GB2491151B - Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface - Google Patents

Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface

Info

Publication number
GB2491151B
GB2491151B GB1108755.8A GB201108755A GB2491151B GB 2491151 B GB2491151 B GB 2491151B GB 201108755 A GB201108755 A GB 201108755A GB 2491151 B GB2491151 B GB 2491151B
Authority
GB
United Kingdom
Prior art keywords
deposited
inferring
predicting
apparatuses
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1108755.8A
Other versions
GB201108755D0 (en
GB2491151A (en
Inventor
Jones Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qioptiq Ltd
Original Assignee
Qioptiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qioptiq Ltd filed Critical Qioptiq Ltd
Priority to GB1108755.8A priority Critical patent/GB2491151B/en
Publication of GB201108755D0 publication Critical patent/GB201108755D0/en
Priority to PCT/GB2012/000412 priority patent/WO2012160321A1/en
Publication of GB2491151A publication Critical patent/GB2491151A/en
Application granted granted Critical
Publication of GB2491151B publication Critical patent/GB2491151B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D33/00—Special measures in connection with working metal foils, e.g. gold foils
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
GB1108755.8A 2011-05-24 2011-05-24 Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface Active GB2491151B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB1108755.8A GB2491151B (en) 2011-05-24 2011-05-24 Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface
PCT/GB2012/000412 WO2012160321A1 (en) 2011-05-24 2012-05-04 Methods and apparatuses for measuring the thickness distribution of a deposited layer of coating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1108755.8A GB2491151B (en) 2011-05-24 2011-05-24 Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface

Publications (3)

Publication Number Publication Date
GB201108755D0 GB201108755D0 (en) 2011-07-06
GB2491151A GB2491151A (en) 2012-11-28
GB2491151B true GB2491151B (en) 2017-11-15

Family

ID=44279568

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1108755.8A Active GB2491151B (en) 2011-05-24 2011-05-24 Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface

Country Status (2)

Country Link
GB (1) GB2491151B (en)
WO (1) WO2012160321A1 (en)

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084525A (en) * 1973-12-04 1975-07-08
JPS57190735A (en) * 1981-05-20 1982-11-24 San Alum Kogyo Kk Forming method for blade-shaped material formed by bending hard aluminum foil
US5991018A (en) * 1995-06-14 1999-11-23 Kirin Beer Kabushiki Kaisha Apparatus and method for inspecting coating layer
EP1326097A2 (en) * 2001-12-28 2003-07-09 Hoya Corporation Process for forming a thin film and apparatus therefor
JP2004009105A (en) * 2002-06-07 2004-01-15 Canon Inc Method and apparatus for forming curved plate shape reflecting optical element
US20050263706A1 (en) * 2004-05-25 2005-12-01 Hyundai Heavy Industries Co., Ltd. Method of measuring thickness of thin film using infrared thermal imaging system
JP2008215957A (en) * 2007-03-01 2008-09-18 Toyota Motor Corp Film thickness measuring apparatus, surface temperature measuring apparatus, film thickness measuring method and surface temperature measuring method
JP2010018851A (en) * 2008-07-10 2010-01-28 Panasonic Corp Film deposition apparatus
JP2010207935A (en) * 2009-03-09 2010-09-24 Seiko Epson Corp Wafer machining method and numerical control blasting device
US20100316420A1 (en) * 2009-06-16 2010-12-16 Konica Minolta Business Technologies, Inc. Image-supporting member and image-forming apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3752691A (en) * 1971-06-29 1973-08-14 Xerox Corp Method of vacuum evaporation
BE792316A (en) * 1971-12-07 1973-06-05 Philips Nv PROCESS FOR MAKING MIRRORS FOR COLD LIGHT
WO2001040538A1 (en) * 1999-12-03 2001-06-07 The Regents Of The University Of California Method and system relating to thickness control of film vapor deposition

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084525A (en) * 1973-12-04 1975-07-08
JPS57190735A (en) * 1981-05-20 1982-11-24 San Alum Kogyo Kk Forming method for blade-shaped material formed by bending hard aluminum foil
US5991018A (en) * 1995-06-14 1999-11-23 Kirin Beer Kabushiki Kaisha Apparatus and method for inspecting coating layer
EP1326097A2 (en) * 2001-12-28 2003-07-09 Hoya Corporation Process for forming a thin film and apparatus therefor
JP2004009105A (en) * 2002-06-07 2004-01-15 Canon Inc Method and apparatus for forming curved plate shape reflecting optical element
US20050263706A1 (en) * 2004-05-25 2005-12-01 Hyundai Heavy Industries Co., Ltd. Method of measuring thickness of thin film using infrared thermal imaging system
JP2008215957A (en) * 2007-03-01 2008-09-18 Toyota Motor Corp Film thickness measuring apparatus, surface temperature measuring apparatus, film thickness measuring method and surface temperature measuring method
JP2010018851A (en) * 2008-07-10 2010-01-28 Panasonic Corp Film deposition apparatus
JP2010207935A (en) * 2009-03-09 2010-09-24 Seiko Epson Corp Wafer machining method and numerical control blasting device
US20100316420A1 (en) * 2009-06-16 2010-12-16 Konica Minolta Business Technologies, Inc. Image-supporting member and image-forming apparatus

Also Published As

Publication number Publication date
WO2012160321A1 (en) 2012-11-29
GB201108755D0 (en) 2011-07-06
GB2491151A (en) 2012-11-28

Similar Documents

Publication Publication Date Title
TWI563119B (en) Apparatus and method for depositing a layer onto a substrate
SG11201405417YA (en) Atomic layer deposition method and apparatuses
EP2714821A4 (en) Surface coating system and method of making and using same
PL2616191T3 (en) Method for coating surfaces and use of the articles coated using said method
EP2692822A4 (en) Eco-friendly road surface coating material for thawing ice and snow and methods of preparing and using the same
SG11201403231TA (en) Device and method for the coating of a surface area of a gap in the coating of a pipeline
EP2714820A4 (en) Surface coating system and method of using surface coating system
EP2711177A4 (en) Coating layer and method for forming coating layer
PL2577226T3 (en) Process and device for continuously measuring the thickness of a coating layer on a running strip.
FR2973806B1 (en) PARTICLE OF PHASE CHANGE MATERIAL WITH COATING LAYER
PL2561117T3 (en) Process for coating a surface of a substrate made of nonmetallic material with a metal layer
SG11201401923UA (en) Method of forming densified layer in thermal spray coating, and thermal spray coating covering member
IL225688A0 (en) Apparatus and method for atomic layer deposition on a surface
EP2707344A4 (en) Method for selectively metallizing surface of ceramic substrate, ceramic product and use of ceramic product
GB2462890B (en) Apparatus and a method for deposition of material to form a coating
IL209811A0 (en) Hard coating layer and method for forming the same
EP2762541A4 (en) Coating composition and coated article
HK1204344A1 (en) Apparatus and process for depositing a thin layer of resist on a substrate
HK1184806A1 (en) Coating material, coating material layer, and laminated structure
EP2704856A4 (en) Methods and systems for nanoparticle-only layer by layer surface modification of substrate membrane
EP2735361A4 (en) Hydrogen-separation-membrane protection layer and a coating method therefor
EP2643098A4 (en) Use of a transport coating to apply a thin coated layer
EP2657015A4 (en) Surface layer material and melamine decorative laminate
EP2736961A4 (en) Coating composition, method for coating surface of material using the same, and surface treated materials having the same
PL392364A3 (en) Method for depositing metal nanoparticles on a surface and the surface obtained using this method and the use thereof