GB2349214B - Methods and apparatus for the in-process detection of workpieces - Google Patents

Methods and apparatus for the in-process detection of workpieces

Info

Publication number
GB2349214B
GB2349214B GB0018384A GB0018384A GB2349214B GB 2349214 B GB2349214 B GB 2349214B GB 0018384 A GB0018384 A GB 0018384A GB 0018384 A GB0018384 A GB 0018384A GB 2349214 B GB2349214 B GB 2349214B
Authority
GB
United Kingdom
Prior art keywords
workpieces
methods
process detection
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0018384A
Other versions
GB2349214A (en
GB0018384D0 (en
Inventor
Robert F Allen
Paul Holzapfel
Anthony L Bartels
Warren Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam IPEC Corp
Original Assignee
Speedfam IPEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/683,150 external-priority patent/US5733171A/en
Priority claimed from US08/781,132 external-priority patent/US5823853A/en
Application filed by Speedfam IPEC Corp filed Critical Speedfam IPEC Corp
Publication of GB0018384D0 publication Critical patent/GB0018384D0/en
Publication of GB2349214A publication Critical patent/GB2349214A/en
Application granted granted Critical
Publication of GB2349214B publication Critical patent/GB2349214B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23231—Mark objects, execute sequence according to mark
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37286—Photoelectric sensor with reflection, emits and receives modulated light
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37573—In-cycle, insitu, during machining workpiece is measured continuously
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45232—CMP chemical mechanical polishing of wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
GB0018384A 1996-07-18 1997-07-16 Methods and apparatus for the in-process detection of workpieces Expired - Fee Related GB2349214B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/683,150 US5733171A (en) 1996-07-18 1996-07-18 Apparatus for the in-process detection of workpieces in a CMP environment
US08/781,132 US5823853A (en) 1996-07-18 1997-01-09 Apparatus for the in-process detection of workpieces with a monochromatic light source
GB9900800A GB2330200B (en) 1996-07-18 1997-07-16 Methods and apparatus for the in-process detection of workpieces

Publications (3)

Publication Number Publication Date
GB0018384D0 GB0018384D0 (en) 2000-09-13
GB2349214A GB2349214A (en) 2000-10-25
GB2349214B true GB2349214B (en) 2000-12-20

Family

ID=27269614

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0018384A Expired - Fee Related GB2349214B (en) 1996-07-18 1997-07-16 Methods and apparatus for the in-process detection of workpieces

Country Status (1)

Country Link
GB (1) GB2349214B (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626101A (en) * 1983-11-26 1986-12-02 Kabushiki Kaisha Toshiba Surface defect inspecting apparatus
GB2180642A (en) * 1985-08-29 1987-04-01 Hochiki Co Counting the number of moving bodies
GB2248935A (en) * 1990-10-09 1992-04-22 Hajime Industries Surface inspection device
US5667424A (en) * 1996-09-25 1997-09-16 Chartered Semiconductor Manufacturing Pte Ltd. New chemical mechanical planarization (CMP) end point detection apparatus
US5762091A (en) * 1996-08-01 1998-06-09 Sarne; Daniel L. Thermal-pressure relief device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4626101A (en) * 1983-11-26 1986-12-02 Kabushiki Kaisha Toshiba Surface defect inspecting apparatus
GB2180642A (en) * 1985-08-29 1987-04-01 Hochiki Co Counting the number of moving bodies
GB2248935A (en) * 1990-10-09 1992-04-22 Hajime Industries Surface inspection device
US5762091A (en) * 1996-08-01 1998-06-09 Sarne; Daniel L. Thermal-pressure relief device
US5667424A (en) * 1996-09-25 1997-09-16 Chartered Semiconductor Manufacturing Pte Ltd. New chemical mechanical planarization (CMP) end point detection apparatus

Also Published As

Publication number Publication date
GB2349214A (en) 2000-10-25
GB0018384D0 (en) 2000-09-13

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20010716