GB2266897B - Process for depositing metallic interlayers - Google Patents
Process for depositing metallic interlayersInfo
- Publication number
- GB2266897B GB2266897B GB9309590A GB9309590A GB2266897B GB 2266897 B GB2266897 B GB 2266897B GB 9309590 A GB9309590 A GB 9309590A GB 9309590 A GB9309590 A GB 9309590A GB 2266897 B GB2266897 B GB 2266897B
- Authority
- GB
- United Kingdom
- Prior art keywords
- depositing metallic
- metallic interlayers
- interlayers
- depositing
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/02—Pretreatment of the material to be coated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4215664A DE4215664C1 (de) | 1992-05-13 | 1992-05-13 | Verfahren zum Aufbringen von metallischen Zwischenschichten und seine Anwendung |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9309590D0 GB9309590D0 (en) | 1993-06-23 |
GB2266897A GB2266897A (en) | 1993-11-17 |
GB2266897B true GB2266897B (en) | 1996-04-17 |
Family
ID=6458705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9309590A Expired - Fee Related GB2266897B (en) | 1992-05-13 | 1993-05-10 | Process for depositing metallic interlayers |
Country Status (5)
Country | Link |
---|---|
US (1) | US5403629A (fr) |
DE (1) | DE4215664C1 (fr) |
FR (1) | FR2691167B1 (fr) |
GB (1) | GB2266897B (fr) |
IT (1) | IT1272422B (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5441767A (en) * | 1994-01-26 | 1995-08-15 | United Technologies Corporation | Pack coating process for articles containing small passageways |
DE4425991C1 (de) * | 1994-07-22 | 1995-12-07 | Mtu Muenchen Gmbh | Vorrichtung und Verfahren zur partiellen Beschichtung von Bauteilgruppen |
US6503347B1 (en) | 1996-04-30 | 2003-01-07 | Surface Engineered Products Corporation | Surface alloyed high temperature alloys |
CA2175439C (fr) | 1996-04-30 | 2001-09-04 | Sabino Steven Anthony Petrone | Alliages haute temperature a surface alliee |
GB2337765A (en) * | 1998-05-27 | 1999-12-01 | Solicitor For The Affairs Of H | Aluminium diffusion of copper coatings |
GB2349392B (en) | 1999-04-20 | 2003-10-22 | Trikon Holdings Ltd | A method of depositing a layer |
US6592724B1 (en) * | 1999-09-22 | 2003-07-15 | Delphi Technologies, Inc. | Method for producing NiTiHf alloy films by sputtering |
DE10001516B4 (de) * | 2000-01-15 | 2014-05-08 | Alstom Technology Ltd. | Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metallischen Grundmaterial |
WO2001073153A1 (fr) * | 2000-03-29 | 2001-10-04 | Trikon Holdings Limited | Procede de depot de films metalliques |
US6875318B1 (en) | 2000-04-11 | 2005-04-05 | Metalbond Technologies, Llc | Method for leveling and coating a substrate and an article formed thereby |
US6475647B1 (en) | 2000-10-18 | 2002-11-05 | Surface Engineered Products Corporation | Protective coating system for high temperature stainless steel |
US6585864B1 (en) | 2000-06-08 | 2003-07-01 | Surface Engineered Products Corporation | Coating system for high temperature stainless steel |
CA2348145C (fr) | 2001-05-22 | 2005-04-12 | Surface Engineered Products Corporation | Systeme de protection pour alliages metalliques refractaires |
CN101760717B (zh) * | 2009-12-28 | 2011-09-21 | 江苏麟龙新材料股份有限公司 | 一种对耐海洋气候工程零件涂层进行扩散处理的方法 |
CN102051574A (zh) * | 2011-01-14 | 2011-05-11 | 上海大学 | 低碳钢板表面纳米合金化的处理方法 |
US20220372611A1 (en) * | 2021-05-24 | 2022-11-24 | Vactronix Scientific, Llc | Pvd deposited ternary and quaternary niti alloys and methods of making same |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1182540A (en) * | 1967-08-17 | 1970-02-25 | Matsushita Electronics Corp | Method of Making Semiconductor Device |
GB1339157A (en) * | 1970-11-25 | 1973-11-28 | Toray Industries | Electroless plating |
GB1379510A (en) * | 1971-12-30 | 1975-01-02 | Western Electric Co | Technique for adjusting the temperature coefficient of resistance of tantalum aluminium alloys |
GB1430516A (en) * | 1973-09-04 | 1976-03-31 | Fuji Photo Film Co Ltd | Method of forming a protective layer on a magnetic recording element |
GB1436999A (en) * | 1972-06-21 | 1976-05-26 | Lucas Electrical Ltd | Method of depositing aluminium on the surface of a semi- conductor wafer |
GB1545305A (en) * | 1975-05-27 | 1979-05-10 | United Technologies Corp | Method of forming aluminide coatings on nickel-,cobalt-,and iron-base alloys |
US4944858A (en) * | 1988-12-08 | 1990-07-31 | United Technologies Corporation | Method for applying diffusion aluminide coating |
US5068022A (en) * | 1989-11-27 | 1991-11-26 | E. I. Du Pont De Nemours And Company | Process for sputtering multilayers for magneto-optical recording |
JPH0413861A (ja) * | 1990-04-28 | 1992-01-17 | Sharp Corp | 半導体装置の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3742944C1 (de) * | 1987-12-18 | 1988-10-27 | Mtu Muenchen Gmbh | Oxidationsschutzschicht |
-
1992
- 1992-05-13 DE DE4215664A patent/DE4215664C1/de not_active Expired - Fee Related
-
1993
- 1993-04-29 IT ITMI930849A patent/IT1272422B/it active IP Right Grant
- 1993-05-10 GB GB9309590A patent/GB2266897B/en not_active Expired - Fee Related
- 1993-05-11 US US08/060,419 patent/US5403629A/en not_active Expired - Fee Related
- 1993-05-13 FR FR9305764A patent/FR2691167B1/fr not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1182540A (en) * | 1967-08-17 | 1970-02-25 | Matsushita Electronics Corp | Method of Making Semiconductor Device |
GB1339157A (en) * | 1970-11-25 | 1973-11-28 | Toray Industries | Electroless plating |
GB1379510A (en) * | 1971-12-30 | 1975-01-02 | Western Electric Co | Technique for adjusting the temperature coefficient of resistance of tantalum aluminium alloys |
GB1436999A (en) * | 1972-06-21 | 1976-05-26 | Lucas Electrical Ltd | Method of depositing aluminium on the surface of a semi- conductor wafer |
GB1430516A (en) * | 1973-09-04 | 1976-03-31 | Fuji Photo Film Co Ltd | Method of forming a protective layer on a magnetic recording element |
GB1545305A (en) * | 1975-05-27 | 1979-05-10 | United Technologies Corp | Method of forming aluminide coatings on nickel-,cobalt-,and iron-base alloys |
US4944858A (en) * | 1988-12-08 | 1990-07-31 | United Technologies Corporation | Method for applying diffusion aluminide coating |
US5068022A (en) * | 1989-11-27 | 1991-11-26 | E. I. Du Pont De Nemours And Company | Process for sputtering multilayers for magneto-optical recording |
JPH0413861A (ja) * | 1990-04-28 | 1992-01-17 | Sharp Corp | 半導体装置の製造方法 |
Non-Patent Citations (1)
Title |
---|
WPI Abstract Accession No:92-069621/09 & JP 04013861 A * |
Also Published As
Publication number | Publication date |
---|---|
IT1272422B (it) | 1997-06-23 |
ITMI930849A0 (it) | 1993-04-29 |
FR2691167B1 (fr) | 1995-03-03 |
ITMI930849A1 (it) | 1994-10-29 |
FR2691167A1 (fr) | 1993-11-19 |
GB9309590D0 (en) | 1993-06-23 |
DE4215664C1 (de) | 1993-11-25 |
US5403629A (en) | 1995-04-04 |
GB2266897A (en) | 1993-11-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20060510 |