GB2137802B - Electron filter - Google Patents

Electron filter

Info

Publication number
GB2137802B
GB2137802B GB08302214A GB8302214A GB2137802B GB 2137802 B GB2137802 B GB 2137802B GB 08302214 A GB08302214 A GB 08302214A GB 8302214 A GB8302214 A GB 8302214A GB 2137802 B GB2137802 B GB 2137802B
Authority
GB
United Kingdom
Prior art keywords
electron filter
electron
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08302214A
Other versions
GB8302214D0 (en
GB2137802A (en
Inventor
John Benjamin
Andrew J Dixon
Karl A Gehring
Michael Keenlyside
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thor Cryogenics Ltd
Original Assignee
Thor Cryogenics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thor Cryogenics Ltd filed Critical Thor Cryogenics Ltd
Priority to GB08302214A priority Critical patent/GB2137802B/en
Publication of GB8302214D0 publication Critical patent/GB8302214D0/en
Publication of GB2137802A publication Critical patent/GB2137802A/en
Application granted granted Critical
Publication of GB2137802B publication Critical patent/GB2137802B/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/40Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
GB08302214A 1983-01-27 1983-01-27 Electron filter Expired GB2137802B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08302214A GB2137802B (en) 1983-01-27 1983-01-27 Electron filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08302214A GB2137802B (en) 1983-01-27 1983-01-27 Electron filter

Publications (3)

Publication Number Publication Date
GB8302214D0 GB8302214D0 (en) 1983-03-02
GB2137802A GB2137802A (en) 1984-10-10
GB2137802B true GB2137802B (en) 1986-06-04

Family

ID=10537008

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08302214A Expired GB2137802B (en) 1983-01-27 1983-01-27 Electron filter

Country Status (1)

Country Link
GB (1) GB2137802B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998035358A1 (en) * 1997-02-06 1998-08-13 The University Of Miami Iso-energetic intensity modulator for therapeutic electron beams, electron beam wedge and flattening filters
US7718961B1 (en) * 2007-01-15 2010-05-18 Raymond Browning Photoelectron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB542497A (en) * 1940-05-02 1942-01-12 James Dwyer Mcgee Improvements in or relating to electron discharge devices
US2266621A (en) * 1940-08-23 1941-12-16 Rca Corp Cathode ray tube system
GB558962A (en) * 1942-07-20 1944-01-28 Hans Gerhard Lubszynski Improvements in or relating to electron discharge devices

Also Published As

Publication number Publication date
GB8302214D0 (en) 1983-03-02
GB2137802A (en) 1984-10-10

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee