GB2192091B - Apparatus for detecting x-rays or electrons in electron microscopes - Google Patents

Apparatus for detecting x-rays or electrons in electron microscopes

Info

Publication number
GB2192091B
GB2192091B GB8608349A GB8608349A GB2192091B GB 2192091 B GB2192091 B GB 2192091B GB 8608349 A GB8608349 A GB 8608349A GB 8608349 A GB8608349 A GB 8608349A GB 2192091 B GB2192091 B GB 2192091B
Authority
GB
United Kingdom
Prior art keywords
electrons
rays
detecting
electron microscopes
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB8608349A
Other versions
GB2192091A (en
GB8608349D0 (en
Inventor
Charles Edward Whitehouse
Christopher Tyrrell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Link Analytical Ltd
Original Assignee
Link Analytical Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Link Analytical Ltd filed Critical Link Analytical Ltd
Priority to GB8608349A priority Critical patent/GB2192091B/en
Publication of GB8608349D0 publication Critical patent/GB8608349D0/en
Publication of GB2192091A publication Critical patent/GB2192091A/en
Application granted granted Critical
Publication of GB2192091B publication Critical patent/GB2192091B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H01J2237/24415—X-ray
    • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB8608349A 1986-04-04 1986-04-04 Apparatus for detecting x-rays or electrons in electron microscopes Expired - Fee Related GB2192091B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8608349A GB2192091B (en) 1986-04-04 1986-04-04 Apparatus for detecting x-rays or electrons in electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8608349A GB2192091B (en) 1986-04-04 1986-04-04 Apparatus for detecting x-rays or electrons in electron microscopes

Publications (3)

Publication Number Publication Date
GB8608349D0 GB8608349D0 (en) 1986-05-08
GB2192091A GB2192091A (en) 1987-12-31
GB2192091B true GB2192091B (en) 1990-07-11

Family

ID=10595738

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8608349A Expired - Fee Related GB2192091B (en) 1986-04-04 1986-04-04 Apparatus for detecting x-rays or electrons in electron microscopes

Country Status (1)

Country Link
GB (1) GB2192091B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5369275A (en) * 1991-07-11 1994-11-29 International Superconductivity Technology Center Apparatus for solid surface analysis using X-ray spectroscopy
US5235817A (en) * 1992-04-02 1993-08-17 North American Philips Corp. Cryogenic cooling apparatus for radiation detector
US5302831A (en) * 1992-04-30 1994-04-12 North American Philips Corporation Dewar construction for cooling radiation detector cold finger
US5569925A (en) * 1994-06-23 1996-10-29 Philips Electronics North America Corporation Mechanical shutter for protecting an x-ray detector against high-energy electron or x-ray damage
US5552608A (en) * 1995-06-26 1996-09-03 Philips Electronics North America Corporation Closed cycle gas cryogenically cooled radiation detector
US5816052A (en) * 1997-02-24 1998-10-06 Noran Instruments, Inc. Method and apparatus for mechanically cooling energy dispersive X-ray spectrometers

Also Published As

Publication number Publication date
GB2192091A (en) 1987-12-31
GB8608349D0 (en) 1986-05-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20020404