GB2446314A - Structure and method for simultaneously determining an overlay accuracy and pattern placement error - Google Patents
Structure and method for simultaneously determining an overlay accuracy and pattern placement error Download PDFInfo
- Publication number
- GB2446314A GB2446314A GB0805209A GB0805209A GB2446314A GB 2446314 A GB2446314 A GB 2446314A GB 0805209 A GB0805209 A GB 0805209A GB 0805209 A GB0805209 A GB 0805209A GB 2446314 A GB2446314 A GB 2446314A
- Authority
- GB
- United Kingdom
- Prior art keywords
- placement error
- pattern placement
- overlay accuracy
- simultaneously determining
- segmented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The present invention provides a technique for obtaining overlay error and pattern placement error information from a single measurement structure (200). This is accomplished by forming periodic sub-structures (210, 220, 240, 250) in at least two different device layers in a single measurement structure (221,241), wherein at least one segmented (200) and one non-segmented (211,251) portion is provided in the two different device layers.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005046973.6A DE102005046973B4 (en) | 2005-09-30 | 2005-09-30 | A structure and method for simultaneously determining overlay accuracy and pattern placement error |
US11/421,099 US7667842B2 (en) | 2005-09-30 | 2006-05-31 | Structure and method for simultaneously determining an overlay accuracy and pattern placement error |
PCT/US2006/032757 WO2007040855A1 (en) | 2005-09-30 | 2006-08-23 | Structure and method for simultaneously determining an overlay accuracy and pattern placement error |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0805209D0 GB0805209D0 (en) | 2008-04-30 |
GB2446314A true GB2446314A (en) | 2008-08-06 |
GB2446314B GB2446314B (en) | 2010-09-08 |
Family
ID=37496445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0805209A Expired - Fee Related GB2446314B (en) | 2005-09-30 | 2008-03-20 | Structure and method for simultaneously determining an overlay accuracy and pattern placement error |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2446314B (en) |
WO (1) | WO2007040855A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20090128337A (en) * | 2008-06-10 | 2009-12-15 | 어플라이드 머티리얼즈 이스라엘 리미티드 | Method and system for evaluating an object that has a repetitive pattern |
WO2010020331A1 (en) * | 2008-08-19 | 2010-02-25 | Asml Netherlands B.V. | A method of measuring overlay error and a device manufacturing method |
NL2003347A (en) | 2008-09-11 | 2010-03-16 | Asml Netherlands Bv | Imprint lithography. |
US8822106B2 (en) * | 2012-04-13 | 2014-09-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Grid refinement method |
US9093458B2 (en) * | 2012-09-06 | 2015-07-28 | Kla-Tencor Corporation | Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets |
US10474040B2 (en) * | 2017-12-07 | 2019-11-12 | Kla-Tencor Corporation | Systems and methods for device-correlated overlay metrology |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030026471A1 (en) * | 2000-08-30 | 2003-02-06 | Michael Adel | Overlay marks, methods of overlay mark design and methods of overlay measurements |
WO2003071471A1 (en) * | 2002-02-15 | 2003-08-28 | Kla-Tencor Technologies Corporation | Overlay metrology and control method |
US20050174574A1 (en) * | 2000-06-22 | 2005-08-11 | Kla-Tencor Corporation | Overlay alignment mark design |
-
2006
- 2006-08-23 WO PCT/US2006/032757 patent/WO2007040855A1/en active Application Filing
-
2008
- 2008-03-20 GB GB0805209A patent/GB2446314B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050174574A1 (en) * | 2000-06-22 | 2005-08-11 | Kla-Tencor Corporation | Overlay alignment mark design |
US20030026471A1 (en) * | 2000-08-30 | 2003-02-06 | Michael Adel | Overlay marks, methods of overlay mark design and methods of overlay measurements |
WO2003071471A1 (en) * | 2002-02-15 | 2003-08-28 | Kla-Tencor Technologies Corporation | Overlay metrology and control method |
Also Published As
Publication number | Publication date |
---|---|
GB0805209D0 (en) | 2008-04-30 |
WO2007040855A1 (en) | 2007-04-12 |
GB2446314B (en) | 2010-09-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) |
Free format text: REGISTERED BETWEEN 20091210 AND 20091216 |
|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20110823 |