GB2164164B - Step and repeat apparatus - Google Patents

Step and repeat apparatus

Info

Publication number
GB2164164B
GB2164164B GB08512679A GB8512679A GB2164164B GB 2164164 B GB2164164 B GB 2164164B GB 08512679 A GB08512679 A GB 08512679A GB 8512679 A GB8512679 A GB 8512679A GB 2164164 B GB2164164 B GB 2164164B
Authority
GB
United Kingdom
Prior art keywords
repeat apparatus
repeat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08512679A
Other versions
GB2164164A (en
GB8512679D0 (en
Inventor
Rex Hinde Sandbach
Alan Poole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CO ORDINATE Tech Ltd
Original Assignee
CO ORDINATE Tech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CO ORDINATE Tech Ltd filed Critical CO ORDINATE Tech Ltd
Priority to US06/747,662 priority Critical patent/US4694776A/en
Publication of GB8512679D0 publication Critical patent/GB8512679D0/en
Publication of GB2164164A publication Critical patent/GB2164164A/en
Application granted granted Critical
Publication of GB2164164B publication Critical patent/GB2164164B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB08512679A 1984-06-21 1985-05-20 Step and repeat apparatus Expired GB2164164B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US06/747,662 US4694776A (en) 1984-06-21 1985-06-21 Step and repeat apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848415912A GB8415912D0 (en) 1984-06-21 1984-06-21 Step and repeat apparatus

Publications (3)

Publication Number Publication Date
GB8512679D0 GB8512679D0 (en) 1985-06-26
GB2164164A GB2164164A (en) 1986-03-12
GB2164164B true GB2164164B (en) 1987-11-04

Family

ID=10562800

Family Applications (2)

Application Number Title Priority Date Filing Date
GB848415912A Pending GB8415912D0 (en) 1984-06-21 1984-06-21 Step and repeat apparatus
GB08512679A Expired GB2164164B (en) 1984-06-21 1985-05-20 Step and repeat apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB848415912A Pending GB8415912D0 (en) 1984-06-21 1984-06-21 Step and repeat apparatus

Country Status (1)

Country Link
GB (2) GB8415912D0 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311192B2 (en) * 1972-07-26 1978-04-19
JPS5539520B2 (en) * 1972-11-14 1980-10-11
JPS50112962A (en) * 1974-02-16 1975-09-04
DE2833658A1 (en) * 1978-08-01 1980-02-21 Reinhard Wirtgen MACHINE FOR EARTH DIMENSIONS
US4312411A (en) * 1978-12-12 1982-01-26 Caterpillar Tractor Co. Slide rail assembly for a work vehicle
FI833534A (en) * 1982-10-08 1984-04-09 Northern Ind Sales Service MATERIALBEHANDLINGSANORDNING

Also Published As

Publication number Publication date
GB2164164A (en) 1986-03-12
GB8415912D0 (en) 1984-07-25
GB8512679D0 (en) 1985-06-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee