GB2453966B - Method of measuring surface emissivity - Google Patents

Method of measuring surface emissivity

Info

Publication number
GB2453966B
GB2453966B GB0720796A GB0720796A GB2453966B GB 2453966 B GB2453966 B GB 2453966B GB 0720796 A GB0720796 A GB 0720796A GB 0720796 A GB0720796 A GB 0720796A GB 2453966 B GB2453966 B GB 2453966B
Authority
GB
United Kingdom
Prior art keywords
measuring surface
surface emissivity
emissivity
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0720796A
Other versions
GB0720796D0 (en
GB2453966A (en
Inventor
Christopher Hunter Oxley
Gwynne Arthur Evans
Richard Henry Hopper
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Montfort University
Original Assignee
De Montfort University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Montfort University filed Critical De Montfort University
Priority to GB0720796A priority Critical patent/GB2453966B/en
Publication of GB0720796D0 publication Critical patent/GB0720796D0/en
Publication of GB2453966A publication Critical patent/GB2453966A/en
Application granted granted Critical
Publication of GB2453966B publication Critical patent/GB2453966B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/48—Thermography; Techniques using wholly visual means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB0720796A 2007-10-23 2007-10-23 Method of measuring surface emissivity Expired - Fee Related GB2453966B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0720796A GB2453966B (en) 2007-10-23 2007-10-23 Method of measuring surface emissivity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0720796A GB2453966B (en) 2007-10-23 2007-10-23 Method of measuring surface emissivity

Publications (3)

Publication Number Publication Date
GB0720796D0 GB0720796D0 (en) 2007-12-05
GB2453966A GB2453966A (en) 2009-04-29
GB2453966B true GB2453966B (en) 2011-12-07

Family

ID=38829807

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0720796A Expired - Fee Related GB2453966B (en) 2007-10-23 2007-10-23 Method of measuring surface emissivity

Country Status (1)

Country Link
GB (1) GB2453966B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106679818B (en) * 2016-12-31 2023-10-24 宁波大学 Device and method for measuring temperature distribution of smooth surface
CN114353968B (en) * 2020-09-30 2023-10-20 北京振兴计量测试研究所 On-site calibration method and calibration system for temperature measurement in narrow space
CN112964364B (en) * 2021-02-04 2021-09-03 中国人民解放军91977部队 Portable calibration device and calibration method for thermal infrared imager

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990012295A1 (en) * 1989-04-05 1990-10-18 Plessey Overseas Limited Temperature-controlled bodies
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
WO1999028715A1 (en) * 1997-12-01 1999-06-10 On-Line Technologies, Inc. Thermal imaging for semiconductor process monitoring
US20060190211A1 (en) * 2001-07-23 2006-08-24 Schietinger Charles W In-situ wafer parameter measurement method employing a hot susceptor as radiation source for reflectance measurement

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990012295A1 (en) * 1989-04-05 1990-10-18 Plessey Overseas Limited Temperature-controlled bodies
US5823681A (en) * 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
WO1999028715A1 (en) * 1997-12-01 1999-06-10 On-Line Technologies, Inc. Thermal imaging for semiconductor process monitoring
US20060190211A1 (en) * 2001-07-23 2006-08-24 Schietinger Charles W In-situ wafer parameter measurement method employing a hot susceptor as radiation source for reflectance measurement

Also Published As

Publication number Publication date
GB0720796D0 (en) 2007-12-05
GB2453966A (en) 2009-04-29

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20201023