GB2165640B - Gas or vapour concentration monitoring - Google Patents

Gas or vapour concentration monitoring

Info

Publication number
GB2165640B
GB2165640B GB08425918A GB8425918A GB2165640B GB 2165640 B GB2165640 B GB 2165640B GB 08425918 A GB08425918 A GB 08425918A GB 8425918 A GB8425918 A GB 8425918A GB 2165640 B GB2165640 B GB 2165640B
Authority
GB
United Kingdom
Prior art keywords
gas
concentration monitoring
vapour concentration
vapour
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08425918A
Other versions
GB2165640A (en
GB8425918D0 (en
Inventor
Gillies David Pitt
David Neville Batchelder
Roger Edwards Jones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
STC PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STC PLC filed Critical STC PLC
Priority to GB08425918A priority Critical patent/GB2165640B/en
Publication of GB8425918D0 publication Critical patent/GB8425918D0/en
Publication of GB2165640A publication Critical patent/GB2165640A/en
Application granted granted Critical
Publication of GB2165640B publication Critical patent/GB2165640B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB08425918A 1984-10-13 1984-10-13 Gas or vapour concentration monitoring Expired GB2165640B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08425918A GB2165640B (en) 1984-10-13 1984-10-13 Gas or vapour concentration monitoring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08425918A GB2165640B (en) 1984-10-13 1984-10-13 Gas or vapour concentration monitoring

Publications (3)

Publication Number Publication Date
GB8425918D0 GB8425918D0 (en) 1984-11-21
GB2165640A GB2165640A (en) 1986-04-16
GB2165640B true GB2165640B (en) 1988-05-18

Family

ID=10568156

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08425918A Expired GB2165640B (en) 1984-10-13 1984-10-13 Gas or vapour concentration monitoring

Country Status (1)

Country Link
GB (1) GB2165640B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3633931A1 (en) * 1986-10-04 1988-04-07 Kernforschungsz Karlsruhe METHOD AND DEVICE FOR CONTINUOUSLY MEASURING THE CONCENTRATION OF A GAS COMPONENT
US4796996A (en) * 1987-08-14 1989-01-10 American Telephone And Telegraph Company, At&T Bell Laboratories Laser temperature modulation and detection method
GB8722283D0 (en) * 1987-09-22 1987-10-28 Univ Manchester Gas detection
SE8802536D0 (en) * 1988-07-07 1988-07-07 Altoptronic Ab METHOD AND APPARATUS FOR SPECTROSCOPIC MEASUREMENT OF THE CONCENTRATION OF A GAS IN A SAMPLE
EP0364642A1 (en) * 1988-09-22 1990-04-25 The Victoria University Of Manchester Gas detection method and apparatus
DE4000584A1 (en) * 1990-01-10 1991-07-11 Muetek Gmbh METHOD AND DEVICE FOR DETERMINING CONCENTRATION OF ISOTOPES
US5448071A (en) * 1993-04-16 1995-09-05 Bruce W. McCaul Gas spectroscopy
US5459574A (en) * 1994-10-14 1995-10-17 Spectral Sciences Inc. Off-line-locked laser diode species monitor system
US5572031A (en) * 1994-11-23 1996-11-05 Sri International Pressure- and temperature-compensating oxygen sensor
DE19525415C2 (en) * 1995-07-12 1997-11-27 Optikzentrum Nrw Gmbh Oz Method and device for determining the water vapor concentration or the dew point
US5963336A (en) * 1995-10-10 1999-10-05 American Air Liquide Inc. Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use
US5742399A (en) * 1996-04-18 1998-04-21 American Air Liquide, Inc. Method for stabilizing the wavelength in a laser spectrometer system
US5818578A (en) * 1995-10-10 1998-10-06 American Air Liquide Inc. Polygonal planar multipass cell, system and apparatus including same, and method of use
US5880850A (en) * 1996-04-18 1999-03-09 American Air Liquide Inc Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy
US5949537A (en) 1996-04-18 1999-09-07 American Air Liquide Inc. In-line cell for absorption spectroscopy
US6084668A (en) * 1997-07-10 2000-07-04 American Air Liquide Inc. In-line cell for absorption spectroscopy
US5835230A (en) * 1997-07-10 1998-11-10 American Air Liquide Inc. Method for calibration of a spectroscopic sensor
US6442736B1 (en) 2000-10-03 2002-08-27 L'air Liquide Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'expolitation Des Procedes Georges Claude Semiconductor processing system and method for controlling moisture level therein

Also Published As

Publication number Publication date
GB2165640A (en) 1986-04-16
GB8425918D0 (en) 1984-11-21

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee