GB2440299A - Gas bearing spindle - Google Patents

Gas bearing spindle

Info

Publication number
GB2440299A
GB2440299A GB0722188A GB0722188A GB2440299A GB 2440299 A GB2440299 A GB 2440299A GB 0722188 A GB0722188 A GB 0722188A GB 0722188 A GB0722188 A GB 0722188A GB 2440299 A GB2440299 A GB 2440299A
Authority
GB
United Kingdom
Prior art keywords
gas bearing
bearing spindle
spindle
chrome
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0722188A
Other versions
GB2440299B (en
GB0722188D0 (en
Inventor
Christopher John Pavey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novanta Technologies UK Ltd
Original Assignee
GSI Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GSI Group Ltd filed Critical GSI Group Ltd
Publication of GB0722188D0 publication Critical patent/GB0722188D0/en
Publication of GB2440299A publication Critical patent/GB2440299A/en
Application granted granted Critical
Publication of GB2440299B publication Critical patent/GB2440299B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/06—Sliding surface mainly made of metal
    • F16C33/14—Special methods of manufacture; Running-in
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2223/00—Surface treatments; Hardening; Coating
    • F16C2223/30—Coating surfaces
    • F16C2223/70—Coating surfaces by electroplating or electrolytic coating, e.g. anodising, galvanising
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20214—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Sliding-Contact Bearings (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Rolling Contact Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

A gas bearing spindle (2) for use in processing apparatus (1), for example ion implantation apparatus. The spindle (2) has a steel bearing surface (23) and a shaft (3) coated with chrome (3a) or another hard material.
GB0722188A 2005-04-15 2006-04-11 Gas bearing spindle Active GB2440299B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0507681.5A GB0507681D0 (en) 2005-04-15 2005-04-15 Gas bearing spindles
PCT/GB2006/001306 WO2006109039A2 (en) 2005-04-15 2006-04-11 Gas bearing spindle

Publications (3)

Publication Number Publication Date
GB0722188D0 GB0722188D0 (en) 2007-12-19
GB2440299A true GB2440299A (en) 2008-01-23
GB2440299B GB2440299B (en) 2008-10-01

Family

ID=34630769

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB0507681.5A Ceased GB0507681D0 (en) 2005-04-15 2005-04-15 Gas bearing spindles
GB0722188A Active GB2440299B (en) 2005-04-15 2006-04-11 Gas bearing spindle

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GBGB0507681.5A Ceased GB0507681D0 (en) 2005-04-15 2005-04-15 Gas bearing spindles

Country Status (5)

Country Link
US (1) US20080178795A1 (en)
JP (1) JP2008536073A (en)
DE (1) DE112006000916B4 (en)
GB (2) GB0507681D0 (en)
WO (1) WO2006109039A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101887830B1 (en) * 2017-11-29 2018-08-13 (주)에스 이 티 Orienter assembly
CN111490626A (en) * 2019-01-29 2020-08-04 青岛海尔智能技术研发有限公司 Motor drive shaft, motor

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4726689A (en) * 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
EP0262939A2 (en) * 1986-09-30 1988-04-06 Canon Kabushiki Kaisha A static pressure gas bearing assembly
EP0482386A1 (en) * 1990-10-19 1992-04-29 Kabushiki Kaisha Toshiba Rotary-anode type X-ray tube
EP0729073A1 (en) * 1995-02-24 1996-08-28 Canon Kabushiki Kaisha Positioning system and method and apparatus for device manufacture
EP0740066A1 (en) * 1995-04-27 1996-10-30 Borg-Warner Automotive, Inc. Solenoid-driven valve having a roller bearing
GB2307724A (en) * 1987-12-09 1997-06-04 Honeywell Inc Improved gas bearing surface using oxygen implanted beryllium
WO2000075522A1 (en) * 1999-06-04 2000-12-14 Nsk Ltd. Bearing device and method of manufacturing the bearing device
US6296990B1 (en) * 1998-05-14 2001-10-02 Asm Lithography, B.V. Gas bearing and lithographic apparatus including such a bearing
US6491435B1 (en) * 2000-07-24 2002-12-10 Moore Epitaxial, Inc. Linear robot
US20030094059A1 (en) * 1999-07-28 2003-05-22 Kyocera Corporation Slide apparatus and its stage mechanism for use in vacuum
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
EP1519087A1 (en) * 2003-09-26 2005-03-30 Dana Corporation Piston ring having chromium coating

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552091A (en) * 1982-05-03 1985-11-12 Darryl Feder Apparatus for metalizing metal bodies
US4714641A (en) * 1983-12-15 1987-12-22 Varian Associates, Inc. Ferromagnetic films for high density recording and methods of production
JPS61166962A (en) * 1985-01-18 1986-07-28 Mazda Motor Corp Sliding contact member having excellent wear resistance and its production
JPH08288361A (en) * 1995-04-13 1996-11-01 Nissin Electric Co Ltd Vacuum processing device
JPH10107029A (en) * 1996-09-26 1998-04-24 Hitachi Ltd Semiconductor integrated circuit device, and method and apparatus for manufacturing it
JPH10213126A (en) * 1997-01-31 1998-08-11 Sumitomo Electric Ind Ltd Dynamic pressure liquid bearing structure
US5829240A (en) * 1997-03-17 1998-11-03 A. B. Carter, Inc. Spinning ring having improved traveler bearing surface
JPH11223213A (en) * 1998-02-06 1999-08-17 Matsushita Electric Ind Co Ltd Gas bearing device and its working method
JP3942743B2 (en) * 1998-09-01 2007-07-11 淳 今井 bearing
JP2001032827A (en) * 1999-07-16 2001-02-06 Sankyo Seiki Mfg Co Ltd Dynamic pressure bearing device
JP2001044107A (en) * 1999-07-28 2001-02-16 Kyocera Corp Sliding device for vacuum and stage mechanism thereof

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262939A2 (en) * 1986-09-30 1988-04-06 Canon Kabushiki Kaisha A static pressure gas bearing assembly
US4726689A (en) * 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
GB2307724A (en) * 1987-12-09 1997-06-04 Honeywell Inc Improved gas bearing surface using oxygen implanted beryllium
EP0482386A1 (en) * 1990-10-19 1992-04-29 Kabushiki Kaisha Toshiba Rotary-anode type X-ray tube
EP0729073A1 (en) * 1995-02-24 1996-08-28 Canon Kabushiki Kaisha Positioning system and method and apparatus for device manufacture
EP0740066A1 (en) * 1995-04-27 1996-10-30 Borg-Warner Automotive, Inc. Solenoid-driven valve having a roller bearing
US6296990B1 (en) * 1998-05-14 2001-10-02 Asm Lithography, B.V. Gas bearing and lithographic apparatus including such a bearing
WO2000075522A1 (en) * 1999-06-04 2000-12-14 Nsk Ltd. Bearing device and method of manufacturing the bearing device
US20030094059A1 (en) * 1999-07-28 2003-05-22 Kyocera Corporation Slide apparatus and its stage mechanism for use in vacuum
US6491435B1 (en) * 2000-07-24 2002-12-10 Moore Epitaxial, Inc. Linear robot
US20040155534A1 (en) * 2003-02-07 2004-08-12 Engwall Mats Anders Structure integrating gas support bearing and a planar electromagnetic drive and levitation system
EP1519087A1 (en) * 2003-09-26 2005-03-30 Dana Corporation Piston ring having chromium coating

Also Published As

Publication number Publication date
WO2006109039A3 (en) 2007-05-03
GB2440299B (en) 2008-10-01
US20080178795A1 (en) 2008-07-31
GB0722188D0 (en) 2007-12-19
DE112006000916B4 (en) 2013-12-12
WO2006109039A2 (en) 2006-10-19
JP2008536073A (en) 2008-09-04
DE112006000916T5 (en) 2008-02-28
GB0507681D0 (en) 2005-05-25

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