GB2551890A

GB2551890A - Plasma generating apparatus

Info

Publication number: GB2551890A
Application number: GB1707341.2A
Authority: GB
Inventors: Jung Hee-Soo; Choi Seung-Ki; Shim Woo-Sub
Original assignee: Agency for Defence Development
Current assignee: Agency for Defence Development
Priority date: 2016-05-11
Filing date: 2017-05-08
Publication date: 2018-01-03
Anticipated expiration: 2037-05-08
Also published as: KR101709167B1; GB2551890B; GB201707341D0

Abstract

Disclosed herein is a plasma generating apparatus 100 including a body 110 having a storage space 115 for storing a sample 1 and a nozzle 190 formed in one side surface of the body 110 such that air in the storage space 115 can be discharged through the nozzle 190. The body 110 includes a skin member (Fig. 2,120) and a flexible electrode portion (140), a heat sink layer (130) and a breathable layer (150). The flexible electrode (14) generates a plasma with respect to the sample 1 by causing a discharge. When air in the storage space 115 is purged through the nozzle 190, the body 110 contracts and the electrode portion (140) becomes closer to the sample 1.

Description

(54) Title of the Invention: Plasma generating apparatus

Abstract Title: Plasma generating apparatus with flexible electrode suitable for detoxification and sterilization (57) Disclosed herein is a plasma generating apparatus 100 including a body 110 having a storage space 115 for storing a sample 1 and a nozzle 190 formed in one side surface of the body 110 such that air in the storage space 115 can be discharged through the nozzle 190. The body 110 includes a skin member (Fig. 2,120) and a flexible electrode portion (140), a heat sink layer (130) and a breathable layer (150). The flexible electrode (14) generates a plasma with respect to the sample 1 by causing a discharge. When air in the storage space 115 is purged through the nozzle 190, the body 110 contracts and the electrode portion (140) becomes closer to the sample 1.

FIG.1

100

1/9

100

FIG.1

/

I

2/9

FIG.2

115

3/9

FIG,3

/ σ>

4/9

FIG. 4

100

!

190

FIG. 5

5/9

FIG.6 ο

CD c\)

C\I

6/9

FIG.7 ο

ο

C\l

ο rC\l

7/9

ΠΘ.8

'-«Οι

8/9

9/9

FIG. 10

PLASMA GENERATING APPARATUS

CROSS REFERENCE TO RELATED APPLICATION(S) [0001] This application claims the benefit of Korean Patent Application No. 10-20160057443 filed May 11, 2016, which is hereby incorporated by reference in its entirety into this application.

BACKGROUND OF THE INVENTION

1. Technical Field [0002] The present invention relates to a plasma generating apparatus.

2. Description of the Related Art [0003] Atmospheric-pressure plasma produced through an electric discharge in an open space at 1 atm unlike vacuum-pressure plasma that is dominantly used in a semiconductor manufacturing process has been actively studied since the nineties. Atmospheric-pressure plasmas are classified, according to discharge generation structures and discharge modes, into dielectric barrier discharge (DBD), corona jet discharge, glow discharge, arc torch discharge, micro hollow cathode discharge (MHCD), inductively coupled plasma (ICP), etc. It is possible to generate plasmas with different physical and/or chemical properties by controlling input frequency, input voltage and current, input waveform, supply gas, etc. Due to plasma's diverse characteristics, studies have been actively and globally conducted on fundamental technologies of atmospheric-pressure plasma and on applications thereof in biology and medical fields, the material industry, energy and environmental fields, etc.

[0004] When a voltage is applied between two electrodes spaced by a predetermined distance from each other, an electrical discharge is caused in a space between the electrodes. The electric discharge results in a reaction gas being ionized to produce plasma. The plasma consists of various functional ions. Therefore, the plasma has an effect of modifying the surface of a material through fine particle removal, surface profile change, and generation of polar functional groups and as well as an effect of cleaning the surface of a material. This plasma surface treatment greatly improves adhesion of the surface of a material in printing, coating, and bonding processes.

[0005] Approximately 90% of studies on atmospheric-pressure plasma have focused on small-scale DBD and corona jet discharge, both of which use helium or argon as a discharge gas and cause an electric discharge at a relatively low discharge voltage. However, these methods require additional gas supply facilities for supplying helium or argon as a discharge gas because a large amount of helium or argon is consumed to generate plasma. Therefore, with respect to these methods, there is a problem that simplification of a plasma generating system is required. Meanwhile, there is another study on atmospheric-pressure plasma, which uses air instead of a specific discharge gas. However, this study is mainly focused on the structure of a dielectric barrier discharge (DBD) system or the structure of a torch-type electrode. However, since these plasma generating apparatuses have a problem that a space between electrodes or a plasma treatment area is small, a new design for an electrode structure that can cause a discharge over a large area while improving power efficiency is required.

[0006] Meanwhile, as with a flexible display technology, a technology using a flexible electrode instead of a conventional flat-plate electrode is required in plasma application technologies. The reason is that the volume of the whole system and flexibility in a system design are limited when a system is designed with an inflexible electrode.

[0007] One related art is disclosed in Korean Patent No. 10-1573231 (Patent Document

1). Patent Document 1 discloses a technology about plasma discharge using a flexible electrode. However, Patent Document 1 discloses neither a method of forming a flexible electrode assembly nor a method of increasing detoxification and sterilization efficiency. [0008] Another related art is disclosed in Korean Patent No. 10-1492864 (Patent

Document 2). Patent Document 2 relates to a packaging material that can sterilize a sample by generating plasma. However, Patent Document 2 discloses neither a method of forming a flexible electrode assembly nor a method of increasing detoxification and sterilization efficiency. When this technology is applied to general packaging materials, since an electric arc is easily generated when a high voltage discharge is caused, it is problematic to continuously apply a high voltage of electric power.

SUMMARY OF THE INVENTION [0009] Accordingly, the present invention has been made keeping in mind the above problems occurring in the related art, and an object of the present invention is to provide a plasma generating apparatus capable of maximizing detoxification and sterilization efficiency.

[0010] Another object of the present invention is to provide a method of effectively expanding a flexible electrode assembly.

[0011] In order to accomplish the above object, the present invention provides a plasma generating apparatus including: a body having a storage space for storing a sample to be treated; and a nozzle provided at one side of the body and configured such that air in the storage space is purged through the nozzle, wherein the body includes a skin member and a flexible electrode portion provided to an inner surface of the skin member and generating plasma with respect to the sample by causing a discharge, and wherein when the air in the storage space is purged through the nozzle, the body contracts and thus the electrode portion becomes closer to the sample.

[0012] The body may further include a breathable member having air permeability and provided to an inner surface of the electrode portion, the breathable member coming into contact with the sample when the body contracts.

[0013] When the body contracts, a gap between the electrode portion and the sample is maintained by a thickness of the breathable member.

[0014] The breathable member may be coated with a metal oxide catalyst and adsorptive particles.

[0015] The electrode portion may include a first electrode and a second electrode that are alternately arranged, and an insulator surrounding either or both of the first electrode and the second electrode and spacing the first electrode and the second electrode from each other.

[0016] The first electrode and the second electrode may be disposed at different heights, a space may be formed between the second electrodes adjacent to each other, and a space may be formed between the first electrodes adjacent to each other.

[0017] According to another aspect, there is provided a plasma generating apparatus including a plurality of unit modules, each module including a first sheet and a second sheet arranged to face the first sheet, the unit modules being assembled with each other to form a first sheet group including the first sheets and a second sheet group including the second sheets, the first sheet group and the second sheet group defining a storage space to store a sample therebetween, wherein each of the first sheet and the second sheet includes: a skin member; and a flexible electrode portion provided to an inner surface of the skin member and generating plasma with respect to the sample by causing a discharge, wherein any one of the unit modules includes a nozzle provided to either one of the first sheet and the second sheet such that air in the storage space is purged through the nozzle, and wherein when air in the storage space is purged through the nozzle, the first sheet and the second sheet contract and the electrode portions become closer to the sample.

[0018] In addition, the first sheet and the second sheet may have a rectangular shape. Two adjacent unit modules of the plurality of unit modules may be assembled with each other in a manner such that one longer side of the first sheet of one unit module of the two unit modules is combined with one longer side of the first sheet of the other unit module, one longer side of the second sheet of the one unit module of the two unit modules is combined with one longer side of the second sheet of the other unit module, opposite shorter sides of the first sheet of the one unit module are combined with respective opposite shorter sides of the second sheet of the one unit module, and opposite shorter sides of the first sheet of the other unit module are combined with respective opposite shorter sides of the second sheet of the other unit module.

[0019] In an outermost unit module of the plurality of unit modules, the first sheet and the second sheet may be combined at outer longer sides thereof.

[0020] According to the aspects, it is possible to provide a plasma generating apparatus capable of maximizing detoxification and sterilization efficiency.

[0021] In addition, it is possible to provide a method of effectively expanding a flexible electrode assembly.

BRIEF DESCRIPTION OF THE DRAWINGS [0022] The above and other objects, features and advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:

[0023] FIG. 1 is a schematic view of a plasma generating apparatus according to a first embodiment of the invention;

[0024] FIG. 2 is an enlarged view of a portion A of FIG. 1;

[0025] FIG. 3 is a diagram illustrating an example of an electrode portion according to the first embodiment of the invention;

[0026] FIG. 4 is a diagram illustrating an operation state of the plasma generating apparatus of FIG. 1;

[0027] FIG. 5 is an enlarged view of a portion B of FIG. 4;

[0028] FIGS. 6 and 7 are respectively a perspective view and a front view illustrating a unit module of a plasma generating apparatus according a second embodiment of the invention; and [0029] FIG. 8 is a diagram illustrating a state in which a plurality of unit modules shown in FIGS. 6 and 7 is assembled with each other.

[0030] FIGS. 9 and 10 are pictures illustrating actual implementation forms of the technical spirit of the invention;

DESCRIPTION OF THE PREFERRED EMBODIMENTS [0031] Hereinafter, specific embodiments for implementing the technical spirit of the invention will be described in detail below with reference to the accompanying drawings. Repeated descriptions and descriptions of known functions and configurations which have been deemed to make the gist of the present invention unnecessarily obscure will be omitted below.

[0032] FIG. 1 is a schematic view illustrating a plasma generating apparatus 100 according to a first embodiment of the invention. The plasma generating apparatus 100 according to the first embodiment is a vacuum pack type plasma generating apparatus. A sample 1 that is an object to be detoxified or sterilized is put in the plasma generating apparatus 100. When the plasma generating apparatus 1 is activated, a body 110 contracts and plasma is generated and applied to the sample 1. Therefore, detoxification and sterilization can be effectively performed.

[0033] Although the plasma generating apparatus is used for sterilization or detoxification in the present embodiment, the technical spirit of the invention is not limited thereto. For example, the plasma generating apparatus may be used for various plasma treatments such as removal of foreign substances, changing of surface roughness, formation of polar functional groups, and surface modification.

[0034] The body 110 may have a storage space 115 for storing the sample 1. The sample 1 to be detoxified or sterilized may be stored in the storage space 115.

[0035] One side of the body 110 may be provided with a nozzle 190. As described above, the plasma generating apparatus 100 is provided as a vacuum pack type. Air in the storage space 115 is purged through the nozzle 190. The air in the storage space 115 can be suctioned by a suction device (not shown).

[0036] FIG. 2 is an enlarged view of a portion A of FIG. 1. As illustrated in FIG. 2, the body 110 may have a multilayer structure. For example, the body 110 may be a multilayer sheet including a skin member 120, a heat-sinking member 130, an electrode portion 140, and a breathable member 150.

[0037] The skin member 120 may be the outermost layer of the body 110. The skin member 120 may be made of an impermeable material to prevent foreign substances, air, moisture, etc. from permeating into the inside of the body 110. For example, the skin member 120 may be made of silicone, heatproof Teflon, or the like, and preferably made of a highly thermally conductive material in consideration of generation of plasma that is usually very hot.

[0038] The inner surface of the skin member 120 is provided with the heat-sinking member 130 for cooling. The heat-sinking member 130 is made of a thermally conductive material and it may be a flexible gel-type sheet.

[0039] Herein, the term inner side, inner portion, or inner surface refers to a side, portion, or surface that is relatively closer to the center of the storage space 115.

[0040] The heat-sinking member 130 may be detachably attached to the inner surface of the skin member 120. For attachment and detachment of the heat-sinking member 130, a Velcro tape, button, zipper, or the like may be used.

[0041] The inner surface of the heat-sinking member 130 may be provided with the electrode portion 140. The electrode portion 140 may be flexible so that it can contract as described below. Examples of the electrode portion 140 may include all of the flexible electrodes disclosed in Patent Document 1. Alternatively, the electrode portion

140 may have a structure illustrated in FIG. 3 and described below.

[0042] The electrode portion 140 may generate plasma when the electrode portion 140 is applied with electric power. The sample 1 can be detoxified or sterilized by the generated plasma. Since a technology of generating plasma with an electrode is conventional, this technology will not be described in detail herein.

[0043] The electrode portion 140 may be detachably attached so as to be conveniently used. For attachment and detachment of the electrode portion 140, a Velcro tape, a button, zipper, or the like may be used. Accordingly, a user can attach the electrode portion 140 when it is necessary to generate plasma and can detach the electrode 140 when it is not. The electrode portion 140 may be attached to the heat-sinking member 130 in the case where the heat-sinking member 130 is provided in the body 110, and to the skin member 120 when the heat-sinking member 130 is not provided in the body 110.

[0044] The breathable member 150 may be provided to the inner surface of the electrode portion 140. Since the breathable member 150 is an air-permeable member, air or plasma can pass through the breathable member 150. The breathable member 150 may be made of any material of the materials disclosed in Patent Document 1. In addition, examples of the material of the breathable member 150 may further include nano materials that can cause adsorption reaction with various catalysts. For example, the breathable member 150 may be a metal-organic framework. Further, it may be made of silicone or Teflon mesh coated with a metal oxide catalyst such as T1O2, ZrfOFF), ZnO, and MgO.

[0045] The material of the breathable member 150 will be described in detail below. In a metal oxide catalyst, electrons (e') and holes (h⁺) are generated under a predetermined energy band gap, which creates radicals that improve detoxification and sterilization effects. In other words, In the case of T1O2, electron excitation occurs under a predetermined energy band gap and thus electrons and holes are generated. The electrons combine with oxygen to produce O2', and the holes combine with H2O to produce -OH. Superoxide (O2') and hydroxyl (-OH) are oxygen radicals and have detoxification and sterilization effects.

[0046] Meanwhile, when porous nano particles having a high adsorptivity, (for example, MOF, activated carbon, and absorbents) are contained in the breathable member 150, the breathable member 150 promptly adsorbs a toxic gas, thereby removing a high concentration agent with plasma.

[0047] The metal oxide catalyst and nano particles may be coated on the surface of the breathable member 150 through an atmospheric-pressure plasma chemical deposition (APCVD) process, a high pressure spraying process, or the like. The metal oxide catalyst and the nano material also may be coated on the surfaces of the skin member 120 and the electrode portion 140 besides on the surface of the breathable member 150. [0048] Since the breathable member 150 is detachably attached to the electrode portion 140, when the breathable member 150 is contaminated, the contaminated breathable member 150 can be replaced with a new breathable member 150 or may undergo a cleaning process.

[0049] FIG. 3 is a diagram illustrating an example of the electrode portion 140. As illustrated in FIG. 3, the electrode portion 140 may include a first electrode 141, a second electrode 142, an insulator 145, and a power supply device 149.

[0050] The first electrode 141 and the second electrode 142 may be alternately arranged and spaced from each other. The first electrode 141 and the second electrode 142 may be formed of a thin flexible wire. Therefore, the electrode portion 140 is flexible.

[0051] The insulator 145 spaces the first electrode and the second electrode from each other as well as surrounds each of the first electrode 141 and the second electrode 142.

The insulator 145 may have a uniform thickness and may be made of silicone, Teflon, polyimide, or the like.

[0052] When electric power is supplied from the power supply device 149 to the electrode portion 140, plasma is generated, for example, on the upper surface of the insulator 145 of FIG. 3. The power supply device 149 can supply sign wave electric power of a frequency of several kHz to several hundreds of kHz.

[0053] Meanwhile, according to a first modification, the first electrode 141 or second electrode 142 of the electrode portion 140 may be moved in a vertical direction from the position shown in FIG. 3 so that the first electrode 141 and the second electrode 142 may be disposed at different positions in the vertical direction. For example, when the second electrode 142 is moved downward, the second electrode 142 is disposed at a position lower than that of FIG. 3, and the electrode portion 140 has a corrugated form because the first electrodes 141 and the second electrodes 142 are alternately and consecutively arranged.

[0054] Namely, for example, one second electrode 142 is disposed between two first electrodes 141, and the first electrodes 141 and the second electrode 142 are disposed at different heights. Therefore, a continuous overall arrangement of the first electrodes 141 and the second electrodes 142 forms a wave form. According to this modification, since the second electrodes 142 are disposed to be lower than the first electrodes 141, plasma also can be generated even in a pace between the two adjacent first electrodes 141, so that a plasma discharge effect can be maximized.

[0055] According to a second modification, in a state in which the second electrode 142 is disposed to be lower than the adjacent first electrodes 141 as with the first modification, another first electrode 141 may be added to the structure of the first modification and the added first electrode 141 may be disposed to be lower than the second electrode 142. According to this embodiment, one second electrode 142 is surrounded by three first electrodes 141.

[0056] According to a third modification, a further first electrode 141 may be added to the structure of the second modification and arranged around the second electrode 142. In this modification, one second electrode 142 is surrounded by four first electrodes 141. [0057] FIG. 4 is a diagram illustrating an operation state of the plasma generating apparatus 100 of FIG. 1.

[0058] When the sample 1 that is a target to undergo detoxification or sterilization is introduced into the storage space 115 of the body 110, the air in the storage space 115 may be suctioned. The suctioned air may be discharged out of the body 110 through the nozzle 190. When the air in the storage space 115 is purged out of the body 110, as illustrated in FIG. 4, the body 110 deforms to contract. As the body 110 contracts, the electrode portion 140 of the body 110 becomes closer to the sample 1, and thus highly effective detoxification or sterilization can be performed.

[0059] FIG. 5 is an enlarged view of a portion B of FIG. 4. As described above, as the body 110 contracts, the whole inside surface of the body 110 becomes closer to the sample 1. At this point, the breathable member 150 that is the innermost layer may come into contact with the surface of the sample 1. Since both of the electrode portion 140 and the body 110 are flexible, they can deform, conforming to the profile of the sample 1. FIG. 5 verifies that the body 110 conforms to the surface contour of the sample 1. At this point, the breathable member 150 comes into contact with the surface of the sample 1, and a constant gap between the electrode portion 140 and the sample 1 can be maintained by the breathable member 150 disposed therebetween when the body 110 contracts. For example, the gap may correspond to the thickness of the breathable member 150.

[0060] Plasma can be generated in the state described above, i.e. the state in which the electrode portion 140 is disposed extremely close to the sample 1. Therefore, detoxification and sterilization effects can be significantly improved compared with a conventional plasma generating apparatus. In addition, it is possible to reduce an installation space compared with a conventional chamber.

[0061] Meanwhile, although not illustrated, the plasma generating apparatus 100 according to the present embodiment may include an ultrasonic vibrator module. The ultrasonic vibrator module may include an ultrasonic vibrator and a moisture source. The moisture source may be a web structure or a sponge structure each of which contains a moisture absorbing material (i.e. a deliquescent substance) such as silica gel and potassium, having a high deliquescence and thus being capable of absorbing moisture well. Examples of the moisture source also may include water, hydrogen peroxide, decontaminants, and the like. The ultrasonic vibrator transfers vibration energy to the moisture source to create a mist of water from the moisture source.

Because of this action, a predetermined humidity level can be maintained during generation of plasma, and radicals in the plasma are absorbed by the mist. Accordingly, a reaction time can be increased. Therefore, detoxification and sterilization efficiency can be consequently increased.

[0062] The ultrasonic vibrator module may be provided as a detachable form so as to be detachably attached to the body 110. For example, the ultrasonic vibrator module may be attached to the electrode portion 140, the breathable member, 150, or a zipper described below. The ultrasonic vibrator can be detached when it is not used.

[0063] FIG. 6 and 7 are a perspective view and a front view of a unit module of a plasma generating apparatus 200 according to a second embodiment of the invention.

According to the plasma generating apparatus 200 of the second embodiment, a plurality of unit modules may be connected to each other to increase a surface area. Thus, a plasma generating apparatus having a larger surface area can be provided. Specifically,

FIG. 6 illustrates a state in which zippers 270 and 280 are not zipped, and FIG. 7 illustrates a state in which the zippers 270 and 280 are zipped.

[0064] As illustrated in FIGS. 6 and 7, the unit module may include a first sheet 210 and a second sheet 260. The first sheet 210 and the second sheet 260 may be arranged to face each other, and each of the first sheet 210 and the second sheet 260 may include a heat-sinking member, an electrode portion, and a breathable member. The first sheet 210 and the second sheet 260 may have a multilayer structure as with the structure described with reference to FIG. 2 or 5. In addition, either the first sheet 210 or the second sheet 260 may be provided with a nozzle 290.

[0065] The heat-sinking member, the electrode portion, the breathable member, and the nozzle 290 in the second embodiment are similar to those shown in FIG. 1 or those described with reference to FIG. 1. Therefore, a description about those elements will be omitted.

[0066] Although described in detail below, a storage space 215 is provided between the first sheet 210 and the second sheet 260, and a sample is to be put in the storage space 215.

[0067] As illustrated in FIGS. 6 and 7, the first sheet 210 and the second sheet 260 of the unit module may have a rectangular shape. Shorter sides of the first sheet 210 and the second sheet 260 are provided with zippers 270 and 280. Accordingly, the first sheet

210 and the second sheet 260 are combined with each other at their shorter sides, thereby defining the storage space 215 therebetween (see FIG. 7).

[0068] The zippers 270 and 280 may be zippers that can ensure sealing and waterproofing of the storage space. Alternatively, although the zippers are described as an example, any means that can combine the first sheet and the second sheet with each other can be used. For example, Velcro tape can be used instead of the zippers.

[0069] Although FIGS. 6 and 7 illustrate an example in which the zippers 270 and 280 are provided only to the shorter sides of the first sheet 210 and the second sheet 260, additional zippers also may be provided to longer sides of the first sheet 210 and second sheet 260 as shown in FIG. 8.

[0070] FIG. 8 illustrates a structure in which a plurality of unit modules shown in FIGS.

and 7 are assembled with each other. In FIG. 8, an upper assembly is a first sheet group consisting of a plurality of first sheets 210 and a lower assembly is a second sheet group consisting of a plurality of second sheets 260.

[0071] The unit module may include the first sheet 210 and the second sheet 260 arranged to face each other and is provided with zippers at each side thereof.

[0072] In addition, as illustrated in FIG. 8, the unit modules may be arranged side by side and assembled with each other. For example, when two unit modules (respectively referred to as a first unit module and a second unit module for convenience of description) are assembled with each other, one longer side of the first sheet 210 of a first unit module of the two unit modules is combined with one longer side of the first sheet 210 of a second unit module of the two unit modules by a zipper. Similarly, one longer side of the second sheet 260 of the first unit module is combined with one longer side of the second sheet 260 of the second unit module by a zipper. It is possible to verify this combined structure from FIG. 8. Alternatively, one shorter side the first sheet 210 of the first unit module may be combined with one shorter side of the second sheet 260 of the second unit module, and one shorter side of the first sheet 210 of the first unit module may be combined with one shorter side of the second sheet 260 of the second unit module (see FIG. 7). In addition, as to the outermost unit module in this embodiment, one longer side of the outermost first sheet 210 and one longer side of the outermost second sheet 260 are combined with each other. In this way, as a plurality of unit modules is assembled with each other, the storage space 215 is defined by the first sheet group 210 and the second sheet group 260. A sample can be put in the storage space 215.

[0073] When the air in the storage space 215 is purged through the nozzle 290 in a state in which a sample is put in the storage space 215, the first sheet 210 and the second sheet 260 contract, and thus the electrode portions of the first and second sheets 210 and

260, which generate plasma, become closer to the sample, thereby maximizing detoxification and sterilization effects.

[0074] According to the second embodiment shown in FIGS. 6 to 8, the storage space 215 is defined by combining a plurality of unit modules provided with a coupling means such as a zipper with each other. Therefore, it is possible to easily generate plasma in a large area.

[0075] FIGS. 9 and 10 are pictures illustrating actual implementation forms of the technical spirit of the invention. It is shown that a flexible electrode portion surrounds a sample while conforming to the contour of the sample and generates plasma with respect to the sample, thereby lowering toxicity in the sample and sterilizing the sample. To help provide a clear understanding of the invention, FIGS. 9 and 10 illustrate a sheetshaped plasma generating apparatus that will be finally finished as a vacuum pack5 shaped plasma generating apparatus.

[0076] Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that the scope of the technical spirit of the invention is not limited to the embodiments described above but various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

WHAT IS CLAIMED IS:

1. A plasma generating apparatus comprising:

a body having a storage space for storing a sample to be treated; and 5 a nozzle provided at one side of the body and configured such that air in the storage space is purged through the nozzle, wherein the body comprises: a skin member; and a flexible electrode portion provided to an inner surface of the skin member and 10 generating plasma with respect to the sample by causing a discharge, and wherein when the air in the storage space is purged through the nozzle, the body contracts and thus the electrode portion becomes closer to the sample.

2. The plasma generating apparatus according to claim 1, wherein the body 15 further comprises a breathable member having air permeability and provided to an inner surface of the electrode portion, and the breathable member comes into contact with the sample when the body contracts.

3. The plasma generating apparatus according to claim 2, wherein when the body 20 contracts, a gap between the electrode portion and the sample is maintained by a thickness of the breathable member.

4. The plasma generating apparatus according to claim 2, wherein the breathable member is coated with a metal oxide catalyst, metal-organic frameworks and adsorptive

25 particles.

5. The plasma generating apparatus according to claim 1, wherein the electrode portion comprises:

a first electrode and a second electrode that are alternately arranged; and 30 an insulating surrounding either or both of the first electrode and the second electrode and spacing the first electrode and the second electrode from each other.

6. The plasma generating apparatus according to claim 5, wherein the first electrode and the second electrode are disposed at different heights with a wave form such that a space is formed between the second electrodes adjacent to each other and a space is formed between the first electrodes adjacent to each other.

7. A plasma generating apparatus comprising:

a plurality of unit modules, each module including a first sheet and a second sheet that are arranged to face each other, the unit modules being assembled with each other to form a first sheet group including the first sheets and a second sheet group

10 including the second sheets, the first sheet group and the second sheet group defining a storage space to store a sample therebetween, wherein each of the first sheet and the second sheet comprises: a skin member; and a flexible electrode portion provided to an inner surface of the skin member and 15 generating plasma with respect to the sample by causing a discharge, wherein any one of the unit modules comprises a nozzle provided to either one of the first sheet and the second sheet such that air in the storage space is purged through the nozzle, and wherein when air in the storage space is purged through the nozzle, the first sheet 20 and the second sheet contract and thus the electrode portions become closer to the sample .

8. The plasma generating apparatus according to claim 7, wherein the first sheet and the second sheet have a rectangular shape,

25 two adjacent unit modules of the plurality of unit modules are assembled with each other in a manner that one longer side of the first sheet of one unit module of the two unit modules is combined with one longer side of the first sheet of the other unit module, one longer side of the second sheet of the one unit module of the two unit modules is combined with one longer side of the second sheet of the other unit module,

30 shorter sides of the first sheet of the one unit module are combined with shorter sides of the second sheet of the one unit module, and shorter sides of the first sheet of the other unit module are combined with shorter sides of the second sheet of the other unit module.

9. The plasma generating apparatus according to claim 8, wherein in an outermost unit module of the plurality of unit modules, opposing longer sides of the first

5 sheet and the second sheet are combined with each other.

Intellectual

Property

Office

Application No: Claims searched: