GB2451908A - MEMS microphone package - Google Patents

MEMS microphone package Download PDF

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Publication number
GB2451908A
GB2451908A GB0716187A GB0716187A GB2451908A GB 2451908 A GB2451908 A GB 2451908A GB 0716187 A GB0716187 A GB 0716187A GB 0716187 A GB0716187 A GB 0716187A GB 2451908 A GB2451908 A GB 2451908A
Authority
GB
United Kingdom
Prior art keywords
layers
mems
package
cavity
mems package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0716187A
Other versions
GB0716187D0 (en
GB2451908B (en
Inventor
Anthony Bernard Traynor
Richard Ian Laming
Tsjerk Hans Hoekstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International UK Ltd
Original Assignee
Wolfson Microelectronics PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wolfson Microelectronics PLC filed Critical Wolfson Microelectronics PLC
Priority to GB0716187A priority Critical patent/GB2451908B/en
Publication of GB0716187D0 publication Critical patent/GB0716187D0/en
Priority to GB0807926A priority patent/GB2451921A/en
Priority to PCT/GB2008/002783 priority patent/WO2009024764A2/en
Priority to US12/673,930 priority patent/US20110042762A1/en
Priority to TW097131380A priority patent/TW200920686A/en
Publication of GB2451908A publication Critical patent/GB2451908A/en
Application granted granted Critical
Publication of GB2451908B publication Critical patent/GB2451908B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0077—Other packages not provided for in groups B81B7/0035 - B81B7/0074
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
    • B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/146—Mixed devices
    • H01L2924/1461—MEMS
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007—Types of components
    • H05K2201/10083—Electromechanical or electro-acoustic component, e.g. microphone

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

The MEMS device 56 is mounted in a recess 54 of the multilayered PWB 52 to reduce the thickness of the package for use in mobile telephones, PDAs etc. A cover 76 having an aperture 78 may be provided when a MEMS microphone is mounted on the PWB.

Description

MEMS PACKAGE
Field of the invention
This invention relates to a MEMS device, and in particular to a MEMS package and a method of packaging a MEMS device, and in particular a MEMS capacitive microphone.
Background of the invention
Consumer electronics devices are continually getting smaller and, with advances in technology, are gaining ever-increasing performance and functionality. This is clearly evident in the technology used in consumer electronic products and especially, but not exclusively, portable products such as mobile phones, laptop computers, MP3 players and personal digital assistants (PDAs). Requirements of the mobile phone industry for example, are driving the components of mobile phones to become smaller with higher functionality and reduced cost so that final products have a reduced "form factor, i.e. thinner, shorter, etc. It is therefore desirable to integrate functions of electronic circuits together and combine them with transducer devices such as microphones and speakers.
One result of this is the emergence of micro-electrical-mechanical-systems (MEMS) based transducer devices. These may be for example, capacitive transducers for detecting and/or generating pressure/sound waves or transducers for detecting acceleration. There is a continual drive to reduce the size and cost of these devices.
Microphone devices formed using MEMS fabrication processes typically comprise a membrane with electrodes for read-out/drive deposited on the membrane and a substrate. In the case of MEMS pressure sensors and microphones, the read out is usually accomplished by measuring the capacitance between the electrodes. In the case of transducers, the device is driven by a potential difference provided across the electrodes.
Figure 1 shows a capacitive microphone formed on a substrate 2. A first electrode 4 is mechanically connected to a membrane 6. A second electrode 8 is mechanically connected to a structurally rigid back-plate 14. A back-volume 12 is formed using an etching process from below the substrate, known as a "back-etch. The back-volume 12 allows the membrane 6 freedom to move In response to acoustic signals.
FIgure 2 shows a package 20 for housing a MEMS microphone 22. The MEMS microphone 22 is not shown In any detail here for clarity, but it can be considered to be similar to the device described with respect to Figure 1.
The package 20 comprises a printed circuit board (PCB) 24 on which the microphone 22 Is mounted. The PCB 24 is a laminate structure that comprises multiple isolation and metal layers, for example four metal layers 24a, 24b, 24c, 24d separated by respective isolation layers. Wire bonds 26, 28 are used to connect the microphone to the electric circuitry associated with the PCB 24 vIa electric connectors pads 30, 32. A lid 34 is used to enclose the microphone 22 within the package 20, in order to protect the microphone and circuitry from the environment. However, the lid 34 comprises a small acoustic hole 36 to allow acoustic signals to enter the package 20.
The problem with such designs In the form of a package 20 is that, as aforementioned, there is a continual drive to reduce the size, or height, of packages in order to reduce the size of the device in which they are employed. For example, mobile phones are getting smaller and thinner, and therefore there is a need for a MEMS package that has a reduced size or form factor.
SUMMARY OF INVENTION
According to a first aspect of the present invention, there is provided a MEMS package, the MEMS package comprising a substrate which comprises a recess, and a MEMS device, situated in the recess.
According to a second aspect of the present invention, there is provided a method of manufacturing a MEMS package, the method comprising the steps of forming a cavity within a substrate and placing a MEMS device within the cavity. a
BRIEF DESCRIPTION OF THE DRAWINGS
For a better understanding of the present invention, and to show more clearly how it may be carried into effect, reference will now be made, by way of example, to the following drawings, in which: Figure 1 shows a MEMS capacitive microphone; Figure 2 shows a package for a MEMS microphone; Figure 3 shows a MEMS package according to an embodiment of the present invention; and Figure 4 shows one example of a substrate for use in the present invention.
DETAILED DESCRIPTION
Figure 3 shows a MEMS package 50 according to the present invention.
The package 50 comprises a PCB 52. According to one embodiment, the laminated PCB 52 comprises four metal layers 52a, 52b, 52c, 52d, separated by respective isolation layers. The isolation layers may comprise a dielectric material, such as fibre glass, as will be familiar to those skilled in the art. The PCB 52 further comprises a photo resist layer (not illustrated) above the upper-most metal layer 52a. According to the present invention, the PCB 52 further comprises a cavity 54, or recess. A MEMS transducer 56, such as that described with respect to Figure 1, is positioned within the cavity 54.
In one embodiment, the MEMS transducer 56 comprises a substrate 58 into which a back-volume 60 is formed. Across the top of the back-volume 60, a membrane 62 reacts to the changes in pressure caused by acoustic signals. The membrane 62 comprises an electrode, which is displaced relative to a fixed electrode in the rigid substrate 58 (not shown) when an acoustic signal disturbs the membrane 62. The transducer 56 is fixed in the cavity by adhesive means 80. The adhesive means 80 may comprise solder, glue, epoxy, glass fri or any other suitable means within the knowledge of the person skilled in the art.
Wire bonds 64 connected to the respective electrodes pass signals indicative of the changes in capacitance between the electrodes to electronic circuitry 66. The electronic circuitry 66 is further bonded to connection pads 68, 70 by wire bonds 72, 74.
A lid, or cover, 76 endoses the package and protects the components inside from environmental interference and br damage. In one embodiment, the lid 76 comprises a conductive layer, such that the contents of the package are protected from electromagnetic interference from the environment. In an alternative embodiment, the lid 76 itself may be formed from a conductive material, such that substantially the same effect is achieved. An aperture, i.e. a hole, 78 in the lid 76, that may comprise an environmental barrier (not illustrated) as known to those skilled in the art, allows acoustic signals to pass through to the transducer 56.
Thus, the present invention provides a reduced-height package by placing, i.e. recessing, the MEMS transducer 56 within a recess, or cavity 54.
As shown In Figure 3, according to one embodiment, the cavity 54 extends through two of the four metal layers 52a, 52b, and their respective isolation layers. The third metal layer 52c forms a ground plane. The lower-most metal layer 52d may be used to form contacts 86 with external circuitry (not shown). Further, according to one embodiment, the third metal layer 52c, i.e. the ground plane. is electrically connected to the conducting material in the lid 76 such that the package forms an "RF cage" or "Faraday cage, thereby protecting the package contents from electromagnetic interference.
However, alternative configurations are possible according to the desired depth of the cavity 54 and consequently the desired height, i.e. form factor, of the package 50. For example, the PCB 52 may have greater or fewer than four metal layers, plus their respective isolation layers, and the cavity 54 may be formed through one or more of the plurality of metal and or isolation layers, depending on the reduction in package height that is required. In this instance, any one or more of the plurality of metal layers not forming part of the cavity 54 may be connected to the lid 76 to form the RF cage.
That is, in the general case, the printed circuit board may comprise N metal layers, where N is an integer. The cavity 54 may then be formed through N-M of the N metal layers, where M is a number between N and 0 that represents the number of metal layers through which the cavity 541s not formed.
For example, depending on the form factor (i.e. the height of package) that is required, it may be sufficient for the cavity 54 to be formed through just the solder resist layer.
That is, the photo resist layer may be etched away by either a dry-or a wet-etch, as will be familiar to those skilled in the art. This will typically provide a reduction in form factor of 30 to 40 pm. If further reductions in form factor are required, the first metal layer 52a may be etched to extend the cavity 54 further, providing a further reduction of about 10 to 20 pm. If yet further reductions in form factor are required, the first isolation layer beneath the first metal layer 52a may be mechanically removed such as by milling. This process may be repeated until the form factor has been reduced sufficiently according to the requirements of the package designer.
Figure 4 is a schematic drawing showing the PCB 52 in greater detail.
As aforementioned, in one embodiment, the PCB 52 comprises four metal layers 52a, 52b, 52c, 52d. The thickness of each metal layer is approximately 10 to 20 pm.
Separating the four metal layers are three dielectric isolation layers 84a, 84b, 84c, with each isolation layer being approximately 40 to 80 pm thick. The dielectric isolation layers Ma, 84b, 84c may comprise fibre glass, or any other material familiar to those skIlled In the art. Above the upper-most metal layer 52a is a photo resist layer 82a, which is approximately 30 to 40 pm thick. Alternatively, the photo resist layer 82a may be a solder resist layer. Optionally, there may be a second photo or solder resist layer 82b on the underside of the PCB 52, i.e. below the lower-most metal layer 52d.
In the embodiment shown in Figure 4, the lower-most metal layer 52d is used to form electrical contacts with external circuitry. In the case where the PCB 52 does not comprise a lower photo/solder resist layer, all that is required is a relatively small contact 86a. In the case where the PCB 52 does comprise a lower photo/solder resist layer 82b, a larger contact is required in order to extend the contact beyond the photo/solder resist layer 82b. Thus, in this instance, the contact would comprise both portions 86a and 86b shown in Figure 4.
In the embodiment shown, the cavity 54 is formed through the upper photo resist layer 82a and the uppermost metal layer 52a.
As discussed above, the depth of the recess can be increased by milling through the isolation layer 84a, and increased further by etching through the metal layer 52b, and so forth.
In one embodiment, the task of processing and routing the signals from the MEMS transducer 56 is carried out by the electronic circuitry 66 housed within the package 50.
However, in alternative embodiments the electronic circuitry 66 may be located outside the package 50, i.e. on a separate chip or integrated circuit. In such an embodiment the output of the MEMS transducer 56 is connected directly to a contact 86. In yet further alternative embodiments the electronic circuitry necessary for processing the signals from the MEMS transducer 58 may be incorporated on the MEMS transducer 56 itself, either positioned above, adjacent to, or below the back-plate. The circuitry may be positioned on the floor of the cavity 54, with the MEMS transducer 56 positioned above.
A further alternative involves having part of the circuitry on the MEMS device, e.g. a Low Noise Amplifier, with the remaining circuitry either located within the package 50 or on a separate chip or integrated circuit.
The cavity 54 may be formed by a number of different processes. For example, as aforementioned, the PCB 52 comprises several layers of different materials. In order to remove part of the upper-most layer, the photo resist, or one of the metal layers 52a, 52b, 52c, 52d, the metal may be either wet-or dry-etched as will be familiar to those skilled in the art. In order to remove part of the isolation layers to create the cavity 54, the isolation layers may be milled, as will be familiar to those skilled in the art.
In one embodiment, the PCB 52 may be designed with a redundant area specifically included in each metal layer that is disturbed by the cavity. In this embodiment, the cavity 54 is formed within the redundant area of each metal layer.
The above description has focused on the use of a printed circuit board as the substrate in which the cavity 54 is formed. However, it will be apparent to those skilled in the art that alternative materials may be used that still fall within the scope of the invention. For example, the substrate may comprise a ceramic material in which the cavity is formed.
Further, the above description has focused on a package for a MEMS transducer, or a MEMS microphone. However, any MEMS device is contemplated to be included within the cavity of the package of the present invention.
It is noted that the invention may be used in a number of applications. These include, but are not limited to, consumer applications, medical applications, industrial applications and automotive applications. For example, typical consumer applications include laptops, mobile phones, PDAs and personal computers. Typical medical applications include hearing aids. Typical industrial applications include active noise cancellation. Typical automotive applications Include hands-free sets, acoustic crash sensors and active noise cancellation.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design many alternative embodiments without departing from the scope of the appended claims. The word "comprising" does not exclude the presence of elements or steps other than those listed in a claim, "a" or "an" does not exclude a plurality, and a single processor or other unit may fulfil the functions of several units recited in the claims. Any reference signs in the claims shall not be construed so as to limit their scope.

Claims (32)

1. A MEMS package, comprising: a substrate, comprising a recess; and a MEMS device, situated in the recess.
2. A MEMS package as claimed in claim 1, wherein the MEMS device is a transducer.
3. A MEMS package as claimed in claim I or 2, wherein the substrate comprises a plurality of layers, and wherein the recess is formed through one or more of the plurality of layers.
4. A MEMS package as claimed in any one of claims 1 to 3, wherein the substrate comprises a ceramic substrate.
5. A MEMS package as claimed in any one of claims I to 3, wherein the substrate comprises a printed circuit board.
6. A MEMS package as claimed in any one of claims 3 to 5, wherein the plurality of layers comprises a photo resist or solder resist layer.
7. A MEMS package as claimed in claim 6, wherein the recess is formed through the photo resist or solder resist layer.
8. A MEMS package as claimed in any one of claims 3 to 7, wherein the plurality of layers further comprises N metal layers, and wherein the recess is formed through N-M of the N metal layers.
9. A MEMS package as claimed in claim 8, wherein each metal layer of the N-M metal layers comprises a redundant area, and wherein the recess is formed within the redundant area of each of the N-.M metal layers.
10. A MEMS package as claimed in claim 8 or 9, wherein M2.
S
11. A MEMS package as claimed in any one of claims 5 to 10, wherein the plurality of layers further comprises a plurality of dielectric isolation layers.
12. A MEMS package as claimed in any one of the preceding claims, further comprising a cover enclosing the MEMS device and the recess.
13. A MEMS package as claimed in claim 12, wherein the cover is a conductor.
14. A MEMS package as claimed in claim 12, wherein the cover comprises a conducting layer.
15. A MEMS package as claimed in claim 13 or 14, wherein the substrate comprises a printed circuit board comprising a plurality of metal layers, wherein the recess is formed through one or more of the plurality of metal layers, wherein at least one of the plurality of metal layers through which the recess is not formed is electrically connected to the cover.
16. A MEMS package as claimed in any one of claims 12 to 15, wherein the cover comprises an opening for allowing acoustic signals to enter the package.
17. A MEMS package as claimed in claim 16, wherein the opening comprises an environmental barrier.
18. A method of manufacturing a MEMS package, the method comprising: forming a cavity within a substrate; and placing a MEMS device within the cavity.
19. A method as claimed in claim 18, wherein the MEMS device is a transducer.
20. A method as claimed in claim 18 or 19, wherein the substrate comprises a plurality of layers, and wherein the forming step comprises: forming the cavity through one or more of the plurality of layers.
21. A method as claimed in any one of claims 18 to 20, wherein the substrate comprises a ceramic substrate.
22. A method as claimed in any one of claims 18 to 20, wherein the substrate comprises a printed circuit board.
23. A method as claimed in any one of claims 20 to 22, wherein the plurality of layers comprises a solder resist or photo resist layer, and wherein the forming step comprises etching the solder resist or photo resist layer to create the cavity.
24. A method as claimed in any one of claims 201023, wherein the plurality of layers further comprises N metal layers, and wherein the forming step further comprises the substep of etching N-M metal layers fo the N metal layers to create the cavity.
25. A method as claimed in claim 24, wherein each metal layer of the N-M metal layers comprises a redundant area, and wherein the cavity is formed within the redundant area of each of the N-M metal layers.
26. A method as claimed in claIm 24 or 25, wherein M=2.
27. A method as claimed in any one of claims 20 to 26, wherein the plurality of layers further comprises a plurality of dielectric isolation layers, and wherein the forming step further comprises milling one or more of the plurality of dielectric isolation layers to create the cavity.
28. A method as claimed in any one of claims 18 to 27, further comprising: creating a cover to enclose the MEMS device and the cavity.
29. A method as claimed in claim 28, wherein the substrate comprises a printed circuit board comprising N metal layers, wherein the cavity is formed through N-M of the N metal layers, and wherein the cover comprises a conducting material, the method further comprising: electrically connecting to the conducting material of the cover at least one of the M metal layers through which the cavity is not formed.
30. A method as claimed in claim 28or 29, further comprising the step of providing an opening in the cover for allowing acoustic signals to enter the package.
31. A method as claimed in claim 30, further comprising the step of providing an environmental barrier for the opening.
32. A MEMS package substantially as hereinbefore described with reference to, and as illustrated in, Figures 3 and 4 of the drawings.
GB0716187A 2007-08-17 2007-08-17 Mems package Expired - Fee Related GB2451908B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB0716187A GB2451908B (en) 2007-08-17 2007-08-17 Mems package
GB0807926A GB2451921A (en) 2007-08-17 2008-04-30 MEMS package
PCT/GB2008/002783 WO2009024764A2 (en) 2007-08-17 2008-08-15 Mems package
US12/673,930 US20110042762A1 (en) 2007-08-17 2008-08-15 Mems package
TW097131380A TW200920686A (en) 2007-08-17 2008-08-18 MEMS package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0716187A GB2451908B (en) 2007-08-17 2007-08-17 Mems package

Publications (3)

Publication Number Publication Date
GB0716187D0 GB0716187D0 (en) 2007-09-26
GB2451908A true GB2451908A (en) 2009-02-18
GB2451908B GB2451908B (en) 2009-12-02

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GB0716187A Expired - Fee Related GB2451908B (en) 2007-08-17 2007-08-17 Mems package

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Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6324067B1 (en) * 1995-11-16 2001-11-27 Matsushita Electric Industrial Co., Ltd. Printed wiring board and assembly of the same
US20020043706A1 (en) * 2000-06-28 2002-04-18 Institut National D'optique Miniature Microdevice Package and Process for Making Thereof
US20020056898A1 (en) * 2000-11-16 2002-05-16 Lopes Vincent C. Package with environmental control material carrier
US20030000737A1 (en) * 2001-06-30 2003-01-02 Liu Jwei Wien Masking layer in substrate cavity
US6603182B1 (en) * 2002-03-12 2003-08-05 Lucent Technologies Inc. Packaging micromechanical devices
US20040183177A1 (en) * 2003-03-20 2004-09-23 Curtis Harlan L. Methods and apparatus for attaching getters to MEMS device housings
US20040214373A1 (en) * 2003-04-22 2004-10-28 Tongbi Jiang Packaged microelectronic devices and methods for packaging microelectronic devices
US20050161753A1 (en) * 2001-05-18 2005-07-28 Corporation For National Research Initiatives Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
US20050185248A1 (en) * 2003-05-22 2005-08-25 Terry Tarn Microelectromechanical device packages with integral heaters
US6986199B2 (en) * 2003-06-11 2006-01-17 The United States Of America As Represented By The Secretary Of The Navy Laser-based technique for producing and embedding electrochemical cells and electronic components directly into circuit board materials
US6998533B2 (en) * 2002-04-11 2006-02-14 Koninklijke Philips Electronics N.V. Electronic device and method of manufacturing same
WO2006134216A2 (en) * 2005-06-16 2006-12-21 Imbera Electronics Oy Circuit board structure and method for manufacturing a circuit board structure
EP1795498A2 (en) * 2005-12-06 2007-06-13 Yamaha Corporation Package for a semiconductor device
EP1886969A2 (en) * 2006-08-07 2008-02-13 Honeywell Inc. Methods of fabrication of wafer-level vacuum packaged devices

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6324067B1 (en) * 1995-11-16 2001-11-27 Matsushita Electric Industrial Co., Ltd. Printed wiring board and assembly of the same
US20020043706A1 (en) * 2000-06-28 2002-04-18 Institut National D'optique Miniature Microdevice Package and Process for Making Thereof
US20020056898A1 (en) * 2000-11-16 2002-05-16 Lopes Vincent C. Package with environmental control material carrier
US20050161753A1 (en) * 2001-05-18 2005-07-28 Corporation For National Research Initiatives Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
US20030000737A1 (en) * 2001-06-30 2003-01-02 Liu Jwei Wien Masking layer in substrate cavity
US6603182B1 (en) * 2002-03-12 2003-08-05 Lucent Technologies Inc. Packaging micromechanical devices
US6998533B2 (en) * 2002-04-11 2006-02-14 Koninklijke Philips Electronics N.V. Electronic device and method of manufacturing same
US20040183177A1 (en) * 2003-03-20 2004-09-23 Curtis Harlan L. Methods and apparatus for attaching getters to MEMS device housings
US20040214373A1 (en) * 2003-04-22 2004-10-28 Tongbi Jiang Packaged microelectronic devices and methods for packaging microelectronic devices
US20050185248A1 (en) * 2003-05-22 2005-08-25 Terry Tarn Microelectromechanical device packages with integral heaters
US6986199B2 (en) * 2003-06-11 2006-01-17 The United States Of America As Represented By The Secretary Of The Navy Laser-based technique for producing and embedding electrochemical cells and electronic components directly into circuit board materials
WO2006134216A2 (en) * 2005-06-16 2006-12-21 Imbera Electronics Oy Circuit board structure and method for manufacturing a circuit board structure
EP1795498A2 (en) * 2005-12-06 2007-06-13 Yamaha Corporation Package for a semiconductor device
EP1886969A2 (en) * 2006-08-07 2008-02-13 Honeywell Inc. Methods of fabrication of wafer-level vacuum packaged devices

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