GB2201258B - A mask holding device - Google Patents
A mask holding deviceInfo
- Publication number
- GB2201258B GB2201258B GB8802217A GB8802217A GB2201258B GB 2201258 B GB2201258 B GB 2201258B GB 8802217 A GB8802217 A GB 8802217A GB 8802217 A GB8802217 A GB 8802217A GB 2201258 B GB2201258 B GB 2201258B
- Authority
- GB
- United Kingdom
- Prior art keywords
- holding device
- mask holding
- mask
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62026456A JPH07101663B2 (en) | 1987-02-09 | 1987-02-09 | Mask holding device |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8802217D0 GB8802217D0 (en) | 1988-03-02 |
GB2201258A GB2201258A (en) | 1988-08-24 |
GB2201258B true GB2201258B (en) | 1991-04-24 |
Family
ID=12194007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8802217A Expired - Lifetime GB2201258B (en) | 1987-02-09 | 1988-02-02 | A mask holding device |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH07101663B2 (en) |
DE (1) | DE3803738A1 (en) |
FR (1) | FR2610740B1 (en) |
GB (1) | GB2201258B (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4304912C2 (en) * | 1993-02-18 | 2003-03-06 | Klaus Siebert | Method and device for continuous automatic chip production under vacuum |
JP3470469B2 (en) * | 1995-09-27 | 2003-11-25 | 株式会社ニコン | Reticle holding device and holding method |
DE19859172A1 (en) * | 1998-12-21 | 2000-06-29 | Uhp Corp | Selective surface treatment with magnetic mask holder |
TW490596B (en) * | 1999-03-08 | 2002-06-11 | Asm Lithography Bv | Lithographic projection apparatus, method of manufacturing a device using the lithographic projection apparatus, device manufactured according to the method and method of calibrating the lithographic projection apparatus |
JP2004103799A (en) * | 2002-09-09 | 2004-04-02 | Canon Inc | Substrate holding unit, apparatus and method for manufacturing device |
KR100495872B1 (en) * | 2002-10-07 | 2005-06-16 | 주식회사 소로나 | Shadowmask attaching method for organic light emitting device and apparatus adopting the same |
EP1513017A1 (en) | 2003-09-04 | 2005-03-09 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1513021B1 (en) * | 2003-09-04 | 2007-10-03 | ASML Netherlands B.V. | Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus |
CN102566336B (en) * | 2010-12-30 | 2015-08-26 | 上海微电子装备有限公司 | The stationary installation of mask and fixing means thereof |
WO2013174398A1 (en) * | 2012-05-22 | 2013-11-28 | Carl Zeiss Smt Gmbh | Reticle, reticle-chuck, reticle positioning system and optical system |
KR102146162B1 (en) * | 2018-07-25 | 2020-08-19 | 주식회사 야스 | Glass Mask |
CN113687574A (en) * | 2020-05-18 | 2021-11-23 | 长鑫存储技术有限公司 | Photoetching equipment and light source position monitoring method thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4418420A (en) * | 1980-08-09 | 1983-11-29 | Agfa-Gevaert Aktiengesellschaft | Method and arrangement for gripping X-ray film |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3941480A (en) * | 1974-02-08 | 1976-03-02 | The Gerber Scientific Instrument Company | Work locating system and method with temperature and other compensation capabilities |
US4019109A (en) * | 1974-05-13 | 1977-04-19 | Hughes Aircraft Company | Alignment system and method with micromovement stage |
US4506205A (en) * | 1983-06-10 | 1985-03-19 | The Perkin-Elmer Corporation | Electro-magnetic alignment apparatus |
JPS6068340A (en) * | 1983-09-26 | 1985-04-18 | Canon Inc | Structural body of mask for lithography |
DE3435178A1 (en) * | 1983-09-26 | 1985-04-04 | Canon K.K., Tokio/Tokyo | OBJECT WITH MASK STRUCTURE FOR LITHOGRAPHY |
US4592081A (en) * | 1984-02-10 | 1986-05-27 | Varian Associates, Inc. | Adaptive X-ray lithography mask |
JPS60251621A (en) * | 1984-05-29 | 1985-12-12 | Hitachi Ltd | X-ray mask and x-ray exposure device using thereof |
DE3620970A1 (en) * | 1985-06-24 | 1987-01-08 | Canon Kk | Mask holding device |
-
1987
- 1987-02-09 JP JP62026456A patent/JPH07101663B2/en not_active Expired - Fee Related
-
1988
- 1988-02-02 GB GB8802217A patent/GB2201258B/en not_active Expired - Lifetime
- 1988-02-08 DE DE19883803738 patent/DE3803738A1/en active Granted
- 1988-02-08 FR FR8801455A patent/FR2610740B1/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4418420A (en) * | 1980-08-09 | 1983-11-29 | Agfa-Gevaert Aktiengesellschaft | Method and arrangement for gripping X-ray film |
Also Published As
Publication number | Publication date |
---|---|
JPH07101663B2 (en) | 1995-11-01 |
FR2610740B1 (en) | 1995-06-30 |
JPS63194331A (en) | 1988-08-11 |
DE3803738C2 (en) | 1992-12-24 |
GB8802217D0 (en) | 1988-03-02 |
DE3803738A1 (en) | 1988-08-25 |
FR2610740A1 (en) | 1988-08-12 |
GB2201258A (en) | 1988-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20040202 |