GB2497664B - Substrates for semiconductor devices - Google Patents

Substrates for semiconductor devices

Info

Publication number
GB2497664B
GB2497664B GB201222329A GB201222329A GB2497664B GB 2497664 B GB2497664 B GB 2497664B GB 201222329 A GB201222329 A GB 201222329A GB 201222329 A GB201222329 A GB 201222329A GB 2497664 B GB2497664 B GB 2497664B
Authority
GB
United Kingdom
Prior art keywords
substrates
semiconductor devices
semiconductor
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB201222329A
Other versions
GB201222329D0 (en
GB2497664A (en
Inventor
Timothy Peter Mollart
Quanzhong Jiang
Christopher Rhys Bowen
Duncan William Edward Allsopp
Michael John Edwards
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Element Six Ltd
Original Assignee
Element Six Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Element Six Ltd filed Critical Element Six Ltd
Publication of GB201222329D0 publication Critical patent/GB201222329D0/en
Publication of GB2497664A publication Critical patent/GB2497664A/en
Application granted granted Critical
Publication of GB2497664B publication Critical patent/GB2497664B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002Preparing wafers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/04Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
    • H01L29/045Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
GB201222329A 2011-12-16 2012-12-12 Substrates for semiconductor devices Expired - Fee Related GB2497664B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161576826P 2011-12-16 2011-12-16
GB201121659A GB201121659D0 (en) 2011-12-16 2011-12-16 Substrates for semiconductor devices

Publications (3)

Publication Number Publication Date
GB201222329D0 GB201222329D0 (en) 2013-01-23
GB2497664A GB2497664A (en) 2013-06-19
GB2497664B true GB2497664B (en) 2015-02-11

Family

ID=45560565

Family Applications (2)

Application Number Title Priority Date Filing Date
GB201121659A Ceased GB201121659D0 (en) 2011-12-16 2011-12-16 Substrates for semiconductor devices
GB201222329A Expired - Fee Related GB2497664B (en) 2011-12-16 2012-12-12 Substrates for semiconductor devices

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB201121659A Ceased GB201121659D0 (en) 2011-12-16 2011-12-16 Substrates for semiconductor devices

Country Status (2)

Country Link
GB (2) GB201121659D0 (en)
WO (1) WO2013087707A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6300662B2 (en) 2014-06-20 2018-03-28 オリンパス株式会社 Semiconductor device and manufacturing method of semiconductor device
US10692752B2 (en) 2017-06-20 2020-06-23 Elta Systems Ltd. Gallium nitride semiconductor structure and process for fabricating thereof
IL253085B (en) 2017-06-20 2021-06-30 Elta Systems Ltd Gallium nitride semiconductor structure and process for fabricating thereof
JP7480699B2 (en) * 2020-12-24 2024-05-10 株式会社Sumco Multilayer substrate using freestanding polycrystalline diamond substrate and its manufacturing method
CN112967923B (en) * 2021-02-05 2022-06-10 中国电子科技集团公司第十三研究所 Method for preparing terahertz diode with diamond substrate on large-size wafer
CN117646275A (en) * 2024-01-30 2024-03-05 北京大学 Preparation method of large-size high-thermal-conductivity III-nitride epitaxial material

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7695564B1 (en) * 2005-02-03 2010-04-13 Hrl Laboratories, Llc Thermal management substrate
US7749863B1 (en) * 2005-05-12 2010-07-06 Hrl Laboratories, Llc Thermal management substrates

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5131963A (en) * 1987-11-16 1992-07-21 Crystallume Silicon on insulator semiconductor composition containing thin synthetic diamone films
US4981818A (en) 1990-02-13 1991-01-01 General Electric Company Polycrystalline CVD diamond substrate for single crystal epitaxial growth of semiconductors
US5376579A (en) * 1993-07-02 1994-12-27 The United States Of America As Represented By The Secretary Of The Air Force Schemes to form silicon-on-diamond structure
US6509124B1 (en) * 1999-11-10 2003-01-21 Shin-Etsu Chemical Co., Ltd. Method of producing diamond film for lithography
US7132309B2 (en) 2003-04-22 2006-11-07 Chien-Min Sung Semiconductor-on-diamond devices and methods of forming
US7033912B2 (en) 2004-01-22 2006-04-25 Cree, Inc. Silicon carbide on diamond substrates and related devices and methods
US20060113545A1 (en) 2004-10-14 2006-06-01 Weber Eicke R Wide bandgap semiconductor layers on SOD structures
GB0505752D0 (en) 2005-03-21 2005-04-27 Element Six Ltd Diamond based substrate for gan devices
WO2006113539A2 (en) 2005-04-13 2006-10-26 Group4 Labs, Llc Semiconductor devices having gallium nitride epilayers on diamond substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7695564B1 (en) * 2005-02-03 2010-04-13 Hrl Laboratories, Llc Thermal management substrate
US7749863B1 (en) * 2005-05-12 2010-07-06 Hrl Laboratories, Llc Thermal management substrates

Also Published As

Publication number Publication date
GB201222329D0 (en) 2013-01-23
GB2497664A (en) 2013-06-19
WO2013087707A1 (en) 2013-06-20
GB201121659D0 (en) 2012-01-25

Similar Documents

Publication Publication Date Title
TWI563655B (en) Electrode configurations for semiconductor devices
TWI562156B (en) Semiconductor device
TWI560842B (en) Semiconductor device
EP2742526A4 (en) Wafer carrier
SG11201504823YA (en) Semiconductor device
SG10201510100UA (en) Semiconductor device
EP2717300A4 (en) Semiconductor device
SG11201505099TA (en) Semiconductor device
SG11201505088UA (en) Semiconductor device
GB2510468B (en) Substrates for semiconductor devices
TWI562360B (en) Semiconductor device
EP2763160A4 (en) Semiconductor device
EP2779225A4 (en) Semiconductor device
EP2725623A4 (en) Semiconductor device
EP2752875A4 (en) Semiconductor device
EP2720263A4 (en) Semiconductor device
EP2632237A4 (en) Wiring substrate
SG11201504615UA (en) Semiconductor device
GB201118868D0 (en) Semiconductor compounds
EP2672516A4 (en) Semiconductor device
TWI562143B (en) Semiconductor device
EP2698426A4 (en) Cell-adhering light-controllable substrate
GB2505594B (en) Microelectronic substrate for alternate package functionality
EP2793260A4 (en) Semiconductor device
EP2765600A4 (en) Semiconductor device

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20161212