GB2544614A - Fabrication of annular microfluidic probe heads - Google Patents

Fabrication of annular microfluidic probe heads

Info

Publication number
GB2544614A
GB2544614A GB1616503.7A GB201616503A GB2544614A GB 2544614 A GB2544614 A GB 2544614A GB 201616503 A GB201616503 A GB 201616503A GB 2544614 A GB2544614 A GB 2544614A
Authority
GB
United Kingdom
Prior art keywords
layouts
microfluidic probe
layer
bilayer substrate
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB1616503.7A
Other versions
GB2544614B (en
Inventor
Buerge Marcel
Delamarche Emmanuel
Kaigala Govind
Lovchik Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB2544614A publication Critical patent/GB2544614A/en
Application granted granted Critical
Publication of GB2544614B publication Critical patent/GB2544614B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0244—Drop counters; Drop formers using pins
    • B01L3/0255—Drop counters; Drop formers using pins characterized by the form or material of the pin tip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0803—Disc shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)

Abstract

A method of fabrication of microfluidic probe heads (100) is provided, the method comprising: providing (S16) a set of n microfluidic probe head layouts (14) on a same bilayer substrate (10, 10a) that comprises two layers (11, 12), said layouts being annularly distributed on that bilayer substrate, and wherein each of said layouts comprises: a first layer (110), which corresponds to a portion of one (11) of said two layers (11, 12) of the bilayer substrate; and a second layer (120), which corresponds to a portion of another one (12) of said two layers (11, 12) of the bilayer substrate; and comprises at least one microchannel (123, 124) defined by a groove open on an upper surface (120u) of the second layer (120) and closed by a portion of a lower surface (1101) of the first layer (110); machining (S20) a hole (16) substantially at the center of the bilayer substrate (10), to create a cylinder wall (18) that delimits said hole and intercepts each of the at least one microchannel of the layouts (14), such that said at least one microchannel (123, 124) of each of said layouts extends up to at least one respective aperture (121, 122) formed at an end of the groove at the level of said cylinder wall (18); and, finally, singulating (S30) each of the n layouts to obtain n microfluidic probe heads (100). MFP heads accordingly obtained are further provided.
GB1616503.7A 2014-03-07 2015-02-13 Fabrication of annular microfluidic probe heads Active GB2544614B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1404041.4A GB2523825A (en) 2014-03-07 2014-03-07 Fabrication of annular microfluidic probe heads
PCT/IB2015/051075 WO2015132686A1 (en) 2014-03-07 2015-02-13 Fabrication of annular microfluidic probe heads

Publications (2)

Publication Number Publication Date
GB2544614A true GB2544614A (en) 2017-05-24
GB2544614B GB2544614B (en) 2018-09-12

Family

ID=50554683

Family Applications (2)

Application Number Title Priority Date Filing Date
GB1404041.4A Withdrawn GB2523825A (en) 2014-03-07 2014-03-07 Fabrication of annular microfluidic probe heads
GB1616503.7A Active GB2544614B (en) 2014-03-07 2015-02-13 Fabrication of annular microfluidic probe heads

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB1404041.4A Withdrawn GB2523825A (en) 2014-03-07 2014-03-07 Fabrication of annular microfluidic probe heads

Country Status (5)

Country Link
JP (1) JP6482569B2 (en)
CN (1) CN106061599B (en)
DE (1) DE112015000711B4 (en)
GB (2) GB2523825A (en)
WO (1) WO2015132686A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10434510B2 (en) 2017-05-06 2019-10-08 International Business Machines Corporation Microfluidic probe with bypass and control channels
WO2020069609A1 (en) 2018-10-01 2020-04-09 Gervais Thomas System and method of fluid delivery
US11458467B2 (en) 2019-08-06 2022-10-04 Bio-Rad Laboratories Inc. Structures to define flow confinement shape and confinement stability with uniform aspiration
US11130125B2 (en) 2019-08-06 2021-09-28 Bio-Rad Laboratories, Inc. Prevention and bubble removal from microfluidic devices
WO2022165536A1 (en) * 2021-02-01 2022-08-04 Bio-Rad Laboratories, Inc. Microfluidic probes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050095602A1 (en) * 2003-11-04 2005-05-05 West Jason A. Microfluidic integrated microarrays for biological detection
US20060063160A1 (en) * 2004-09-22 2006-03-23 West Jay A Microfluidic microarray systems and methods thereof
US20100298163A1 (en) * 2008-01-04 2010-11-25 The Royal Institution For The Advancement Of Learning/Mcgill University Microfluidic microarray system and method for the multiplexed analysis of biomolecules
CN102421517A (en) * 2009-05-07 2012-04-18 国际商业机器公司 Multilayer microfluidic probe head and method of fabrication thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005115630A2 (en) 2004-04-30 2005-12-08 Bioforce Nanosciences, Inc. Method and apparatus for depositing material onto a surface
US20050247673A1 (en) 2004-05-07 2005-11-10 International Business Machines Corporation Confinement of fluids on surfaces
JP2008506114A (en) * 2004-07-06 2008-02-28 ユニバーシティー オブ ユタ リサーチ ファンデーション Spotting apparatus and method for depositing high concentration spots on microarrays and other microscale devices
CA2641271A1 (en) 2006-02-03 2008-03-13 Microchip Biotechnologies, Inc. Microfluidic devices
JP2008238097A (en) 2007-03-28 2008-10-09 Tosoh Corp Minute flow passage assembly apparatus for producing droplet
EP1990626A1 (en) 2007-05-11 2008-11-12 CSEM Centre Suisse d'Electronique et de Microtechnique SA Probe arrangement for electrophysiological analysis in an AFM
TWI532530B (en) * 2010-10-29 2016-05-11 萬國商業機器公司 Multilayer microfluidic probe head with immersion channels and fabrication thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050095602A1 (en) * 2003-11-04 2005-05-05 West Jason A. Microfluidic integrated microarrays for biological detection
US20060063160A1 (en) * 2004-09-22 2006-03-23 West Jay A Microfluidic microarray systems and methods thereof
US20100298163A1 (en) * 2008-01-04 2010-11-25 The Royal Institution For The Advancement Of Learning/Mcgill University Microfluidic microarray system and method for the multiplexed analysis of biomolecules
CN102421517A (en) * 2009-05-07 2012-04-18 国际商业机器公司 Multilayer microfluidic probe head and method of fabrication thereof

Also Published As

Publication number Publication date
JP6482569B2 (en) 2019-03-13
JP2017516666A (en) 2017-06-22
DE112015000711T5 (en) 2016-11-03
CN106061599B (en) 2017-09-12
GB201404041D0 (en) 2014-04-23
CN106061599A (en) 2016-10-26
WO2015132686A1 (en) 2015-09-11
GB2544614B (en) 2018-09-12
GB2523825A (en) 2015-09-09
DE112015000711B4 (en) 2023-07-20

Similar Documents

Publication Publication Date Title
GB2544614A (en) Fabrication of annular microfluidic probe heads
GB2530193A (en) Non-lithographically patterned directed self assembly alignment promotion layers
TW201614834A (en) Semiconductor structures with coplanar recessed gate layers and fabrication methods
USD906725S1 (en) Carpet with surface pattern
WO2016118210A3 (en) Interconnect structures for assembly of multi-layer semiconductor devices
TW201614768A (en) Method of forming an interconnect structure for a semiconductor device
MY177495A (en) Wafer thinning method
CL2014001348A1 (en) Wear element for work equipment on floors, where an external surface that makes contact with earth material, an internal surface that faces and makes contact with a base in the equipment to secure the wear element to the equipment, and a hole that is extends from the outer surface to the inner surface; a lock, a set of wear.
WO2018062828A3 (en) Bonded structure of different materials and method for manufacturing same
GB2565671A (en) Vertical microfluidic probe head with large scale surface processing apertures
WO2015050998A3 (en) Sieve valves, microfluidic circuits, microfluidic devices, kits, and methods for isolating an analyte
TW201612958A (en) Method for fabricating semiconductor layers including transistor channels having different strain states, and related semiconductor layers
EP3537478A4 (en) Organic light-emitting diode display panel, fabrication method therefor and mask
MX2019008557A (en) Method of forming a security document.
EP3652795A4 (en) Method for forming an sei layer on an anode
EP3635787A4 (en) Light-emitting diode, array substrate, and method of making the same
EP3488329A4 (en) Touch substrate, mask plate for fabricating the same, and fabricating method thereof
MX2016015711A (en) Highly decorated tube, especially highly decorated laminate tube.
TW201614230A (en) Biochemical test chip and method for manufacturing the same
WO2016060455A3 (en) Method for manufacturing thin film transistor, and thin film transistor
EP4242415A3 (en) Compound angle bearing assembly
SG11201901227PA (en) Component for fabricating sic semiconductor, having plurality of layers having different transmittances, and method for manufacturing the same
EP3308395A4 (en) Display substrate having an organic layer and fabricating method thereof
ITMI20130954A1 (en) STRUCTURAL ELEMENTER WITH THROUGH CONTACT AND PROCEDURE FOR THE RELATED PRODUCTION
EP3316035A3 (en) Imprint mold and manufacturing method of the same

Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 20181017