B GB 2584428 B GB2584428 B GB 2584428B GB 201907557 A GB201907557 A GB 201907557A GB 2584428 B GB2584428 B GB 2584428B
Authority
GB
United Kingdom
Prior art keywords
evacuating
pumping system
vacuum
turbomolecular pump
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1907557.1A
Other versions
GB2584428A (en
GB201907557D0 (en
Inventor
David Chew Andrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1907557.1A priority Critical patent/GB2584428B/en
Publication of GB201907557D0 publication Critical patent/GB201907557D0/en
Priority to JP2021570362A priority patent/JP2022534259A/en
Priority to US17/612,869 priority patent/US20220120282A1/en
Priority to CN202080039999.4A priority patent/CN113924417A/en
Priority to EP20730223.3A priority patent/EP3976973A1/en
Priority to PCT/EP2020/064964 priority patent/WO2020239975A1/en
Publication of GB2584428A publication Critical patent/GB2584428A/en
Application granted granted Critical
Publication of GB2584428B publication Critical patent/GB2584428B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1907557.1A 2019-05-29 2019-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber Active GB2584428B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB1907557.1A GB2584428B (en) 2019-05-29 2019-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
EP20730223.3A EP3976973A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
US17/612,869 US20220120282A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
CN202080039999.4A CN113924417A (en) 2019-05-29 2020-05-29 Turbo-molecular pump, vacuum pumping system and method for evacuating vacuum chamber
JP2021570362A JP2022534259A (en) 2019-05-29 2020-05-29 Turbomolecular pump, vacuum pump system, and method of evacuating a vacuum chamber
PCT/EP2020/064964 WO2020239975A1 (en) 2019-05-29 2020-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1907557.1A GB2584428B (en) 2019-05-29 2019-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber

Publications (3)

Publication Number Publication Date
GB201907557D0 GB201907557D0 (en) 2019-07-10
GB2584428A GB2584428A (en) 2020-12-09
GB2584428B true GB2584428B (en) 2021-11-03

Family

ID=67385607

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1907557.1A Active GB2584428B (en) 2019-05-29 2019-05-29 A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber

Country Status (1)

Country Link
GB (1) GB2584428B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619340A (en) * 2022-06-01 2023-12-06 Edwards Ltd Vacuum component and vacuum apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017207706A1 (en) * 2016-06-03 2017-12-07 Pfeiffer Vacuum Components & Solutions Gmbh Vacuum device and method for coating components of a vacuum device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017207706A1 (en) * 2016-06-03 2017-12-07 Pfeiffer Vacuum Components & Solutions Gmbh Vacuum device and method for coating components of a vacuum device
US20190309408A1 (en) * 2016-06-03 2019-10-10 Pfeiffer Vacuum Components & Solutions Gmbh Vacuum device and method for coating components of a vacuum device

Also Published As

Publication number Publication date
GB2584428A (en) 2020-12-09
GB201907557D0 (en) 2019-07-10

Similar Documents

Publication Publication Date Title
GB2584428B (en) A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber
WO2011141725A3 (en) Vacuum pumping system
WO2015043993A3 (en) Evacuation of a film chamber
GB201816975D0 (en) A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment
GB2570503B (en) Turbomolecular pump and method of operation
GB2572958B (en) A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
GB202206036D0 (en) Vacuum pump
GB2592346B (en) Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber
GB2576968B (en) A vacuum pumping system having multiple pumps
GB201809752D0 (en) Twin shaft vacuum pumps, vacuum pump systems and a method of pumping
GB201816601D0 (en) A rotor for a multiple vaccum pump, a multiple stage vacuum pump and method of manufacture
GB202215355D0 (en) Turbomolecular pump
GB202314023D0 (en) Vacuum pumping system and method
GB202314028D0 (en) Vacuum pumping system and method
GB2581799B (en) Determining pressure of gas pumped by a turbomolecular pump
CA210786S (en) Vacuum pump
GB2590955B (en) Vacuum pump
GB2592030B (en) Multiple stage vacuum pump
GB202117579D0 (en) Multistage vacum pump
GB201811229D0 (en) A variable pumping capacity vacuum pump, vacuum pump arrangement and method
GB202401032D0 (en) Vacuum pump
GB202319722D0 (en) Vacuum pump
GB202319460D0 (en) Vacuum pump
GB202309810D0 (en) Vacuum pump
GB202308187D0 (en) Vacuum pump