GB2340256B - Use of alkoxy N-Hydroxyalkyl alkanamide as resist removing agent composition for removing resist method for preparing the same and resist removing method. - Google Patents
Use of alkoxy N-Hydroxyalkyl alkanamide as resist removing agent composition for removing resist method for preparing the same and resist removing method.Info
- Publication number
- GB2340256B GB2340256B GB9918418A GB9918418A GB2340256B GB 2340256 B GB2340256 B GB 2340256B GB 9918418 A GB9918418 A GB 9918418A GB 9918418 A GB9918418 A GB 9918418A GB 2340256 B GB2340256 B GB 2340256B
- Authority
- GB
- United Kingdom
- Prior art keywords
- resist
- alkoxy
- preparing
- same
- agent composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C215/00—Compounds containing amino and hydroxy groups bound to the same carbon skeleton
- C07C215/02—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0206688A GB2371544A (en) | 1998-08-05 | 1999-08-04 | Method for preparing an alkoxy N-hydroxyalkyl alkanamide |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR19980032355 | 1998-08-05 | ||
KR19980032354 | 1998-08-05 | ||
KR1019990020973A KR100335484B1 (en) | 1998-08-05 | 1999-06-07 | Use of an Alkoxy N-Hydroxyalkyl Alkanamide as Resist Removing Agent, Composition for Removing Resist, Method for Preparing the Same and Resist Removing Method Using the Same |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9918418D0 GB9918418D0 (en) | 1999-10-06 |
GB2340256A GB2340256A (en) | 2000-02-16 |
GB2340256B true GB2340256B (en) | 2002-06-19 |
Family
ID=27349792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9918418A Expired - Fee Related GB2340256B (en) | 1998-08-05 | 1999-08-04 | Use of alkoxy N-Hydroxyalkyl alkanamide as resist removing agent composition for removing resist method for preparing the same and resist removing method. |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100335484B1 (en) |
CN (1) | CN1249530C (en) |
FR (1) | FR2782176B1 (en) |
GB (1) | GB2340256B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6274537B1 (en) * | 1998-08-05 | 2001-08-14 | Samsung Electronics Co., Ltd. | Use of alkoxy N-hydroxyalkyl alkanamide as resist removing agent, composition for removing resist, method for preparing the same and resist removing method using the same |
KR100335484B1 (en) * | 1998-08-05 | 2002-05-04 | 윤종용 | Use of an Alkoxy N-Hydroxyalkyl Alkanamide as Resist Removing Agent, Composition for Removing Resist, Method for Preparing the Same and Resist Removing Method Using the Same |
KR100360397B1 (en) * | 1999-11-26 | 2002-11-18 | 삼성전자 주식회사 | Resist removing composition and resist removing method using the same |
JP4810764B2 (en) * | 2001-06-29 | 2011-11-09 | 三菱瓦斯化学株式会社 | Resist stripper composition |
KR100468714B1 (en) * | 2001-07-03 | 2005-01-29 | 삼성전자주식회사 | Resist removing composition and resist removing method using the same |
KR100434491B1 (en) | 2001-08-17 | 2004-06-05 | 삼성전자주식회사 | Resist or etching by-products removing composition and resist removing method using the same |
KR101017738B1 (en) * | 2002-03-12 | 2011-02-28 | 미츠비시 가스 가가쿠 가부시키가이샤 | Photoresist stripping composition and cleaning composition |
US7037852B2 (en) | 2002-09-26 | 2006-05-02 | Samsung Electronics Co., Ltd. | Composition for stripping photoresist and method of preparing the same |
JP4085262B2 (en) * | 2003-01-09 | 2008-05-14 | 三菱瓦斯化学株式会社 | Resist stripper |
KR100751919B1 (en) | 2005-11-18 | 2007-08-31 | 램테크놀러지 주식회사 | Photoresist stripping composition and method of forming a pattern using the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2199587A (en) * | 1986-12-10 | 1988-07-13 | Advanced Chem Tech | Stripping compositions and use thereof |
JPH02131239A (en) * | 1988-11-11 | 1990-05-21 | Nagase Denshi Kagaku Kk | Composition of peeling agent |
US5707947A (en) * | 1991-01-25 | 1998-01-13 | Ashland Inc. | Organic stripping composition |
JPH11125917A (en) * | 1997-10-21 | 1999-05-11 | Fuji Film Olin Kk | Photoresist stripping solution |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2820801A (en) * | 1958-01-21 | Chjchj | ||
US2704280A (en) * | 1951-05-29 | 1955-03-15 | Colgate Palmolive Co | Long-chain aliphatic ether-amides in detergent compositions |
US5204026A (en) * | 1988-05-20 | 1993-04-20 | The Boeing Company | Solvent with alicyclic carbonate and ethylene dipropionate |
US5690747A (en) * | 1988-05-20 | 1997-11-25 | The Boeing Company | Method for removing photoresist with solvent and ultrasonic agitation |
JPH02253265A (en) * | 1989-03-28 | 1990-10-12 | Nippon Zeon Co Ltd | Resist peeling agent |
US5753601A (en) * | 1991-01-25 | 1998-05-19 | Ashland Inc | Organic stripping composition |
JPH08190205A (en) * | 1995-01-10 | 1996-07-23 | Mitsubishi Gas Chem Co Inc | Photoresist removing agent composition and removing method |
JPH08202051A (en) * | 1995-01-26 | 1996-08-09 | Mitsubishi Gas Chem Co Inc | Peeling agent composition for photoresist and peeling method |
KR100234532B1 (en) * | 1996-09-21 | 1999-12-15 | 윤종용 | Thinner composition used in cleaning photoresist and semiconductor manufacturing method using the same |
KR100335484B1 (en) * | 1998-08-05 | 2002-05-04 | 윤종용 | Use of an Alkoxy N-Hydroxyalkyl Alkanamide as Resist Removing Agent, Composition for Removing Resist, Method for Preparing the Same and Resist Removing Method Using the Same |
-
1999
- 1999-06-07 KR KR1019990020973A patent/KR100335484B1/en not_active IP Right Cessation
- 1999-08-04 GB GB9918418A patent/GB2340256B/en not_active Expired - Fee Related
- 1999-08-04 FR FR9910120A patent/FR2782176B1/en not_active Expired - Fee Related
- 1999-08-05 CN CNB991119657A patent/CN1249530C/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2199587A (en) * | 1986-12-10 | 1988-07-13 | Advanced Chem Tech | Stripping compositions and use thereof |
JPH02131239A (en) * | 1988-11-11 | 1990-05-21 | Nagase Denshi Kagaku Kk | Composition of peeling agent |
US5707947A (en) * | 1991-01-25 | 1998-01-13 | Ashland Inc. | Organic stripping composition |
JPH11125917A (en) * | 1997-10-21 | 1999-05-11 | Fuji Film Olin Kk | Photoresist stripping solution |
Also Published As
Publication number | Publication date |
---|---|
GB9918418D0 (en) | 1999-10-06 |
CN1249530C (en) | 2006-04-05 |
KR20000016878A (en) | 2000-03-25 |
CN1243971A (en) | 2000-02-09 |
FR2782176A1 (en) | 2000-02-11 |
FR2782176B1 (en) | 2005-09-23 |
KR100335484B1 (en) | 2002-05-04 |
GB2340256A (en) | 2000-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20100804 |