GB2198669A - Micro displacement machine element mechanism and method utilising control by electrical or magnetic source - Google Patents

Micro displacement machine element mechanism and method utilising control by electrical or magnetic source Download PDF

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Publication number
GB2198669A
GB2198669A GB08629732A GB8629732A GB2198669A GB 2198669 A GB2198669 A GB 2198669A GB 08629732 A GB08629732 A GB 08629732A GB 8629732 A GB8629732 A GB 8629732A GB 2198669 A GB2198669 A GB 2198669A
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United Kingdom
Prior art keywords
deformation
transducer
displacement
micro
electrical source
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GB8629732D0 (en
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Tai-Her Yang
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/601Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism a single sliding pair followed parallelly by a single sliding pair
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/41Servomotor, servo controller till figures
    • G05B2219/41354Magnetic, thermal, bimetal peltier effect displacement, positioning

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Micromachines (AREA)

Abstract

A micro-displacement mechanism comprises an orienting element 101 e g the detecting head of precision measuring equipment; a movable body 102; a transducer 103, a sliding base 104, a fixed body with slide track 105, a rough positioning drive means 106 with a lock 107; precision measuring equipment 108 and an adjustable electrical or magnetic source for controlling the transducer 109. <IMAGE>

Description

MICRO DISPLACEMENT MECHANISM AND METHOD OF MACHINE DEFORMATION & TRANSDUCER DEFORMATION QUANTITY CONTROLLED BY ELECTRICAL SOURCE OR MAGNETIC ENERGY In the earliest epoche of the human, the required precision was 10 mm which could be achieved by the human hands and eyes; when the vehicles had been invented the human required the achse and dismeter in 1 mm precision.
At that time, the skillful man adjusted the position on the solid machine with a machining cutter; when the vapor ermine had been invented, the human required 0.05 mm working displacement unit for working the pistons and the cavity hole; when the guns and the inner combustion engine with high pressure had been invented, the human required 0.01 mm working unit; At the present, we need 0.001 mm (lout) for adjusting the crystal piece of micro electron and the cell position which will be treated in the biological technolog; and for adjusting the position of the detecting head in the optical laser measuring distance. In this epoche, the dynamic adjusting elements made of the precision threads play an important role.But it is not enough for the micro adjustment with more precision. The reasons are as follows: (1) The thread is a slopy movement. But the present technolo#- is not yet to make a line with the error under O.9Olmr..
(2) The volume will be increased.
(3) It needs high cost.
(4) Because the static friction can be not equal to dynamic friction, it is not easy to make an adjustment. For the micro drive, the frequency response is also too low.
(5) When there is extra micro position driftage of the temperature deformation after the adjustment, it is difficult to make micro recoxrery supplemental structure and the hunting phenomenon will be generated.
Eased on the said defects, the present invention provides a micro displacement mechanism and method of the machine deformation and transducer deformation quantity controlled by the electrical source or magnetic energy As shown in Fig. 1, it is composed of an orienting aim 101 (i.g. the detecting head of the precision measuring equipment), moving body 102, transducer 103, sliding base seat 104, static body with slide track 105, rough positioned driving element 106, locking equipment 107, precision measuring equipment 108 and adjustable electrical source & magnetic energetic source used for controlling the transducer 109, in which: - The precision measuring equipments 108 have been de#e1oped, such as:: laser measuring instrument; optical interference measuring equipments.
The moving body 102 and the orienting aim 108 depending upon the applicable equipment, for example: a measuring head of a measuring instrument; an injection needle of the cell; an optical lens; a transfer head of laser; a machining cutter; an optical reflex reflector; or other precision micro displacement equipment.
- The transducer 103 is used for transfering the input magnetic energy into the machine deformation displacement, for example, elastic element of magnetic h=steresis, such as NiAF alloy, ferrite, or for transfering the input electrical energ,- into the machine deformation displacement, for example, the deformation element of electrical field, such as titanite barium, titanite lead, or the piezoelectric elements, such as quartz, Rochelle-salt, ADP.They are installed (pasted or locked or soldered or casted) between the moving body and the sliding base seat, in which the relative deformation quantity will be generated by means of the size adjustment of the outer actuating electric or magnetic energn-, and the angle between the deformation orientation and the orienting aim is Oc or within 900 for generating the deformation displacement moving toward the orienting aim.
The aliding base seat 104 is coupled with the static body by way of the guide track or other sliding coupling method, and can be driven by the precision positioned driving equipment 106, such as guide screw and nut set or precision gear or manual force, and has the positioning lock equipment 107 for locking after the rough positioning.
The actuating electrical source or magnetic energetic source 109 for controlling the deformation quantity of the transducer has the following deformation quantities depending upon the properties of the transducers: 1. The deformation quantity of piezoelectric or electrical field type transducer by way of the electrical source with adjustable voltage.
2. The deformation quantity of magnetic hysteresis elastic t-pe transducer operated by the magnetic field strength of the coils or permanent magnet magnetinized by the adjustable current source.
The applicable technique required for the said design can cite the connecting method of the transducer and its base seat in the ultrasonic working technique. Its biggest difference is that its driving electrical source, but the deformation value of the transducer is changed by the adjustment of the voltage or coil current value or magnetic field strength. It is different from the method, in which the various effects are generated by the vibration of the transducer by means of AC voltage or electric current source in the applicable ultrasonic equipment.
In the practical application, the said design contains single coordinate axes, double coordinate axes and three coordinate axes. Its various applicable examples are as follows: (A) When the design of the singlecoordinate axes are used in the ultrasonic machine working, the micro cutter-feeding adjustment can be added in the working. Its methods certain: (1) As shown in Fig. 2, the DC current level of load wave DC actuating electrical source 201 used for driving the transducer can be adjusted. (Depending upon the kind of the transducer, the voltage or electrical source can be adjusted).Using the change of electrical field or the magnetinizing field generated by t#.-- Id adjustment, the said displacement value can be adjused by the said DC current level; But the DC deformation adjusting value should be reserved for the adjustment in the said load wave deformation value, i.e, load wave deformation value plus wax. Adjusting DC defor mation value should be less than satuiation deformattion value of the transducer.
(2) The micro adjustment should be added in the working, and the amplitudes are changed by the adjusted input voltage voltage or magnetizing coil current value or magnetic field strength and then the cutter-feeding quantity is further changed. The said method is used in the working with non-sensitive amplitude.
(3) Using two sets series transducers, in which a set 302 is used for generating ultrasonic vihrating deformation and another set 301 is used for generating the adjusting deformation displacement. The said method has two sets electrical sources: one set 304 is used fordriving the ultrasonic transducer and another set 303 can be an adjustable electrical source or magnetic source and is used for adjusting the deformation displacement quantity of the transducer used for generating the ultrasonic wave in order to make micro displacement (a- s-loçn in Fig.3).
(4) When the said design is used for the measuring instrument, its applications contain: 1. Micro displacement of the position,i.e. the said adjusted voltage or electrical source used for generating the deformation displacement of the transducer; 2. Micro amendment of the position, i.e. when the rough position has been adjusted and locked, the rough adjusted size can be amended by the change of the deformation value of the said transducer by way of adjustment of the said adjustable electrical source or magnetic field source.
3. The drive used forthe micro compensation of the position error. Because the manufacture of the linear measuring equipment has the micro linear errors which will be accumulated, the structure of the said method, as shown in Fig. 4, contains: - The moving body is a detecting head 401 used for installing the optical or electromagnetic or laser measurement; - The transducer eet 403 is installed between the measuring rule 402 and the main body.Its defor mation direction can be co-axial with the driving direction of the moving body or mess than 900, so that it can transfer the electric energy to the transducer driving electrical source 405 by means of preseted error value memory equipment 404 for changing its elastic value and then for amending the linear error of the measuring rule; - Measuring value processor 406 including the corredive amended display based on the comparison of the counting circuit of signal counting read by the measuring detecting head with the value in the error value memor- equipment 404 for setting the reference error, The features of this method are quick compensation response, no dynamic element, low cost and less trouble.
(5) Adjustable focal distance used in the optical instruments; As shown in Fig. 5, it is an applicable example of the cutting of the Laser, in which ring-shaped trasducer 501 is installed an the middle section of the adjustable knob 502, and the deformation direction of the said transducer 501 is the same as the adjusted axial direction or within 900. Therefore, the micro focal distance can be adjusted by the said adjustable electrical source or magnetic energetic source.
(B) The positioning micro adjusting methods used in the XY co-nS,inates are as follows: (1) The common driving moving bod is installed by the directional difference 900 of the deformations between two sets transducers.
The said method is suitable for the adjustment of extra micro quantity, in which two sets transducers drive their coupled mechanisms respectively. Using two sets transducers and needle bearings 609, 609 installed on two sides of reflex reflectors 605 which are located with 900 to the reflex mirror for driving reflex reflector to make scanning swinging with the micro adjustment. The practical application of the said structure is used for Laser printing machine as shown in Fig. 6.
The main structural feature is that two sets transducers 601, 602 are controlled by the driving electrical source 606 con trolled by the scanning vihrator 605 to drive reflex reflector 611 with needle bearings on its two sides for making a scanning displacement based on the bearing swinging; Fig 6-h shows another side formed by the adjusted deformation displace ment transducer 603 with angular displacement and its coupled and drived mirror piece 604, in which the said trasducer is driver by its driving electrical source 607 by means of its scanning vihrator 608.
(2) It is installed on two sets sliding base seats with independent rough precision adjusting drive and locking equipment and located at the cross position with 900(or certain angle).
'The detormation direction of the transducer is same as its coupled direction. The said method is suitable for the adjustment with large movement quantity.
It is the structural application of the said point(2), in which the said transducer is used for the micro adjustment of final micro displacement with larger displacement quantity.
It can be used for micro adjustment of jig grinder, jig borer or high precision measuring instruments, and cell injection or other cross coordinate equipment. During the application, the said transducer can be operated by the manual adjustment. Excepting it, the precision driving mecharusum (for example, the systems driven by the servo motor or precision guide screw) can be also driven by the digital instruction for coupling with the precision positioning.
(C) The micro displacement mechanism and method used in three axial adjustment by way of the controll of electric energy or magnetic energy on the deformation quantity of the machine deformation displacement transducer contains the working or the measurement or other processing equiptent# Its method contains: (1) It is composed of 3 sets transducers which show X.Y.Z.
or#entin# deformations respe#tively for driving commonly 2 moving body. They have independent adjustable driving electrical sources respectively.
(2)It is composed of 3 sets transducers installed respectively on the locked sliding base seats with X.Y.Z. three dimensional axes for independent displacement adjustable drive, in which the deformation direction of each transducer is the same as its coupled axlaldirection and controlled by independent adjust able driving electrical source.
When the structure described in point (1) is used in the cutting of crystal piece or sculpture working, the left and right displacement as well as the front and return displacement are generated by X and Y axial transducers, and the depth displace ment is generated by Z axial transducer. The deformation according to the program instruction is controlled by the human or by the digital control instruction, as the present applicable digital control tooling machine, in which the servo motor and precision steel ball screw rod are replaced by the transducers which can make the deformation displacement.
Moreover, in the point(2), the transducers are installed alone or installed on the said structure used for digital control driving element, so that it can be used for the adjustment of last extra micro quantin-.
TY#e moving body of the said structure can be used for the working cutters or for the measuring instruments or for laser equipments or for a cell injector or for the high frequency response control which needs X.Y.Z. axial precision displacement adjustment.
(D) The angle deformation displacement control is composed of the twisted ted transducers, as shovn in Fig. 6-A, it is driven by the electrical circuit and the angle displacemtn is controlled by the quantity of the input electrical energy on the angle dis placemen adjusting equipment for making the micro control function.
(E) Concerning the multi-axial application, many sets transducers accept respectis-el- the input actualing energy to generate the common or the individual deformation displacemenT for driving various measuring instruments or optical or machine movable elements.Fig. 7 is an applicable example of the laser printing machine, in which the current lens used forthe scannin is replaced by a set of lens 705 supported by 4 sets of transducers 01, 702, 703, 704. The said 4 sets transducers are controlled by the driving electrical source 706 and scanning vibrator 7C'7 for generating the deformations one by one, so that the lens 705 will generate the scannin displacement period.The further features are as follows: - The condense lens (or condense reflector or output reflector .or output reflector or laser medium used for generating the exaited light) located on the. said transducers can generate the following functions by means of ON or OFF driving program instructions on the X and Y coordinate axes controlled by the microprocessor or computer based on the sampling signs or character or diagram signs of the inlaid original copies:: - A character or diagram scanning track is gotten by the character vector movement; - e said displacements contain X-axial horizontal deformation disformation displacement and the vector displacement generated 1n- the said two displacements; - The excited light generator can "cut outer or "emit" the signs in the displacement according to the instructions 5 presented character or diagram shapes.
When the said main functions are used for making displacements in various laser applicable equipments,the speed of its frequency response is better than the present various tes. In the said various applications, the displacement function can be ac.hie-ed by the transducers which can change the electrical energy inter machine deformation displacement. If the driven assembly itself ls composed of the transducers, then the compound driving electrical energy can be inputed by the said elements at the same time.
For example, when the cutter used for cutting the ultrasonic wave makes a micro cutter-feeding, he cutting vibration and the micro feeding quantity can be controlled at the same time by DC voltage adjusted on the magnetizing coils of the transducers which can generate the ultrasonic vibrations, When we want to make a micro adjustment on a quartz lens with piezoelectric effect, the deformation axial direction of the quartz lens can be made as the required deformation axial direction, including: axial deformation thickness (as shown in Fig. 8), wherein the quartz is cut in the direction of X-axe to Z-cut lens, and the ring-shaped conducting membranes are plated on the outer ring of two side of the lens for inputing the electrical energy in order to generate the axial deformation, and then the deformation quantity is changed by the adjustment of the input electrical energy for adjusting the focal distance.
When the used element is a magnetizing elastic te in the said various applicable examples, the method of magnetic field adjustment contains the coils excited by the input electrical current or the adjusted permanent magnet applying a magnetic field strength on the said elements for changing its deformation quantity.
Furthermore, when the applied energy increases or decreases in the transducers in spite of pieozo electric type or electric field elastic type, it has always a slight delay phenomenon and the off set arisen from zero during the input. In order to rise its precision degree, the input electrical source of transducers in electric fielf elastic type or in pieozoecric effect type can be designed as a switch, so that it has a base electric current value with the polarit+ always same as the input adjusted electric source; similarly, the magnetic hysteresis elastic tlpe transducer can be designed b the input electric source as that it has a base magnetizing current with the polarity same as the input adjusted electrical source or that the permanent magnet is used for replacing the said base magnetizing current.
Based on the above, the present invention pro#ides a solid element for replacing the dynamic mechanism in order to make a more precision micro displacement drive with lower cost and finer micro adjustment. In the acceptance of the digital control drive, the small size has quicker frequency response.
It can increase the micro drive effect of the precision machines, measuring instruments, optical instruments or other applicable equlpements. Please examine it.
BRIEF DESCRIPTION OF THE DRAWINGS: Fig. 1 is a view of the structural prineiple in the present invention.
Fig. 2 is a view of the applicable example of the deformation displacement drive and control of the transducer in the present invention.
Fig. 3 is a view of the applicable example of two sets series installed transducers used respectively for the vibration and the adjustment of the displacement quantity.
Fig. 4 is a view of the applicable example of the present invention used for the error compensation of the linear measurement.
Fig, 5 is a view of the applicable example of the ringshaped transducers used for the micro adjustment of the focal distance.
Fig. 6 is a view of the applicable example of X#-coordinate used in the laser reflex reflector for making a s'rnthetic scanning displacement reflextion.
Fig. 6-A is a view of the applicable example of the displacement element of the angle displacement-deformation used as the scanning displacement reflex reflector.
Fig. 7 is a view of the applicable example of a laser printing machine wit multi-axial deformation displacement transducers.
Fig. 8 is a view of the applicable example of a quartz lens with common used transducer used for generating the focal condensation and the axial deformation.

Claims (1)

  1. CLAN:
    1. A micro displacement machanisum and method of machine deformation and transducer deformation quantity controlled by electrical source or magnetic energy, wherein it is composed mainly of orienting aim, moving body, transducer, sliding base seat, static body with slide track, rough positioned driving element, locking equipment, precision measuring equipment and adjustable electrical source & magnetic energetic source used for controlling the transducer, in which:: - The precision measuring equipment used for displaying the rough positioned moving quantity and final moving quantity, including laser measuring instrument or optical interference ri-easuring instrument or other precision measuring equipments; - The moving boQ- and the orienting aim depending upon the used equipment, including a measuring head of measuring instrument, an optical lens, a transfer head of laser, a working cutter, an injection needle of the cell, an optical reflex reflector or other precision micro displacement equipment;; - The transduces used for transferrln the input magnetic energy irzc the machine deforcation displacement, including elastic elemenr of magnetic hysteresis, such as N F alloy, ferrite, or for transferring the input electrical energy into the machine deformation displacement, such ss titanite bariun, titanite lead or quartz, rochelle-salt, ADP.
    They are installed (pasted or locked or soldered or casted) between the moving body and the sliding base seat, in which the relative deformation quantity will be generated by the other actuating electric or magnetic energy and the angle between the deformation orientation and the orienting aim is 00 or within gO for generating the deformation displacement moving toward the orienting aim.
    The sliding base seat coupled with the static body by WEr of the guide track or other sliding coupling method, and can be driven by the precision positioned driving equipment, including guide screw and-nut set or precision gear or manual force, and has the positioning lock equipment for locking after the rough positioning.
    The actuating electrical source or magnetic energetic source for controlling the deforma--ion quantity of transducer has the following deformation quantities depending upon the properties of the transducers: (1) The deformation quantity of piezoelectric or electric field type transducer by way of the electrical source with adjustable voltage; or (2) The deformation quantity of magnetic hysteresis elastic type transducer operated by the magnetic field strength of the coils or permanent magnet magnetinized by the adjustable current source; - Its driving electrical source is not a vibrating electrical source.But the deformation value of t'le said transducer is changed by the change of the voltage or current value on the coils or the magnetic field value.
    2. The micro displacement mechanism & ethod of machine deformation & transducer deformationiquantity controlled ba- electrical source e or magnetic energy as described in claim, wherein its application contains single coordinate axes, double coordinate axes and three coordinate axes or multi-axial and angle displacement type.
    3. The design of single coordinate axes as described in claim 2 used ibr the working of the ultrasonic machine, and further used for adjusting the micro cutter-feeding during the working, wherein its method contains: - The DC current level of load wave DC actuating electrial source used for driving the transducer can be adjusted.
    (Depending upon the kind of the transducer, the voltage or electrical source can be adjusted.) using the change of electrical field or the magnetinizing field generated by the said adjustment, the said displacement value can be adjusted by the said DC current level; but the DC deformation adjusting value should be reserved for the adjustment in the said load wave deformation nlue plus max. adjusting DC deformation value should be less than saturation deformation value of the transducer.
    4. The adjustment of the ultrasonic mechanical working cutter-feeding quantity as described in claim 3 contains: - The micro adjusting step should be added in the working.
    Its amplitude is changed b#T the adjustment of the input voltage or magnetizing current value of magnetizing coils or magnetic field value of the permanent mane;, ano furthermore the cutter-feeding quantity will be #rianged.
    (5) The adjustment of the ultrasonic mechanical working cutter-feeding quantity as described in claim 3 contains: - Using two sets series transducers, in which a set is used for generating ultrasonic vibrating deformation and another set is used for generating the adjusting deformation displacement. The said method has two sets electrical sources: one set is used for driving the ultrasonic transducer and another set can be an adjustable electrical source or magnetic source used for adjusting the deformation displacement quantity of the transducer.
    (6) The micro displacemen- mechanism and method of machine deformation and transducer deformation quantity controlled by electrical source or magnetic energy as described in claim 1, wherein it contains the following functions, when it is used in the measuring instruments: - Micro displacement of the position, i.e. the said adjusted voltage or electrical source used for generating the deformation displacement of the transducer; - Micro amendment of the position, i.e. when the rough position has been adjusted and locked, the rough adjusted size can be amended by the change of the deformation value of the said transducer by way of the adjustment of the said adjustable electrical source or magnetic field source.
    7. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controlled by electri#cal source or magnetic energy as described in claim 1, wherein the drive of positional error micro compensation contains: - The moving body is a detecting head used for installing the optical or electromagnetic or laser measurement; - The transducer set is installed between the measuring rule and the main body.Its deformation direction can be coaxial with the driving direction of the moving body or less than 90 , so that it can transfer the electric energs- to the transducer driving electrical source by w-a± of preseted error value memory equipment for changing its elastic value and further for amending the linear error of the measuring rule; - Measurin value processor including the corrective amended display based on the comparison ofthe counting circuit of signal counting read by the measuring detecting head with the value in the error value memory equipment for setting the reference error.
    8. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controlled by electrical source or magnetic energy as described in claim 1, wherein it can be used for the adjusting the focal distance of the optical instrument, in which the ring-shaped transducer is installed on the middle section of the adjustable knob, and the deformation direction of the transducer is the same as the adjusted axial direction or the different angle is less than 90. Therefore, the micro adjustment of the focal distance will be done by the said adjustable electrical source or magnetic energetic source.
    9. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled b+; electrical source or magnet energy as described in claim 1, herein the positioning micr adjusting methods used in the XY-coordinate is as follows: - The common driving moving body is installed by the direc tional different certain angle or 90 of the deformations between two sets of transducers; or - It is installed on two sets of sliding base seats with independent rough precision adjusting drive and locking equipment and located at the cross position with 900 (or a certain angle).The deformation direction of the trans ducer is same as its coupled direction.
    10. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled by the electrical source or magnetic energy as described in claim 1, wherein it can be used for the laser printing machine and has the following structural features: - Using two sets of transducers and needle bearings installed on two sides of reflex reflectors which are located with 90 to the reflex mirror for driving reflex reflector to make a scanning swinging with the micro adjustment.
    11. The micro displacement mechanism and method of machine deformation a#d transducer deformation quality controled by electrical source or magnetic energy as described in claim l, wherein its multi-axial application contains many sets of transducers accepting respectively the input actuating energy for generating the common or the individual.
    deformation displacement and further for driving various measuring instruments or optical or machine movable elements.
    12. The multi-axial applicable equipment as described in claim 11 contains 4 sets of transducers supported bo- a lens. The said 4 sets of transducers are controled bo the driving electrical source and scanning vibrator. Furthermore, the condense lens (or.condense reflector or output reflector or loser medium used for generating the excited light) located on the said transducer can generate the functions by way of ON or OFF dri -inc program instructions on the X and Y coordinate axe: controled by the microprocessor or computer based on the sampling signs or character or diagram signs of the inlaid original copies:A character or diagram scanning track gotten by the character vector movement; X-axial horizontal deformation displacement and Y-axial vertical deformation displacement and the vector displacement generated bw the said two displacement; The excited light generator can "cut out" or "emit" the sign in the displacement according to the instructions of preseted character or ra shapes.
    13. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled by electrical source or magnetic energy as described in claim 1, wherein the said transducer can be used for the - micro adjustment of final micro displacement with bigger displacement quantity, including rig grinder, jig borer or high precision measuring instruments, cell injection and other cross coordinate equipment. The said transducer can be operated by the manual adjustment. Excepting it, the precision driving mechanism (for example, the system driven b the servo motor or precision guide screw) can be also driven by the digital instruction for coupling with the precision positioning.
    14. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled by the electrical source or magnetic energy as described in claim 1, wherein it can be used for three axial adjustment, including the working or the measurement or other processing equipment.Its method contains: - 3 sets transducers which show XYZ orienting deformations respectively ffi r driving commonly a moving body and have independent adjustable driving electrical sources respectivel; - 3 sw transducers installed respectively on the locked sliding base seats with XZZ three dimensional axes for indepedent dIsplacement adjustable drive; - The said XZZ axial transducers can perform the deformation according to the program instruction based on the manual operation or the control of a digital control instruction; - The transducers are installed alone or installed on the structure used for the digital control driving element, so that it can be used for the adjustment of last micro quantity.
    15. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled bn- electrical source or magnetic energy as described in claim 1, wherein the quartz is cut in the direction of X-zxe to R-CUT lens, and the ring-shaped conducting membranes are electroplated on the outer ring of two sides of the lens for inputting the electrical energy in order to generate the oxial deformation, and then the deformation quantity is changed b- the adjustment of the input electrical energy for adjusting the focal distance.
    16. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controled by electrical source or magnetic energy as described in claim 1, wherein the used element can be a magnetizing elastic t?Te, in which the method of magnetic field adjustment contains the coils excited by the input electrical current.
    or the adjusted permanent magnet applying a magnetic field strength on the said elements for changing its deformation quantity.
    17. The micro displacement mechanism and method of machine deformation and transducer deformation quantity controlled by electrical source or magnetic ener#- as described in claim 1, wherein its precision degree can be increased, if the input electrical source of transducers in electrical field elastic type or in piezoelectric effect type are designed as a switch, i.e. it has a base electric current value with the polarit always equal to the input adjusted electric source; simIlarly, the magnetic hysteresis elastic tarpe transducer can be designed by the input electric source as that it has a has magnetizing current with the polarity same as the input adjusted electrical source or that the permanent magnet is used for replacing the said base magnetizing current.
GB08629732A 1986-12-12 1986-12-12 Micro displacement machine element mechanism and method utilising control by electrical or magnetic source Pending GB2198669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08629732A GB2198669A (en) 1986-12-12 1986-12-12 Micro displacement machine element mechanism and method utilising control by electrical or magnetic source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08629732A GB2198669A (en) 1986-12-12 1986-12-12 Micro displacement machine element mechanism and method utilising control by electrical or magnetic source

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GB8629732D0 GB8629732D0 (en) 1987-01-21
GB2198669A true GB2198669A (en) 1988-06-22

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741949A1 (en) * 1995-12-04 1997-06-06 Srdp Sa Vegetal and animal tissue sample preparation device for microscopic examination

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2741949A1 (en) * 1995-12-04 1997-06-06 Srdp Sa Vegetal and animal tissue sample preparation device for microscopic examination

Also Published As

Publication number Publication date
GB8629732D0 (en) 1987-01-21

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