GB2266151B - Semiconductor acceleration sensor - Google Patents

Semiconductor acceleration sensor

Info

Publication number
GB2266151B
GB2266151B GB9306077A GB9306077A GB2266151B GB 2266151 B GB2266151 B GB 2266151B GB 9306077 A GB9306077 A GB 9306077A GB 9306077 A GB9306077 A GB 9306077A GB 2266151 B GB2266151 B GB 2266151B
Authority
GB
United Kingdom
Prior art keywords
acceleration sensor
semiconductor acceleration
semiconductor
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9306077A
Other versions
GB2266151A (en
GB9306077D0 (en
Inventor
Katsumichi Ueyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Ten Ltd
Fuji Electric Co Ltd
Original Assignee
Denso Ten Ltd
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4066470A external-priority patent/JP2831195B2/en
Priority claimed from JP04227651A external-priority patent/JP3115427B2/en
Application filed by Denso Ten Ltd, Fuji Electric Co Ltd filed Critical Denso Ten Ltd
Priority to GB9605377A priority Critical patent/GB2296977B/en
Publication of GB9306077D0 publication Critical patent/GB9306077D0/en
Publication of GB2266151A publication Critical patent/GB2266151A/en
Application granted granted Critical
Publication of GB2266151B publication Critical patent/GB2266151B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/006—Details of instruments used for thermal compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
GB9306077A 1992-03-25 1993-03-24 Semiconductor acceleration sensor Expired - Lifetime GB2266151B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9605377A GB2296977B (en) 1992-03-25 1993-03-24 Semi-conductor acceleration sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4066470A JP2831195B2 (en) 1992-03-25 1992-03-25 Semiconductor acceleration sensor
JP04227651A JP3115427B2 (en) 1991-11-28 1992-08-27 Semiconductor acceleration sensor

Publications (3)

Publication Number Publication Date
GB9306077D0 GB9306077D0 (en) 1993-05-12
GB2266151A GB2266151A (en) 1993-10-20
GB2266151B true GB2266151B (en) 1996-09-11

Family

ID=26407662

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9306077A Expired - Lifetime GB2266151B (en) 1992-03-25 1993-03-24 Semiconductor acceleration sensor

Country Status (1)

Country Link
GB (1) GB2266151B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08122359A (en) * 1994-10-21 1996-05-17 Fuji Electric Co Ltd Semiconductor acceleration sensor and its manufacture and testing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
EP0368446A2 (en) * 1988-09-23 1990-05-16 Automotive Systems Laboratory Inc. Self-calibrating accelerometer
US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
EP0492986A2 (en) * 1990-12-21 1992-07-01 Texas Instruments Incorporated Accelerometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553436A (en) * 1982-11-09 1985-11-19 Texas Instruments Incorporated Silicon accelerometer
EP0368446A2 (en) * 1988-09-23 1990-05-16 Automotive Systems Laboratory Inc. Self-calibrating accelerometer
US5103667A (en) * 1989-06-22 1992-04-14 Ic Sensors, Inc. Self-testable micro-accelerometer and method
EP0492986A2 (en) * 1990-12-21 1992-07-01 Texas Instruments Incorporated Accelerometer

Also Published As

Publication number Publication date
GB2266151A (en) 1993-10-20
GB9306077D0 (en) 1993-05-12

Similar Documents

Publication Publication Date Title
GB2262613B (en) Acceleration sensor
GB2240178B (en) Acceleration sensor
SG52374A1 (en) Acceleration sensor
GB2246635B (en) Acceleration sensor
EP0589862A3 (en) Sensor device
DE59205629D1 (en) Sensor
EP0374870A3 (en) Acceleration sensor
GB2237934B (en) Acceleration sensor
GB2263625B (en) Deceleration sensing means
EP0488352A3 (en) Semiconductor gas sensor
GB2252204B (en) Acceleration sensor
DE59303064D1 (en) Sensor
GB2281126B (en) Semiconductor capacitive acceleration sensor
EP0405698A3 (en) Acceleration sensor
GB2270202B (en) Acceleration sensor
GB2247353B (en) Acceleration sensor
GB9125654D0 (en) Acceleration sensor
SG45196A1 (en) Acceleration sensor
GB2296977B (en) Semi-conductor acceleration sensor
GB2266151B (en) Semiconductor acceleration sensor
GB2222684B (en) Acceleration sensor
GB9316425D0 (en) Acceleration sensor
GB2274386B (en) Mechanical acceleration sensor
GB2265757B (en) Acceleration sensor
GB9316888D0 (en) Acceleration sensor

Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)

Effective date: 20040625

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20100408 AND 20100414

732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20110908 AND 20110914

PE20 Patent expired after termination of 20 years

Expiry date: 20130323