GB2501735B - Method and apparatus for warming up a vacuum pump arrangement - Google Patents
Method and apparatus for warming up a vacuum pump arrangementInfo
- Publication number
- GB2501735B GB2501735B GB1207721.0A GB201207721A GB2501735B GB 2501735 B GB2501735 B GB 2501735B GB 201207721 A GB201207721 A GB 201207721A GB 2501735 B GB2501735 B GB 2501735B
- Authority
- GB
- United Kingdom
- Prior art keywords
- warming
- vacuum pump
- pump arrangement
- arrangement
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title 1
- 238000010792 warming Methods 0.000 title 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B23/00—Pumping installations or systems
- F04B23/04—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
- F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0261—Surge control by varying driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/08—Cylinder or housing parameters
- F04B2201/0801—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/70—Safety, emergency conditions or requirements
- F04C2270/701—Cold start
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2260/00—Function
- F05D2260/85—Starting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1207721.0A GB2501735B (en) | 2012-05-02 | 2012-05-02 | Method and apparatus for warming up a vacuum pump arrangement |
EP13719145.8A EP2844879A2 (en) | 2012-05-02 | 2013-04-24 | Method and apparatus for warming up a vacuum pump arrangement |
KR20147030575A KR20150005945A (en) | 2012-05-02 | 2013-04-24 | Method and apparatus for warming up a vacuum pump arrangement |
CN201380022974.3A CN104246230B (en) | 2012-05-02 | 2013-04-24 | For the method and apparatus preheating vacuum pump apparatus |
PCT/GB2013/051033 WO2013164571A2 (en) | 2012-05-02 | 2013-04-24 | Method and apparatus for warming up a vacuum pump arrangement |
JP2015509479A JP6208219B2 (en) | 2012-05-02 | 2013-04-24 | Method and device for warming up a vacuum pump device |
US14/398,119 US20150086387A1 (en) | 2012-05-02 | 2013-04-24 | Method and apparatus for warming up a vacuum pump arrangement |
TW102115762A TWI640687B (en) | 2012-05-02 | 2013-05-02 | Method and apparatus for warming up a vacuum pump arrangement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1207721.0A GB2501735B (en) | 2012-05-02 | 2012-05-02 | Method and apparatus for warming up a vacuum pump arrangement |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201207721D0 GB201207721D0 (en) | 2012-06-13 |
GB2501735A GB2501735A (en) | 2013-11-06 |
GB2501735B true GB2501735B (en) | 2015-07-22 |
Family
ID=46330713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1207721.0A Expired - Fee Related GB2501735B (en) | 2012-05-02 | 2012-05-02 | Method and apparatus for warming up a vacuum pump arrangement |
Country Status (8)
Country | Link |
---|---|
US (1) | US20150086387A1 (en) |
EP (1) | EP2844879A2 (en) |
JP (1) | JP6208219B2 (en) |
KR (1) | KR20150005945A (en) |
CN (1) | CN104246230B (en) |
GB (1) | GB2501735B (en) |
TW (1) | TWI640687B (en) |
WO (1) | WO2013164571A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111734615A (en) * | 2020-06-28 | 2020-10-02 | 安图实验仪器(郑州)有限公司 | Control system and control method for rear-stage pump of vacuum system |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10808702B2 (en) | 2015-01-15 | 2020-10-20 | Atlas Copco Airpower, Naamloze Vennootschap | Method for controlling a gas supply to a vacuum pump |
US10094381B2 (en) | 2015-06-05 | 2018-10-09 | Agilent Technologies, Inc. | Vacuum pump system with light gas pumping and leak detection apparatus comprising the same |
JP2017031892A (en) * | 2015-08-03 | 2017-02-09 | アルバック機工株式会社 | Vacuum evacuation device and its operation method |
CN106762540A (en) * | 2015-11-24 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of energy-saving type vacuum pump nitrogen purging device |
CN105422454B (en) * | 2015-12-09 | 2017-12-19 | 攀枝花钢城集团瑞钢工业有限公司 | Vacuum-pumping system and vacuum suction method |
DE102016005216A1 (en) * | 2016-04-28 | 2017-11-02 | Linde Aktiengesellschaft | Fluid energy machine |
DE202016007609U1 (en) * | 2016-12-15 | 2018-03-26 | Leybold Gmbh | Vacuum pumping system |
DE102017107601B4 (en) * | 2017-04-10 | 2019-11-07 | Gardner Denver Deutschland Gmbh | Method for controlling a screw compressor |
GB2569314A (en) * | 2017-12-12 | 2019-06-19 | Edwards Ltd | A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber |
GB2583942A (en) * | 2019-05-14 | 2020-11-18 | Edwards Ltd | Heater control unit |
JP7502217B2 (en) * | 2021-02-26 | 2024-06-18 | 株式会社荏原製作所 | Vacuum evacuation method and vacuum evacuation system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004001230A1 (en) * | 2002-06-20 | 2003-12-31 | The Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
EP1906023A1 (en) * | 2006-09-29 | 2008-04-02 | Anest Iwata Corporation | Evacuation apparatus |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4699570A (en) * | 1986-03-07 | 1987-10-13 | Itt Industries, Inc | Vacuum pump system |
US4850806A (en) * | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
US6673323B1 (en) * | 2000-03-24 | 2004-01-06 | Applied Materials, Inc. | Treatment of hazardous gases in effluent |
JP4335469B2 (en) * | 2001-03-22 | 2009-09-30 | 株式会社荏原製作所 | Method and apparatus for adjusting gas circulation rate of vacuum exhaust device |
JP2004324644A (en) * | 2003-04-10 | 2004-11-18 | Ebara Corp | Dry vacuum pump and its starting method |
JP4218756B2 (en) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
JP4364670B2 (en) * | 2004-02-24 | 2009-11-18 | 株式会社日立国際電気 | ALD equipment |
US7695231B2 (en) * | 2004-03-08 | 2010-04-13 | Jusung Engineering Co., Ltd. | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same |
GB0502149D0 (en) * | 2005-02-02 | 2005-03-09 | Boc Group Inc | Method of operating a pumping system |
JP2006342688A (en) * | 2005-06-07 | 2006-12-21 | Ebara Corp | Evacuation system |
GB0513867D0 (en) * | 2005-07-06 | 2005-08-10 | Boc Group Plc | Method of treating an exhaust gas |
JP4825608B2 (en) * | 2005-08-12 | 2011-11-30 | 株式会社荏原製作所 | Vacuum exhaust apparatus and vacuum exhaust method, substrate processing apparatus, and substrate processing method |
GB0520468D0 (en) * | 2005-10-07 | 2005-11-16 | Boc Group Plc | Fluorine abatement |
GB0521944D0 (en) * | 2005-10-27 | 2005-12-07 | Boc Group Plc | Method of treating gas |
CN101375063B (en) * | 2006-01-31 | 2011-04-27 | 株式会社荏原制作所 | Vacuum pump unit |
JP4702236B2 (en) * | 2006-09-12 | 2011-06-15 | 株式会社豊田自動織機 | Vacuum pump shutdown control method and shutdown control apparatus |
KR100885919B1 (en) * | 2007-05-21 | 2009-02-26 | 삼성전자주식회사 | Pump fault prediction device and punp fault prediction method |
-
2012
- 2012-05-02 GB GB1207721.0A patent/GB2501735B/en not_active Expired - Fee Related
-
2013
- 2013-04-24 WO PCT/GB2013/051033 patent/WO2013164571A2/en active Application Filing
- 2013-04-24 CN CN201380022974.3A patent/CN104246230B/en not_active Expired - Fee Related
- 2013-04-24 KR KR20147030575A patent/KR20150005945A/en not_active Application Discontinuation
- 2013-04-24 JP JP2015509479A patent/JP6208219B2/en not_active Expired - Fee Related
- 2013-04-24 EP EP13719145.8A patent/EP2844879A2/en not_active Withdrawn
- 2013-04-24 US US14/398,119 patent/US20150086387A1/en not_active Abandoned
- 2013-05-02 TW TW102115762A patent/TWI640687B/en not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004001230A1 (en) * | 2002-06-20 | 2003-12-31 | The Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
EP1906023A1 (en) * | 2006-09-29 | 2008-04-02 | Anest Iwata Corporation | Evacuation apparatus |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111734615A (en) * | 2020-06-28 | 2020-10-02 | 安图实验仪器(郑州)有限公司 | Control system and control method for rear-stage pump of vacuum system |
CN111734615B (en) * | 2020-06-28 | 2022-03-18 | 安图实验仪器(郑州)有限公司 | Control system and control method for rear-stage pump of vacuum system |
Also Published As
Publication number | Publication date |
---|---|
KR20150005945A (en) | 2015-01-15 |
CN104246230B (en) | 2016-10-26 |
EP2844879A2 (en) | 2015-03-11 |
WO2013164571A3 (en) | 2013-12-27 |
GB2501735A (en) | 2013-11-06 |
JP6208219B2 (en) | 2017-10-04 |
TWI640687B (en) | 2018-11-11 |
TW201407037A (en) | 2014-02-16 |
GB201207721D0 (en) | 2012-06-13 |
US20150086387A1 (en) | 2015-03-26 |
JP2015516044A (en) | 2015-06-04 |
WO2013164571A2 (en) | 2013-11-07 |
CN104246230A (en) | 2014-12-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20190502 |