GB2234365A - Strain gauge encapsulation process - Google Patents

Strain gauge encapsulation process Download PDF

Info

Publication number
GB2234365A
GB2234365A GB9015264A GB9015264A GB2234365A GB 2234365 A GB2234365 A GB 2234365A GB 9015264 A GB9015264 A GB 9015264A GB 9015264 A GB9015264 A GB 9015264A GB 2234365 A GB2234365 A GB 2234365A
Authority
GB
United Kingdom
Prior art keywords
resin
sheet
strain gauges
photo
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9015264A
Other versions
GB9015264D0 (en
Inventor
Wilmot Hancock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GEC Avery Technology Ltd
Original Assignee
GEC Avery Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Avery Technology Ltd filed Critical GEC Avery Technology Ltd
Publication of GB9015264D0 publication Critical patent/GB9015264D0/en
Publication of GB2234365A publication Critical patent/GB2234365A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/14Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of electrical resistance
    • G01G3/1402Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C10/00Adjustable resistors
    • H01C10/10Adjustable resistors adjustable by mechanical pressure or force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

A process for encapsulating strain gauges comprising placing a sheet carrying a plurality of strain gauges 10 onto a processing plate, depositing a coat of an imide resin in liquid form over the sheet and spinning the processing plate to spread the resin evenly, baking the resin at 90 DEG for 60 minutes, coating the resin with photo-resist, exposing the photo-resist coated sheet to ultra-violet light using a mask which defines a pair of pads (11) for each of the strain gauges, developing to remove both the photoresist and imide resin, and fully curing the resin by baking at 135 DEG C or above before soldering wires (12) onto the pads. <IMAGE>

Description

STRAIN GAUGE ENCAPSULATION PROCESS.
The present invention concerns the manufacture of strain gauges. These are used in making force-measurement, and particularly, in weighing applications. Essentially a strain gauge comprises a strip of conductive material the resistance of which varies in accordance with strains applied to the strip.
This variation in resistance is measured by monitoring a current passed through the strip.
Strain gauges are generally small and made from thin metal films attached to a flexible base. It is accordingly normal to protect them from ambient conditions in their operational environment by encapsulating them in a suitable epoxy resin. The encapsulation processes currently used all have a number of drawbacks.
These are mainly caused by the necessity of providing the encapsulated strain gauge with pads to which electric leads can be connected.
In one known process the pads are masked prior to encapsulation and in another the pads are simply left out of the encapsulation process.
As the performance of a strain gauge is influenced by the method of lead attachment, i.e. amount of solder used in making the joint or position of the joint on the solder pad, either of the aforesaid encapsulation methods cause the critical soldering operation to be very much operator dependant. The second method also has the disadvantage that rows of gauges have to be treated separately thus slowing down the encapsulation process.
The present invention has for an object an encapsulation process for strain gauges which at least alleviates these drawbacks.
Accordingly from one aspect the present invention comprises a process for encapsulating strain gauges comprising placing a sheet carrying a plurality of strain gauges onto a processing plate, depositing a coat of an epoxy resin in liquid form over the sheet and spinning the processing plate to spread the resin evenly, baking the resin, coating the resin with photo-resist, exposing the photo-resist coated sheet to ultra-violet light using a mask which defines a pair of pads for each of the strain gauges, and developing and etching the sheet.
From a second aspect the invention comprises a strain gauge encapsulated by the aforesaid process.
In order that the present invention may be more readily understood, a method of strain gauge encapsulation will now be described by way of example. The only figure of the accompanying drawings shows three simular strain gauges 10. As can be seen each strain gauge has two terminal pads 11, with pads 12 being soldered to one of the straingauges. The main body of each strain gauge provides a conductive zig-zag path.
The initial manufacture of strain gauges is carried out to produce a rectangular sheet approximately 5 inches by 4 inches containing an array pattern of the devices. However the present invention is concerned with encapsulating the gauges so formed.
Accordingly the sheet of strain gauges so formed is placed on a processing plate and firmly taped to it. The sheet is covered with a coating of Polyimide approximately 7 #u.m. thick by depositing the Polyimide in liquid form on the plate and spinning the latter at approximately 1600 rpm. The Polyimide-coated sheet is then baked in an oven for approximaely 60 minutes at 900C. The time and temperature for this process are critical as they will affect the etch rates. Increased temperature and time will more completely imidise the Polyimide, slowing the etch rate. This will tend to result in reduced quality of the soldering area.
When the sheet has regained room temperature it is ready for coating with photo-resist. This is done in a manner similar to the Polyimide coating on a table spinning at approximately 1600 rpm. The newly coated sheet is stored at room temperature for approximately 10 minutes and then baked at 900C for a period of 30 minutes.
Once the sheet has returned to room temperature it is exposed to ultra-violet light using a photomask which defines the pads which are to be exposed so that the necessary leads can be soldered to them. A typical exposure time is 15 seconds. The exposed resist should be left at room temperature for a minimum of 15 minutes before development.
All positive photo resist developers will etch Polyimides in their soft baked condition. As the photo resist on the sheet of devices is on top of the soft baked encapsulent, development of the resist will be simultaneous to the etching of the Polyimide.
Development and etching is carried out by total immersion in positive resist developer at room temperature using continuous agitation. Development/etching is complete when terminal pads are observed to be clear of encapsulent taking approximately 4i minutes. Etching is followed by a spray wash in tap water then spin dry in preparation for resist removal.
Photo resist removal is carried out by total immersion in a solution of 60% Butyl Acetate, 40% Isopropanol at room temperature for a period of 3# minutes. The etched sheet is then spin-dried.
Full cure of the Polyimide encapsulent is now carried out by using the standard baking times of 1350C for 15 minutes and then elevating the temperature setting to 3000C, and after a further 170 minutes remomoving the sheet from the oven.
Residues and oxide from the exposed terminal pads can then be removed by polishing and washing.
The sheet of strain gauges can now be cut into rows ready for mass soldering leads to the individual devices. The rows of devices are thoroughly cleaned using solvents and ultrasonics after which the rows are cut into portions each having an individual, encapsulated strain gauge with leads attached.

Claims (8)

1. A process for encapsulating strain gauges comprising placing a sheet carrying a plurality of strain gauges onto a processing plate, depositing a coat of an epoxy resin in liquid form over the sheet and spinning the processing plate to spread the resin evenly, baking the resin, coating the resin with photo-resist, exposing the photo-resist coated sheet to ultra-violet light using a mask which defines a pair of pads for each of the strain gauges, and developing and etching the sheet.
2. A process as claimed in Claim 1, wherein the resin is Polyimide.
3. A process as claimed in Claim 1 or Claim 2, wherein the photo-resist is applied to the sheet in the same manner as the resin.
4. A process as claimed in Claim 2 or Claim 3 when dependent on Claim 1, wherein the processing plate is spun at approximately 1600 rpm during the formation of the coat of resin, the final coat being approximately 7AJ.m. thick.
5. A process as claimed in any one of the preceding claims wherein photo-resist removal is carried out by total immersion in a solution of 60% Butyl Acetate, 40% Isopropanol.
6. A process as claimed in Claim 5, wherein the immersion is for a period of approximately 3# minutes.
7. A process for encapsulating strain gauges substantially as hereinbefore described.
8. A strain gauge encapsulated by the process as claimed in any one of the preceding claims.
GB9015264A 1989-07-27 1990-07-11 Strain gauge encapsulation process Withdrawn GB2234365A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB898917191A GB8917191D0 (en) 1989-07-27 1989-07-27 Strain gauge encapsulation process

Publications (2)

Publication Number Publication Date
GB9015264D0 GB9015264D0 (en) 1990-08-29
GB2234365A true GB2234365A (en) 1991-01-30

Family

ID=10660722

Family Applications (2)

Application Number Title Priority Date Filing Date
GB898917191A Pending GB8917191D0 (en) 1989-07-27 1989-07-27 Strain gauge encapsulation process
GB9015264A Withdrawn GB2234365A (en) 1989-07-27 1990-07-11 Strain gauge encapsulation process

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB898917191A Pending GB8917191D0 (en) 1989-07-27 1989-07-27 Strain gauge encapsulation process

Country Status (1)

Country Link
GB (2) GB8917191D0 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0496032A2 (en) * 1990-08-31 1992-07-29 General Electric Company Method of making strain gauged diaphragm-type pressure transducers
GB2263981A (en) * 1992-02-10 1993-08-11 Du Pont Process for developing and etching compound layers of photoresist and polyimidesimultaneously
GB2265021A (en) * 1992-03-10 1993-09-15 Nippon Steel Chemical Co Photosensitive materials and their use in preparing printed circuits
GB2266787A (en) * 1992-05-07 1993-11-10 Outokumpu Instr Oy Thin film reinforcing structure and method for manufacturing the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2049210A (en) * 1979-02-26 1980-12-17 Shipley Co Photographic formation of visible images
GB1585299A (en) * 1976-12-30 1981-02-25 Ibm Forming patterned films
WO1986001010A1 (en) * 1984-07-25 1986-02-13 Davies Brothers Limited Product and process for producing an image on a substrate
EP0202705A1 (en) * 1985-05-08 1986-11-26 Koninklijke Philips Electronics N.V. Patterned polyimide film, a photosensitive polyamide acid derivative and an electrophoretic image-display cell
GB2204316A (en) * 1987-04-03 1988-11-09 Gen Electric Photopatterning silicone polyamic acids, dye compositions, and colour filters

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1585299A (en) * 1976-12-30 1981-02-25 Ibm Forming patterned films
GB2049210A (en) * 1979-02-26 1980-12-17 Shipley Co Photographic formation of visible images
WO1986001010A1 (en) * 1984-07-25 1986-02-13 Davies Brothers Limited Product and process for producing an image on a substrate
EP0202705A1 (en) * 1985-05-08 1986-11-26 Koninklijke Philips Electronics N.V. Patterned polyimide film, a photosensitive polyamide acid derivative and an electrophoretic image-display cell
GB2204316A (en) * 1987-04-03 1988-11-09 Gen Electric Photopatterning silicone polyamic acids, dye compositions, and colour filters

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0496032A2 (en) * 1990-08-31 1992-07-29 General Electric Company Method of making strain gauged diaphragm-type pressure transducers
EP0496032A3 (en) * 1990-08-31 1993-01-20 General Electric Company Method of making strain gauged diaphragm-type pressure transducers
GB2263981A (en) * 1992-02-10 1993-08-11 Du Pont Process for developing and etching compound layers of photoresist and polyimidesimultaneously
GB2265021A (en) * 1992-03-10 1993-09-15 Nippon Steel Chemical Co Photosensitive materials and their use in preparing printed circuits
GB2265021B (en) * 1992-03-10 1996-02-14 Nippon Steel Chemical Co Photosensitive materials and their use in forming protective layers for printed circuit and process for preparation of printed circuit
GB2266787A (en) * 1992-05-07 1993-11-10 Outokumpu Instr Oy Thin film reinforcing structure and method for manufacturing the same
GB2266787B (en) * 1992-05-07 1995-10-04 Outokumpu Instr Oy Thin film reinforcing structure and method for manufacturing the same

Also Published As

Publication number Publication date
GB8917191D0 (en) 1989-09-13
GB9015264D0 (en) 1990-08-29

Similar Documents

Publication Publication Date Title
US4152195A (en) Method of improving the adherence of metallic conductive lines on polyimide layers
US3978578A (en) Method for packaging semiconductor devices
US4176445A (en) Metal foil resistor
US4978423A (en) Selective solder formation on printed circuit boards
EP0394638B1 (en) Method of etching polyimides and resulting passivation structures
US5766808A (en) Process for forming multilayer lift-off structures
US3979240A (en) Method of etching indium tin oxide
GB2234365A (en) Strain gauge encapsulation process
US4963389A (en) Method for producing hybrid integrated circuit substrate
US4704188A (en) Wet chemical etching of crxsiynz
GB2050705A (en) Metal foil resistor
CA1271268A (en) Method of making a flexible microcircuit
US3434940A (en) Process for making thin-film temperature sensors
Makabe et al. A novel positive working photosensitive polymer for semiconductor surface coating
US3617411A (en) Process for etching a pattern of closely spaced conducting lines in an integrated circuit
US4517734A (en) Method of passivating aluminum interconnects of non-hermetically sealed integrated circuit semiconductor devices
KR100330557B1 (en) Method of manufacturing flexible substrate circuit film
JPH01157526A (en) Manufacture of semiconductor device
US5891749A (en) Process for forming photoresist pattern in semiconductor device
US4352839A (en) Method of forming a layer of polymethyl methacrylate on a surface of silicon dioxide
JPH0661233A (en) Manufacture of semiconductor device
JPH06275511A (en) Forming method of polyimide pattern
JP2001118956A (en) Semiconductor device and its manufacturing method
JPS5823735B2 (en) Method for producing tantalum layers for thin film capacitors or thin film resistors
JP2589471B2 (en) Method for manufacturing semiconductor device

Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)