GB2584428B - A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber - Google Patents
A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber Download PDFInfo
- Publication number
- GB2584428B GB2584428B GB1907557.1A GB201907557A GB2584428B GB 2584428 B GB2584428 B GB 2584428B GB 201907557 A GB201907557 A GB 201907557A GB 2584428 B GB2584428 B GB 2584428B
- Authority
- GB
- United Kingdom
- Prior art keywords
- evacuating
- pumping system
- vacuum
- turbomolecular pump
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
- F04D17/12—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1907557.1A GB2584428B (en) | 2019-05-29 | 2019-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
EP20730223.3A EP3976973A1 (en) | 2019-05-29 | 2020-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
US17/612,869 US20220120282A1 (en) | 2019-05-29 | 2020-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
CN202080039999.4A CN113924417A (en) | 2019-05-29 | 2020-05-29 | Turbo-molecular pump, vacuum pumping system and method for evacuating vacuum chamber |
JP2021570362A JP2022534259A (en) | 2019-05-29 | 2020-05-29 | Turbomolecular pump, vacuum pump system, and method of evacuating a vacuum chamber |
PCT/EP2020/064964 WO2020239975A1 (en) | 2019-05-29 | 2020-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1907557.1A GB2584428B (en) | 2019-05-29 | 2019-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201907557D0 GB201907557D0 (en) | 2019-07-10 |
GB2584428A GB2584428A (en) | 2020-12-09 |
GB2584428B true GB2584428B (en) | 2021-11-03 |
Family
ID=67385607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1907557.1A Active GB2584428B (en) | 2019-05-29 | 2019-05-29 | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2584428B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2619340A (en) * | 2022-06-01 | 2023-12-06 | Edwards Ltd | Vacuum component and vacuum apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017207706A1 (en) * | 2016-06-03 | 2017-12-07 | Pfeiffer Vacuum Components & Solutions Gmbh | Vacuum device and method for coating components of a vacuum device |
-
2019
- 2019-05-29 GB GB1907557.1A patent/GB2584428B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017207706A1 (en) * | 2016-06-03 | 2017-12-07 | Pfeiffer Vacuum Components & Solutions Gmbh | Vacuum device and method for coating components of a vacuum device |
US20190309408A1 (en) * | 2016-06-03 | 2019-10-10 | Pfeiffer Vacuum Components & Solutions Gmbh | Vacuum device and method for coating components of a vacuum device |
Also Published As
Publication number | Publication date |
---|---|
GB2584428A (en) | 2020-12-09 |
GB201907557D0 (en) | 2019-07-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2584428B (en) | A turbomolecular pump, a vacuum pumping system and a method of evacuating a vacuum chamber | |
WO2011141725A3 (en) | Vacuum pumping system | |
WO2015043993A3 (en) | Evacuation of a film chamber | |
GB201816975D0 (en) | A set of pumps, and a method and system for evacuating a vacuum chamber in a radioactive environment | |
GB2570503B (en) | Turbomolecular pump and method of operation | |
GB2572958B (en) | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers | |
GB202206036D0 (en) | Vacuum pump | |
GB2592346B (en) | Vacuum pump and vacuum pump set for evacuating a semiconductor processing chamber | |
GB2576968B (en) | A vacuum pumping system having multiple pumps | |
GB201809752D0 (en) | Twin shaft vacuum pumps, vacuum pump systems and a method of pumping | |
GB201816601D0 (en) | A rotor for a multiple vaccum pump, a multiple stage vacuum pump and method of manufacture | |
GB202215355D0 (en) | Turbomolecular pump | |
GB202314023D0 (en) | Vacuum pumping system and method | |
GB202314028D0 (en) | Vacuum pumping system and method | |
GB2581799B (en) | Determining pressure of gas pumped by a turbomolecular pump | |
CA210786S (en) | Vacuum pump | |
GB2590955B (en) | Vacuum pump | |
GB2592030B (en) | Multiple stage vacuum pump | |
GB202117579D0 (en) | Multistage vacum pump | |
GB201811229D0 (en) | A variable pumping capacity vacuum pump, vacuum pump arrangement and method | |
GB202401032D0 (en) | Vacuum pump | |
GB202319722D0 (en) | Vacuum pump | |
GB202319460D0 (en) | Vacuum pump | |
GB202309810D0 (en) | Vacuum pump | |
GB202308187D0 (en) | Vacuum pump |